High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices
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"High-performance fully depleted sil..." refers background in this paper
...High mobilities in nanowire FETs have been reported previously [10], [21], [22] and can probably be due to one or more of the following: cylindrical morphology of the channel...
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1,668 citations
"High-performance fully depleted sil..." refers background in this paper
...Among the many innovative approaches, double-gated FinFET [3], [4], tri-gated [5], Π-gated [6], Ω-gated [7], nanowire body [8]–[11], and gateall-around (GAA) [12]–[14] MOSFETs have attracted much...
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...Among the many innovative approaches, double-gated FinFET [3], [4], tri-gated [5], Π-gated [6], Ω-gated [7], nanowire body [8]–[11], and gateall-around (GAA) [12]–[14] MOSFETs have attracted much attention....
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...Besides theoretical studies [15], [16], there have been several experimental attempts (although several of them suffer in gate definition) that demonstrated the advantages of GAA, or near GAA devices, e.g., relaxed body thickness yet gaining similar short-channel control as thin-body double-sided FinFET [7], [8], excellent transconductance [12], and drain-induced barrier lowering (DIBL) suppression [13]....
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...1(a)]—similar to the method used in [4] for FinFET....
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1,006 citations
"High-performance fully depleted sil..." refers background or result in this paper
...Considering the volume inversion in the channel [18] and to facilitate comparison with previous works [4], [7], [9]–[11],...
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...Among the many innovative approaches, double-gated FinFET [3], [4], tri-gated [5], Π-gated [6], Ω-gated [7], nanowire body [8]–[11], and gateall-around (GAA) [12]–[14] MOSFETs have attracted much...
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...than earlier reports on nanowire transistors [8]–[11]....
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729 citations
"High-performance fully depleted sil..." refers result in this paper
...Considering the volume inversion in the channel [18] and to facilitate comparison with previous works [4], [7], [9]–[11],...
[...]
630 citations