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Journal ArticleDOI

High-resolution aliasing-free optical beam steering

20 Aug 2016-Vol. 3, Iss: 8, pp 887-890
TL;DR: In this paper, a two-axis steerable optical phased array with over 500 resolvable spots and 80° steering in the phased array axis (measurement limited) and a record small divergence in both axes (0.14°).
Abstract: Many applications, including laser (LIDAR) mapping, free-space optical communications, and spatially resolved optical sensors, demand compact, robust solutions to steering an optical beam. Fine target addressability (high steering resolution) in these systems requires simultaneously achieving a wide steering angle and a small beam divergence, but this is difficult due to the fundamental trade-offs between resolution and steering range. So far, to our knowledge, chip-based two-axis optical phased arrays have achieved a resolution of no more than 23 resolvable spots in the phased-array axis. Here we report, using non-uniform emitter spacing on a large-scale emitter array, a dramatically higher-performance two-axis steerable optical phased array fabricated in a 300 mm CMOS facility with over 500 resolvable spots and 80° steering in the phased-array axis (measurement limited) and a record small divergence in both axes (0.14°). Including the demonstrated steering range in the other (wavelength-controlled) axis, this amounts to two-dimensional beam steering to more than 60,000 resolvable points.
Citations
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Journal ArticleDOI
TL;DR: A 5mm-long optical phased array with 3.3° axial beam steering and > 40° lateral beam steering with no sidelobes in ±33° field-of-regard is designed and fabricated.
Abstract: This paper reports on large field-of-regard, high-efficiency, and large aperture active optical phased arrays (OPAs) for optical beam steering in LIDAR systems. The fabricated 5 mm-long silicon photonic OPA with a 1.3 μm waveguide pitch achieved adjacent waveguide crosstalk below −12dB. A relatively large and uniform emission aperture has been achieved with a low-contrast silicon nitride assisted grating (~20 dB/cm) whose emission profile can be further optimized using an apodized design. The fabricated silicon-photonic OPA demonstrated > 40° lateral beam steering with no sidelobes in a ± 33° field-of-regard and 3.3° longitudinal beam steering via wavelength tuning by 20 nm centered at 1550 nm. We have fully integrated the silicon photonic OPA device with electronic controls and successfully demonstrated 2-dimensional coherent optical beam steering of pre-planned far-field patterns. Future improvements include placement of a distributed Bragg reflector (DBR) underneath the grating emitter in order to achieve nearly a factor of two improvement in emission efficiency.

93 citations

Journal ArticleDOI
TL;DR: The serpentine optical phased array (SOPA) as mentioned in this paper is based on a serially interconnected array of low-loss grating waveguides and supports fully passive, 2D wavelength-controlled beam steering.
Abstract: Optical phased arrays (OPAs) implemented in integrated photonic circuits could enable a variety of 3D sensing, imaging, illumination, and ranging applications, and their convergence in new LIDAR technology. However, current integrated OPA approaches do not scale - in control complexity, power consumption, and optical efficiency - to the large aperture sizes needed to support medium to long range LIDAR. We present the serpentine optical phased array (SOPA), a new OPA concept that addresses these fundamental challenges and enables architectures that scale up to large apertures. The SOPA is based on a serially interconnected array of low-loss grating waveguides and supports fully passive, two-dimensional (2D) wavelength-controlled beam steering. A fundamentally space-efficient design that folds the feed network into the aperture also enables scalable tiling of SOPAs into large apertures with a high fill-factor. We experimentally demonstrate the first SOPA, using a 1450 - 1650 nm wavelength sweep to produce 16,500 addressable spots in a 27x610 array. We also demonstrate, for the first time, far-field interference of beams from two separate OPAs on a single silicon photonic chip, as an initial step towards long-range computational imaging LIDAR based on novel active aperture synthesis schemes.

