Proceedings ArticleDOI
GHZ higher order contour mode ALN annular resonators
P.J. Stephanou,Albert P. Pisano +1 more
- pp 787-790
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TLDR
In this paper, a new class of low motional resistance piezoelectric aluminum nitride (AlN) MEMS ring resonators that operate in GHz contour modes of vibration is introduced.Abstract:
This work introduces a new class of low motional resistance piezoelectric aluminum nitride (AlN) MEMS ring resonators that operate in GHz contour modes of vibration. The resonators are based on an annular thin film AlN structural layer sandwiched between two or more pairs of concentric transduction electrodes whose design effectively uncouples the resonant frequency of the device from its transduction area (and consequently its motional resistance) at the layout level. The devices under test exhibit lithographically-defined fundamental series resonant frequencies from 1.03 to 1.60 GHz, motional resistances from 57 to 130 Omega, a resonator figure of merit (FOM = kt 2Q) of 6.4 to 7.4, and no coherent spurious responses from DC to 5 GHz.read more
Citations
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References
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Proceedings ArticleDOI
Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications
TL;DR: In this article, a new class of ring-shaped, contour-mode aluminum nitride piezoelectric resonators with high quality factors in air (Q/sub max/=2,900 at 472.7 MHz), low motional resistance (ranging from 56 to 205 /spl Omega/), and center frequencies that can be lithographically tuned.
Proceedings ArticleDOI
Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps
TL;DR: In this paper, the authors used filled-dielectric transducers to match the 50-377 Omega impedances expected by off-chip components in many wireless applications without the need for high voltages.
Proceedings ArticleDOI
PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators
P.J. Stephanou,Albert P. Pisano +1 more
TL;DR: In this paper, a higher-order contour mode piezoelectric AlN MEMS resonator with lithographically defined GHz operating frequencies was proposed, by selectively patterning the transduction electrodes and routing the electrical excitation waveform, the resonant frequency of the device is uncoupled from the overall dimensions of the AlN plate and spurious electrical responses are suppressed over a wide frequency range.
Journal ArticleDOI
Development of miniature filters for wireless applications
TL;DR: In this paper, the authors discuss recent results in the development of miniature filters with application to cellular phone, GPS, PCN, and other wireless systems, and discuss their insertion losses in the 3 dB range using aluminum nitride films for the piezoelectric and appropriate substrate such as silicon, sapphire, and glass.
Proceedings ArticleDOI
Vibrating RF MEMS for Timing and Frequency References
TL;DR: In this article, the authors present recent progresses on making vibrating RF MEMS oscillators for timing and frequency reference applications, starting from the performance requirements of an oscillator in various systems, including resonator design, oscillator performances, temperature compensation, packaging and integrations.
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