Journal ArticleDOI
In-line digital holography for dynamic metrology of MEMS
Vijay Raj Singh,Anand Asundi +1 more
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TLDR
In this paper, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices, which can relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms.Abstract:
In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.read more
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Journal ArticleDOI
Digital Holography, a metrological tool for quantitative analysis: Trends and future applications
Melania Paturzo,Vito Pagliarulo,Vittorio Bianco,Pasquale Memmolo,Lisa Miccio,Francesco Merola,Pietro Ferraro +6 more
TL;DR: It is shown that this powerful method can be a key metrological tool for the quantitative analysis and non-invasive inspection of a variety of materials, devices and processes, including the study of live biological matter and biomedical applications.
Journal ArticleDOI
Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization.
Marcella Matrecano,Pasquale Memmolo,Lisa Miccio,Anna Persano,Fabio Quaranta,Pietro Siciliano,Pietro Ferraro +6 more
TL;DR: An automatic procedure, particularly suited in the case of high-roughness surfaces, is presented to selectively filter the spectrum, providing very low-noise reconstructed images, making this technique highly applicable for quantitative phase imaging in MEMS analysis.
Journal ArticleDOI
Numerical tools for the characterization of microelectromechanical systems by digital holographic microscopy
TL;DR: This review describes the principles of digital holography in microscopy and shows the most important numerical tools discovered and applied to date in the field of MEMS.
Journal ArticleDOI
Integrity of Micro-Hotplates During High-Temperature Operation Monitored by Digital Holographic Microscopy
Yiu Wai Lai,Nektarios Koukourakis,Nils C. Gerhardt,Martin R. Hofmann,Robert Meyer,S. Hamann,M Ehmann,Klaus Hackl,E Darakis,Alfred Ludwig +9 more
TL;DR: In this article, the integrity of micro-hotplates using in situ digital holographic microscopy is investigated and the surface topography and surface evolution of the devices during high-temperature operation (heating/cooling cycles) is measured with nanometer-scale resolution.
Journal ArticleDOI
Development of surface reconstruction algorithms for optical interferometric measurement
TL;DR: In this article, the authors provide an in-depth perspective of surface topography reconstruction for optical interferometric measurements and present the new challenges that optical inter-ferometry techniques are facing in surface topographical measurement.
References
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Book
An Introduction to Microelectromechanical Systems Engineering
TL;DR: The main aim is to provide an introduction to MEMS by describing the processes and materials available and by using examples of commercially available devices, and the concept of using MEMS devices as key elements within complex systems (or even microsystems!) is explored.