86 citations

Journal ArticleDOI
TL;DR: This article introduces a single-chip OPA realized through wafer-scale 3-D integration of silicon photonics and CMOS, and achieves wide-range 2-D steering over 18.25° beamwidth while consuming 20 mW/element average power.
Abstract: With the growing demand for automotive LiDAR and the maturation of silicon photonics platforms, optical phased arrays (OPAs) have emerged as a key technology for solid-state optical beam-steering. In order to meet realistic automotive specifications with OPAs, >500 antenna elements should work reliably under tight power and cost budgets. Existing multi-chip solutions necessitate expensive packaging and assembly to achieve high interconnect density. Even with 2-D monolithic integration, high-voltage drivers to deliver sufficient power to resistive phase shifters typically result in significant overhead in die area and limited power efficiency. In this article, we introduce a single-chip OPA realized through wafer-scale 3-D integration of silicon photonics and CMOS. Flexible and ultra-dense connections with through-oxide vias (TOVs) in our platform resolve the I/O density issue. Moreover, low-voltage L-shaped phase shifters and compact, efficient switch-mode drivers, connected vertically using TOVs, remove wiring/placement overhead and achieve a large active array aperture within a compact die. Our OPA prototype achieves wide-range 2-D steering over 18.5 $^\circ \times $ 16° by leveraging wavelength tuning and phase control, and array scaling up to 125 elements with a large aperture size of $0.5\,\mathrm {mm}\times 0.5\,\mathrm {mm}$ and 0.15 $^\circ \times $ 0.25° beamwidth while consuming 20 mW/element average power. Since our system supports per-element independent phase control, increased sensitivity to process variations in L-shaped shifters is fully compensated by a simple calibration process.

86 citations


Cites background from "High-resolution aliasing-free optic..."

  • ...Note that this pitch-FOV tradeoff can potentially be relaxed through non-uniform antenna placement [13], [16], which alters the basic relationship of (2)....

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Journal ArticleDOI
TL;DR: In this article, the authors demonstrate millimeter-scale optical waveguide grating antennas with unidirectional emission for integrated optical phased arrays, which eliminates the fundamental problem of blind spots in the element factor of a phased array caused by reflections of antenna radiation within the substrate.
Abstract: We demonstrate millimeter-scale optical waveguide grating antennas with unidirectional emission for integrated optical phased arrays. Unidirectional emission eliminates the fundamental problem of blind spots in the element factor of a phased array caused by reflections of antenna radiation within the substrate. Over 90% directionality is demonstrated using a design consisting of two silicon nitride layers. Furthermore, the perturbation strength along the antenna is apodized to achieve uniform emission for the first time, to the best of our knowledge, on a millimeter scale. This allows for a high effective aperture and receiving efficiency. The emission profile of the measured 3 mm long antenna has a standard deviation of 8.65% of the mean. These antennas are state of the art and will allow for integrated optical phased arrays with blind-spot-free high transmission output power and high receiving efficiency for LIDAR and free-space communication systems.

84 citations

References
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Journal ArticleDOI
10 Jan 2013-Nature
TL;DR: This work demonstrates that a robust design, together with state-of-the-art complementary metal-oxide–semiconductor technology, allows large-scale NPAs to be implemented on compact and inexpensive nanophotonic chips and therefore extends the functionalities of phased arrays beyond conventional beam focusing and steering, opening up possibilities for large- scale deployment.
Abstract: A large-scale silicon nanophotonic phased array with more than 4,000 antennas is demonstrated using a state-of-the-art complementary metal-oxide–semiconductor (CMOS) process, enabling arbitrary holograms with tunability, which brings phased arrays to many new technological territories. Nanophotonic approaches allow the construction of chip-scale arrays of optical nanoantennas capable of producing radiation patterns in the far field. This could be useful for a range of applications in communications, LADAR (laser detection and ranging) and three-dimensional holography. Until now this technology has been restricted to one-dimensional or small two-dimensional arrays. This paper reports the construction of a large-scale silicon nanophotonic phased array containing 4,096 optical nanoantennas balanced in power and aligned in phase. The array was used to generate a complex radiation pattern—the MIT logo—in the far field. The authors show that this type of nanophotonic phased array can be actively tuned, and in some cases the beam is steerable. Electromagnetic phased arrays at radio frequencies are well known and have enabled applications ranging from communications to radar, broadcasting and astronomy1. The ability to generate arbitrary radiation patterns with large-scale phased arrays has long been pursued. Although it is extremely expensive and cumbersome to deploy large-scale radiofrequency phased arrays2, optical phased arrays have a unique advantage in that the much shorter optical wavelength holds promise for large-scale integration3. However, the short optical wavelength also imposes stringent requirements on fabrication. As a consequence, although optical phased arrays have been studied with various platforms4,5,6,7,8 and recently with chip-scale nanophotonics9,10,11,12, all of the demonstrations so far are restricted to one-dimensional or small-scale two-dimensional arrays. Here we report the demonstration of a large-scale two-dimensional nanophotonic phased array (NPA), in which 64 × 64 (4,096) optical nanoantennas are densely integrated on a silicon chip within a footprint of 576 μm × 576 μm with all of the nanoantennas precisely balanced in power and aligned in phase to generate a designed, sophisticated radiation pattern in the far field. We also show that active phase tunability can be realized in the proposed NPA by demonstrating dynamic beam steering and shaping with an 8 × 8 array. This work demonstrates that a robust design, together with state-of-the-art complementary metal-oxide–semiconductor technology, allows large-scale NPAs to be implemented on compact and inexpensive nanophotonic chips. In turn, this enables arbitrary radiation pattern generation using NPAs and therefore extends the functionalities of phased arrays beyond conventional beam focusing and steering, opening up possibilities for large-scale deployment in applications such as communication, laser detection and ranging, three-dimensional holography and biomedical sciences, to name just a few.

