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Fig. 1. Schematic diagram showing a positioning system example. The goal is to vary the gap z over a large range of motion and control bandwidth.
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Journal Article
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DOI
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Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology
[...]
Vijay Shilpiekandula
,
Kamal Youcef-Toumi
01 Jan 2011
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IFAC Proceedings Volumes