Fabrication and analysis of radiofrequency MEMS series capacitive single-pole double-throw switch
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...Cratio = ( Cdown Cup ) = ε0εrWw t ε0Ww g+ t εr (14)...
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"Fabrication and analysis of radiofr..." refers background in this paper
...The magnitude of stiction forces such as capillary, hydrogen bonding, capacitive charging, and Van der Waal forces are reduced by a factor of nine as these forces are directly proportional to the contact area.(14,15) See-saw configuration has also reduced the number of SPDT switches resulting in an area reduction of more than 85% (actual area 1⁄4 0....
[...]
410 citations
"Fabrication and analysis of radiofr..." refers background in this paper
...The magnitude of stiction forces such as capillary, hydrogen bonding, capacitive charging, and Van der Waal forces are reduced by a factor of nine as these forces are directly proportional to the contact area.(14,15) See-saw configuration has also reduced the number of SPDT switches resulting in an area reduction of more than 85% (actual area 1⁄4 0....
[...]
99 citations