1,065 citations

Journal ArticleDOI
01 Aug 1998
TL;DR: The digital display engine (DDE) as discussed by the authors is based on a single DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train.
Abstract: A period of rapid growth and change in the display industry has recently given rise to many new display technologies. One such technology, the Digital Micromirror Device/sup TM/ (DMD), developed at Texas Instruments, represents a unique application of microelectromechanical systems to the area of projection displays. In this paper, we describe a representative example of a DMD-based projection display engine, the digital display engine (DDE). The DDE is based on a single-DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train. The engine is designed for portable and fixed conference-room graphics and video display applications, and many design decisions were made to tailor the engine for its intended venue. The design of the projection engine optics and electronics is discussed, along with the basic operation, manufacture, and reliability of the DMD itself.

642 citations

Journal ArticleDOI
TL;DR: A 16-channel, independently tuned waveguide surface grating optical phased array in silicon for two dimensional beam steering with a total field of view of 20° x 14° and full-window background peak suppression of 10 dB is demonstrated.
Abstract: We demonstrate a 16-channel, independently tuned waveguide surface grating optical phased array in silicon for two dimensional beam steering with a total field of view of 20° x 14°, beam width of 0.6° x 1.6°, and full-window background peak suppression of 10 dB.

373 citations

Journal ArticleDOI
TL;DR: An integrated approach is followed in which a 1D optical phased array is fabricated on silicon-on-insulator in which continuous thermo-optical steering of 2.3 degrees and wavelength steering of 14.1 degrees is reported.
Abstract: Optical phased arrays are versatile components enabling rapid and precise beam steering. An integrated approach is followed in which a 1D optical phased array is fabricated on silicon-on-insulator. The optical phased array consists of 16 parallel grating couplers spaced 2 mum apart. Steering in one direction is done thermo-optically by means of a titanium electrode on top of the structure using the phased array principle, while steering in the other direction is accomplished by wavelength tuning. At a wavelength of 1550 nm, continuous thermo-optical steering of 2.3 degrees and wavelength steering of 14.1 degrees is reported.

299 citations

Journal ArticleDOI
TL;DR: The photonic integrated circuit (PIC) consists of 164 optical components including lasers, amplifiers, photodiodes, phase tuners, grating couplers, splitters, and a photonic crystal lens and exhibited steering over 23° x 3.6°.
Abstract: In this work we present the first fully-integrated free-space beam-steering chip using the hybrid silicon platform. The photonic integrated circuit (PIC) consists of 164 optical components including lasers, amplifiers, photodiodes, phase tuners, grating couplers, splitters, and a photonic crystal lens. The PIC exhibited steering over 23° x 3.6° with beam widths of 1° x 0.6°.

283 citations