Journal ArticleDOI
Immersion Deposition of Metal Films on Silicon and Germanium Substrates in Supercritical Carbon Dioxide
Xiangrong Ye,Chien M. Wai,Daqing Zhang,Yanko Kranov,David N. McIlroy,Yuehe Lin,Mark H. Engelhard +6 more
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TLDR
A low temperature carbon dioxide based on immersion deposition technology (SFID) has been developed for producing palladium, copper, silver, and other metal films on silicon-based substrates in supercritical CO2 as mentioned in this paper.Abstract:
A low temperature carbon dioxide based on immersion deposition technology (SFID) has been developed for producing palladium, copper, silver, and other metal films on silicon-based substrates in supercritical CO2. The reaction is initiated by oxidation of elemental silicon to SiF4 or H2SiF6 by HF with the release of electrons that cause the reduction of metal ions in an organometallic precursor to the metallic form on silicon surface in CO2. Only the substrate surfaces are coated with metals using this method. Based on surface analysis of the films and spectroscopic analysis of the reaction products, the mechanism of metal film deposition is discussed. The metal films (Pd, Cu, and Ag) formed on silicon surfaces by the SFID method exhibit good coverage, smooth and dense texture, high purity and a metallic behavior. Similarly, metal films can also be deposited onto geranium substrates using SFID. The gas-like properties and the high pressure of the supercritical fluids, combined with the low reaction temperature, make this SFID method potentially useful for depositing thin metal films in small features, which are difficult to accomplish by conventional CVD methods.read more
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Nanomaterials and supercritical fluids
TL;DR: A critical review of the supercritical based techniques applied to the production of nanoparticles, nanofibers, nanowires, nanotubes, and nanofilms can be found in this article.
Journal ArticleDOI
Platinum/Carbon nanotube nanocomposite synthesized in supercritical fluid as electrocatalysts for low-temperature fuel cells.
TL;DR: This work demonstrates that Pt-CNT nanocomposites synthesized in supercritical carbon dioxide are effective electrocatalysts for low-temperature fuel cells.
Journal ArticleDOI
PtRu/carbon nanotube nanocomposite synthesized in supercritical fluid: a novel electrocatalyst for direct methanol fuel cells.
TL;DR: The results demonstrated the feasibility of processing bimetallic catalysts in supercritical carbon dioxide for fuel cell applications and showed that PtRu/CNT catalysts exhibit high activity for methanol oxidation which resulted from the high surface area of carbon nanotubes and the nanostructure of platinum/ruthenium particles.
Patent
Through-wafer interconnects for photoimager and memory wafers
Salman Akram,Charles M. Watkins,Mark Hiatt,David R. Hembree,James M. Wark,Warren M. Farnworth,Mark E. Tuttle,Sidney B. Rigg,Steven D. Oliver,Kyle K. Kirby,Alan G. Wood,Lu Velicky +11 more
TL;DR: In this paper, a through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imaging devices.
Patent
Packaged microelectronic imagers and methods of packaging microelectronic imagers
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