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International Technology Roadmap for Semiconductors 2003の要求清浄度について - シリコンウエハ表面と雰囲気環境に要求される清浄度, 分析方法の現状について -

飯田 裕幸, +2 more
- Vol. 19, Iss: 3, pp 177-180
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The article was published on 2004-09-20 and is currently open access. It has received 1387 citations till now. The article focuses on the topics: Cleanroom & Atmosphere.

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Efficient Processing of Deep Neural Networks: A Tutorial and Survey

TL;DR: In this paper, the authors provide a comprehensive tutorial and survey about the recent advances toward the goal of enabling efficient processing of DNNs, and discuss various hardware platforms and architectures that support DNN, and highlight key trends in reducing the computation cost of deep neural networks either solely via hardware design changes or via joint hardware and DNN algorithm changes.
Journal ArticleDOI

Phase-engineered low-resistance contacts for ultrathin MoS2 transistors.

TL;DR: It is demonstrated that the metallic 1T phase of MoS2 can be locally induced on semiconducting 2H phase nanosheets, thus decreasing contact resistances to 200-300 Ω μm at zero gate bias.
Proceedings ArticleDOI

Scalable high performance main memory system using phase-change memory technology

TL;DR: This paper analyzes a PCM-based hybrid main memory system using an architecture level model of PCM and proposes simple organizational and management solutions of the hybrid memory that reduces the write traffic to PCM, boosting its lifetime from 3 years to 9.7 years.
Journal ArticleDOI

Double-Gate Tunnel FET With High- $\kappa$ Gate Dielectric

TL;DR: In this article, a double-gate tunnel field effect transistor (DG tunnel FET) with a high-kappa gate dielectric was proposed and validated using realistic design parameters, showing an on-current as high as 0.23 mA for a gate voltage of 1.8 V, an off-current of less than 1 fA (neglecting gate leakage), an improved average sub-threshold swing of 57 mV/dec, and a minimum point slope of 11 mV /dec.
Journal ArticleDOI

Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures

TL;DR: The fabrication of nickel silicide/silicon (NiSi/Si) nanowire heterostructures with atomically sharp metal–semiconductor interfaces is demonstrated and field-effect transistors based on those heterostructure in which the source–drain contacts are defined by the metallic NiSi nanowires regions are produced.
References
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Journal ArticleDOI

Phase-engineered low-resistance contacts for ultrathin MoS2 transistors.

TL;DR: It is demonstrated that the metallic 1T phase of MoS2 can be locally induced on semiconducting 2H phase nanosheets, thus decreasing contact resistances to 200-300 Ω μm at zero gate bias.
Proceedings ArticleDOI

Scalable high performance main memory system using phase-change memory technology

TL;DR: This paper analyzes a PCM-based hybrid main memory system using an architecture level model of PCM and proposes simple organizational and management solutions of the hybrid memory that reduces the write traffic to PCM, boosting its lifetime from 3 years to 9.7 years.
Journal ArticleDOI

Double-Gate Tunnel FET With High- $\kappa$ Gate Dielectric

TL;DR: In this article, a double-gate tunnel field effect transistor (DG tunnel FET) with a high-kappa gate dielectric was proposed and validated using realistic design parameters, showing an on-current as high as 0.23 mA for a gate voltage of 1.8 V, an off-current of less than 1 fA (neglecting gate leakage), an improved average sub-threshold swing of 57 mV/dec, and a minimum point slope of 11 mV /dec.
Journal ArticleDOI

Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures

TL;DR: The fabrication of nickel silicide/silicon (NiSi/Si) nanowire heterostructures with atomically sharp metal–semiconductor interfaces is demonstrated and field-effect transistors based on those heterostructure in which the source–drain contacts are defined by the metallic NiSi nanowires regions are produced.
Proceedings ArticleDOI

Enhancing lifetime and security of PCM-based main memory with start-gap wear leveling

TL;DR: Start-Gap is proposed, a simple, novel, and effective wear-leveling technique that uses only two registers that boosts the achievable lifetime of the baseline 16 GB PCM-based system from 5% to 97% of the theoretical maximum, while incurring a total storage overhead of less than 13 bytes and obviating the latency overhead of accessing large tables.