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Proceedings ArticleDOI

Frequency-Mismatch-Tolerant Silicon Vibratory Gyroscope without Vacuum Package for Automotive Applications

24 Jul 2006-pp 1-6

AbstractThis paper describes a low-cost silicon vibratory gyroscope that tolerates a relatively large mismatch between the driving-mode and sensing-mode frequencies. The gyroscope is based on beam-mass structure and realized by one silicon proof mass and two beams for the driving and sensing mode. Piezoelectric actuation is used to produce a large driving mode vibration displacement (about 100 mum) with about 32 Vpeak-to-peak. Two tiny sensing beams are separated from the vertical silicon beam to increase the sensitivity while keeping the sensing-mode resonant frequency high. Piezoresistive and piezoelectrical sensing mechanisms are applied to two different gyroscopes. The gyroscope operating at 1-4 kHz is capable of sub-degree-per-second angular rate sensitivity without any vacuum package.

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Citations
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01 Jan 2002
Abstract: This paper reports a high-performance vibrating ring gyroscope fabricated in (111) oriented single-crystal silicon (SCS). High-performance microgyroscopes are needed in many applications, including inertial navigation, control, and defense/avionics/space. The ring gyroscope provides a number of advantages, including excellent mode matching, high-resolution, low zero-rate output, and long-term stability. In this paper, a SCS vibrating ring gyroscope with high aspect ratio silicon on glass structure was designed, fabricated and tested. The ring is 2.7mm in diameter and 150μm thick. The gyro has the following measured performance: high Q (12000), good nonlinearity (0.02%), large sensitivity (132 mV/°/sec), low output noise (10.4°/hr/Hz) and high resolution (7.2°/hr). The maximum bias shift is less than ±1°/sec over 10 hours without thermal control.

98 citations


References
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01 Jan 2002
Abstract: This paper reports a high-performance vibrating ring gyroscope fabricated in (111) oriented single-crystal silicon (SCS). High-performance microgyroscopes are needed in many applications, including inertial navigation, control, and defense/avionics/space. The ring gyroscope provides a number of advantages, including excellent mode matching, high-resolution, low zero-rate output, and long-term stability. In this paper, a SCS vibrating ring gyroscope with high aspect ratio silicon on glass structure was designed, fabricated and tested. The ring is 2.7mm in diameter and 150μm thick. The gyro has the following measured performance: high Q (12000), good nonlinearity (0.02%), large sensitivity (132 mV/°/sec), low output noise (10.4°/hr/Hz) and high resolution (7.2°/hr). The maximum bias shift is less than ±1°/sec over 10 hours without thermal control.

98 citations


Journal ArticleDOI
Abstract: The limitations of the photolithography-based micromachining technologies defines the upper-bound on the performance and robustness of micromachined gyroscopes. Conventional gyroscope designs based on matching (or near-matching) the drive and sense modes are extremely sensitive to variations in oscillatory system parameters that shift the natural frequencies and introduce quadrature errors. Nonconventional design concepts have been reported that increase bandwidth to improve robustness, but with the expense of response gain reduction. This paper presents a new approach that may yield robust vibratory MEMS gyroscopes with better gain characteristics while retaining the wide bandwidth. The approach is based on utilizing multiple drive-mode oscillators with incrementally spaced resonance frequencies to achieve wide-bandwidth response in the drive-mode, leading to improved robustness to structural and thermal parameter fluctuations. Enhanced mode-decoupling is achieved by distributing the linear drive-mode oscillators radially and symmetrically, to form a multidirectional linear drive-mode and a torsional sense-mode; minimizing quadrature error and zero-rate output. The approach has been implemented on bulk-micromachined prototypes fabricated in a silicon-on-insulator (SOI)-based process, and experimentally demonstrated.

97 citations


"Frequency-Mismatch-Tolerant Silicon..." refers background in this paper

  • ...Thus, accurate match between the driving-mode and sensing-mode resonant frequencies is required, and is a challenge for the current gyroscope design and fabrication [6-7]....

    [...]


Proceedings ArticleDOI
07 Aug 2002
Abstract: This paper reports a high-performance vibrating ring gyroscope fabricated in [111] oriented single-crystal silicon (SCS). High-performance microgyroscopes are needed in many applications, including inertial navigation, control, and defense/avionics/space. The ring gyroscope provides a number of advantages, including excellent mode matching, high-resolution, low zero-rate output, and long-term stability. In this paper, a SCS vibrating ring gyroscope with a high aspect ratio silicon on glass structure was designed, fabricated and tested. The ring is 2.7 mm in diameter and 150 /spl mu/m thick. The gyro has the following measured performance: high Q (12000), good nonlinearity (0.02%), large sensitivity (132 mV//spl deg//sec), low output noise (10.4/spl deg//hr//spl radic/(Hz)) and high resolution (7.2/spl deg//hr). The maximum bias shift is less than /spl plusmn/1/spl deg//sec over 10 hours without thermal control.

86 citations


"Frequency-Mismatch-Tolerant Silicon..." refers background in this paper

  • ...Thus, accurate match between the driving-mode and sensing-mode resonant frequencies is required, and is a challenge for the current gyroscope design and fabrication [6-7]....

    [...]


Proceedings ArticleDOI
01 Jan 2004
Abstract: This paper presents the design and implementation of an in-plane solid-mass single-crystal silicon tuning fork gyro that has the potential of attaining sub-deg/hr rate resolutions. A design is devised to achieve high Q in the drive and sense resonant modes (Q/sub drive/=81,000 and Q/sub sense/=64,000) with effective mode decoupling. The gyroscope was fabricated on 40 /spl mu/m thick silicon-on-insulator (SOI) using a simple two-mask process. The drive and sense resonant modes were balanced electrostatically to within 0.07% of each other and the measured rate results show a sensitivity of 1.25 mV//spl deg//s in a bandwidth of 12 Hz.

50 citations


Proceedings ArticleDOI
10 Mar 2001
Abstract: A Quartz Rate Sensor (QRS) family based on the Coriolis effect is presented. The architecture is highly capable of detecting internal failures. The MEMS solid-state rate gyro (known by the trade name GyroChip/sup (R)/) consists of a third generation microminiature double-ended quartz tuning fork, as well as third generation electronics in the form of a mixed signal ASIC. The high reliability device has no wearout mechanisms and features a micromachined sensing element. The sensor requirements, theory of operation, architecture, packaging family and performance parameters are described. In addition, system safety considerations and a description of the comprehensive self-monitoring features are provided.

12 citations