Gas Sensor Platform for Rugged Applications
01 Oct 2018-
TL;DR: In this paper, a gas sensor platform technology which is non-MEMS and doesn't require any complex packaging for example hanging the chips in air while packing to reduce the power consumption is presented.
Abstract: In this paper, we present a gas sensor platform technology which is non-MEMS and doesn't require any complex packaging for example hanging the chips in air while packing to reduce the power consumption. Our work is based on changing the substrate material to borofloat glass, which has much lower thermal conductivity in comparison to silicon and alumina, hence reducing the thermal losses making it possible to operate the device even with lower power consumption. The presented process has lesser complexities and the process cost is certainly reduced, as it does not require thermal oxidation and bulk micromachining. Different substrates (silicon, alumina and glass) have been simulated using COMSOL to depict the benefit of lower thermal conductivity. Fabricated gas sensor platform is rugged and reliable; the same has been verified by maximum temperature test, long term ON test and ON-OFF pulse test.
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TL;DR: In this paper, thin films of indium tin oxide (In2O3+SnO2) were grown on alumina substrate using the direct evaporation method and the sensing characteristics of these films to methanol vapors were studied at room temperature.
Abstract: Thin films of indium tin oxide (In2O3+SnO2) (ITO) were grown on alumina substrate using the direct evaporation method. The sensing characteristics of these films to methanol vapors were studied at room temperature. The effects of different concentrations of tin oxide in indium oxide and film thickness on sensitivity were studied. The effects of thin layers of noble metals—Au, Ag, Pt and Cu on top of ITO films were studied. A novel approach of stimulated recrystallization of ITO film by depositing ITO film over ultra thin layer of Cu stimulator was used to improve the sensitivity, selectivity and minimum detection limit of methanol sensors operating at room temperature.
264 citations
"Gas Sensor Platform for Rugged Appl..." refers methods in this paper
...For rugged applications ceramic based micro gas sensors are used [4-5] as these are not membrane based and are mechanically more stable....
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TL;DR: In this article, undoped and Pd-doped SnO2 hollow nanofibers were prepared by single capillary electrospinning and their gas sensing characteristics for 100ppm H2, 100 ppm CO, 500ppm CH4, and 100 ppm C2H5OH were investigated.
Abstract: Undoped and Pd-doped SnO2 hollow nanofibers were prepared by single capillary electrospinning and their gas sensing characteristics for 100 ppm H2, 100 ppm CO, 500 ppm CH4, and 100 ppm C2H5OH were investigated. The gas responses and responding kinetics were closely dependent upon the sensor temperature and Pd doping concentration. The undoped and 0.08 wt% Pd-doped SnO2 nanofibers showed selective detection to C2H5OH at 385 and 440 °C. In the 0.4 wt% Pd-doped SnO2 nanofiber sensor, the selective detection to CH4 and H2 was optimized at 440 °C with the minimum cross-sensitivity to C2H5OH. The tuning of gas selectivity via the combinatorial control of Pd doping concentration and sensor temperature in the electrospun hollow nanofibers was discussed in relation to the gas sensing mechanism.
230 citations
TL;DR: In this paper, a micro-hotplate-based gas sensor array was developed for detecting ammonia (NH 3 ), hydrogen sul�de (H 2 S), and methane (CH 4 ) gases.
Abstract: The objective of this work was to develop a micro-hotplate-based gas sensor array for detecting ammonia (NH 3 ), hydrogen sulfide (H 2 S),and methane (CH 4 ) gases. Sensing film fabrication parameters were studied with micro-hotplates based on resistive temperature detectors andmicroelectro-mechanical system (MEMS) micro-hotplate arrays. SnO 2 /Pt, WO 3 /Au, and ZnO sensing films were found sensitive to thetarget gases NH 3 ,H 2 S, and CH 4 , respectively, but had some cross-sensitivity. Other limitations of the sensing films were baseline drift, highresistance, and recovery time. Sensor array responses to the gases were unique, which should allow selectivity to be obtained by patternrecognition.# 2003 Elsevier Science B.V. All rights reserved. Keywords: Micromachined gas sensor; Hazardous gas sensor; Gas sensor array; MEMS gas sensor 1. IntroductionAgriculture has a strong need for improved gas sensors,especially in animal confinement facilities, where hazardousgases such as hydrogen sulfide (H
107 citations
TL;DR: In this article, the authors used a human test panel for assessing the hedonic impression on a scale from 0 to 5 to detect odor events created within the car cabin, such as smoke, fast-food odour, manure, and bioeffluents.
Abstract: Microelectromechanical-system (MEMS) metal-oxide gas sensors have reached a mature stage, which makes mass market applications in the automotive area possible. In contrast to the already established flap-control system, which controls the access of (combustion) gases from outside the vehicle to the car cabin, the system studied here detects odor events created within the car cabin. The events under study have been cigarette smoke, fast-food odor, manure, and bioeffluents (flatulence). As the reference cannot be a "simple analytical measurement," a human test panel for assessing the hedonic impression on a scale from 0 to 5 is used as reference. The technical system is a MEMS metal-oxide-sensor array consisting of three different sensors. The data-evaluation approach used here is combining the human-sensory data and the MEMS sensor data. The task is performed by the combination of two independent algorithms, where one is related to the normalized conductance and the other to signal variance. Using a combined approach has the advantage that "false" events are suppressed. After the algorithm was successfully transferred onto a microcontroller, real-life data were recorded and classified. Several practical examples are given in this paper. The overall gas-sensor system reaches good accordance with the human-sensory impression, which is represented by air quality levels. This enables the design of a demand-controlled ventilation system
78 citations
TL;DR: Galerkin finite element simulations of two-and three-dimensional fluid flow, thermal fields, and chemical species concentrations in micromachined chemical reactors are presented in this paper.
76 citations
"Gas Sensor Platform for Rugged Appl..." refers background in this paper
...Heater material (platinum) as mentioned in earlier section gets degraded on longer operation at higher temperatures (>600°C) [6]....
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