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Journal ArticleDOI

Fabrication and Characterization of In0.9Ga0.1O EGFET pH Sensors

03 Aug 2021-THE Coatings (Multidisciplinary Digital Publishing Institute)-Vol. 11, Iss: 8, pp 929
TL;DR: In this paper, the In0.9Ga0.1O EGFET pH sensors were successfully fabricated and exhibited great linearity in the pH value range between 2 to 12.
Abstract: In this study, the In0.9Ga0.1O sensing membrane were deposited by using the RF magnetron sputtering at room temperature and combined with commercial MOSFETs as the extended gate field effect transistor (EGFET) pH sensors. The sensing performance of the In0.9Ga0.1O EGFET pH sensors were measured and analyzed in the pH value of range between 2 to 12. In the saturation region, the pH current sensitivity calculated from the linear relationship between the IDS and pH value was approximately 56.64 μA/pH corresponding to the linearity of 97.8%. In the linear region, the pH voltage sensitivity exhibited high sensitivity and linearity of 43.7 mV/pH and 96.3%, respectively. The In0.9Ga0.1O EGFET pH sensors were successfully fabricated and exhibited great linearity. The analyzed results indicated that the In0.9Ga0.1O was a robust material as a promising sensing membrane and effectively used for pH sensing detection application.

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Journal ArticleDOI
TL;DR: The development of an ion-sensitive solid-state device that combines the principles of an MOS transistor and a glass electrode and can be used for measurements of ion activities in electrochemical and biological environments is described.
Abstract: The development of an ion-sensitive solid-state device is described. The device combines the principles of an MOS transistor and a glass electrode and can be used for measurements of ion activities in electrochemical and biological environments. Some preliminary results are given.

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TL;DR: In this article, a site-binding model of the oxide/aqueous electrolyte interface is introduced, in which the adsorbed counter ions form interfacial ion pairs with discrete charged surface groups.
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TL;DR: In this article, a multi-species microprobe structure for potentiometric measurements and the appropriate patterning techniques of the chemically-sensitive membranes is described, which allows successive patterning of both vacuum-deposited inorganics and spin coated polymers and gels.

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Journal ArticleDOI
TL;DR: In this paper, the authors used an extended-gate field effect transistor (EGFET) to obtain the response of zinc oxide (ZnO) as a function of pH.
Abstract: The objective of this work is the study and characterization of zinc oxide (ZnO) as pH sensor. We used an extended-gate field-effect transistor (EGFET) to obtain the response of ZnO as a function of pH. Sol-gel was used for the production of ZnO films because this is a low cost and easy fabrication procedure. The ZnO powder was obtained at different temperatures of calcination, from 150 up to 500°C. The samples were investigated by x-ray diffraction, infrared spectroscopy, thermogravimetric analysis and differential thermal analysis. The films were investigated as pH sensors (range 2–12) and the ZnO EGFET shows a sensitivity of 38mV∕pH.

193 citations

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TL;DR: In this article, the unusual potential/pH behavior of hydrous oxide layers grown on iridium under potential cycling conditions is interpreted on the basis of a model which describes the interaction between the acid-base and redox properties of this type of system.

175 citations