Is Scanning Electron Microscopy/Energy Dispersive X-ray Spectrometry (SEM/EDS) Quantitative?
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...This situation has developed because of three contributing factors: (1) the rise of standardless analysis which now dominates EDS quantitative analysis [14]; (2) the severe effects of specimen geometry on the accuracy of X-ray microanalysis which occur no matter which analytical protocol is followed, standards-based or standardless [15]; and (3) the occasional but significant failures in qualitative analysis, i....
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"Is Scanning Electron Microscopy/Ene..." refers background in this paper
...The minimum level for quantitative analysis, the so-called determination limit, is defined as a level that exceeds the standard deviation of the background by at least a factor of ten (Currie, ’68)....
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"Is Scanning Electron Microscopy/Ene..." refers background in this paper
...Scanning electron microscopy with energy dispersive X-ray spectrometry (SEM/EDS) is an elemental microanalysis technique widely applied across a broad range of the physical and biological sciences, engineering, technology, and forensic investigations (Goldstein et al., 2003)....
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...Geometrical structures such as scratches with dimensions on the micrometer scale similar to the electron interaction volume can significantly modify the generation and/or propagation of X-rays and introduce a large and unpredictable error component (Yakowitz, ’68; Goldstein et al., 2003)....
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...and unpredictable error component (Yakowitz, ’68; Goldstein et al., 2003)....
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...Goldstein et al. (2003) provide an explicit calculation of the standard deviation of the concentration value, σ C, taking into account the four sources of variance in the k-ratio measurement (the characteristic peak count and the background count for both the unknown in the numerator of the k-ratio…...
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...…Division, National Institute of Standards and Technology, Gaithersburg, MD 20899 E-mail: dale.newbury@nist.gov Received 10 May 2012; Accepted with revision 29 June 2012 DOI 10.1002/sca.21041 Published online 9 August 2012 in Wiley Online Library (wileyonlinelibrary.com) (Goldstein et al., 2003)....
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