Patent
High performance switch for microwave mems
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TLDR
In this paper, a microelectromechanical switch including a first port, one or more second ports, a cantilever beam, and a mechanical spring connected to the beam for providing a mechanical force to move the beam is described.Abstract:
The present disclosure provides for a microelectromechanical switch including a first port (e.g., input port), one or more second ports (e.g., output ports), a cantilever beam, and a mechanical spring connected to the cantilever beam for providing a mechanical force to move the cantilever beam. The cantilever beam extends from a first end, which is in contact with either the first port or one of the second ports, to a second end that is switchably connectable to the other of the first port or said one of the second ports. The first and second ports and cantilever beam may be formed in a coplanar waveguide.read more
Citations
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References
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Journal ArticleDOI
Distributed MEMS true-time delay phase shifters and wide-band switches
S. Barker,Gabriel M. Rebeiz +1 more
TL;DR: In this paper, a coplanar waveguide (CPW) transmission line with fixed-fixed beam MEMS bridge capacitors placed periodically over the transmission line, thus creating a slow-wave structure was designed.
Journal ArticleDOI
0.13- $\mu$ m CMOS Phase Shifters for X-, K u -, and K-Band Phased Arrays
Kwang-Jin Koh,Gabriel M. Rebeiz +1 more
TL;DR: In this paper, two 4-bit active phase shifters integrated with all digital control circuitry in 0.13mum RF CMOS technology are developed for X- and Ku-band (8-18 GHz) and K-band(18-26 GHz) phased arrays, respectively.
Patent
Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications
Robert Y. Loo,Adele E. Schmitz,J.J. Brown,Jonathan J. Lynch,Debabani Choudhury,James A. Foschaar,Daniel J. Hyman,Brett Warneke,Juan Lam,Tsung-Yuan Hsu,Jae Lee,Mehran Mehregany +11 more
TL;DR: In this article, two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures, each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature.
Proceedings ArticleDOI
Characteristics of micromachined switches at microwave frequencies
C.L. Goldsmith,John N. Randall,S. Eshelman,Tsen-Hwang Lin,David Denniston,S. Chen,B. Norvell +6 more
TL;DR: In this paper, the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies are discussed and the construction and theory of operation of capacitive membrane switches is reviewed. And the inherent advantages of these switches relative to semiconductor switches are discussed.
Journal ArticleDOI
Monolithic Ka-band phase shifter using voltage tunable BaSrTiO/sub 3/ parallel plate capacitors
TL;DR: In this paper, a monolithic Ka-band phase shifter circuit that employs voltage tunable BaSrTiO/sub 3/ (BST) parallel plate capacitors is presented.