Journal ArticleDOI
Knudsen force based MEMS structures
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In this article, a surface micromachined Knudsen vacuum sensor has been simulated, fabricated and characterized, which has an area of 1 mm2 and a sensitivity of 40 fF Pa−1 in the pressure range of 0.1 −10 Pa.Abstract:
Knudsen forces are gas molecular forces which originate from the differential temperatures in rarefied gases. We report measurements of these forces at normal ambience on test structures made by surface micromachining of polysilicon. Using these results, a surface micromachined Knudsen vacuum sensor has been simulated, fabricated and characterized. The vacuum sensor has an area of 1 mm2. The fabricated device has a sensitivity of 40 fF Pa−1 in the pressure range of 0.1–10 Pa. The measured data is analysed and the magnitude of the Knudsen's force is extracted. The paper also suggests ways to enhance the range and improve the sensitivity of such sensors.read more
Citations
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Journal ArticleDOI
The optimization via response surface method for micro hydrogen gas actuator
TL;DR: In this article, the performance of the micro sensor of MIKRA for the detection of the hydrogen in the mixture has been evaluated and reliable correlations for the estimation of the Knudsen force are presented to determine the efficiency of the sensor in various operating conditions.
Journal ArticleDOI
Microstructure actuation and gas sensing by the Knudsen thermal force
TL;DR: In this paper, the performance of a microelectromechanical in-plane Knudsen radiometric actuator, a self-contained device having thermal force generation, sensing, and tuning mechanisms integrated onto the same platform, is evaluated in terms of a non-dimensional force coefficient.
Journal ArticleDOI
Mass analysis of CH4/SO2 gas mixture by low-pressure MEMS gas sensor
TL;DR: In this paper, numerical simulations are performed to investigate the capability of the Knudsen thermal force for the detection of sulfur dioxide in CH4/SO2 gas mixture and reveal the main mechanism of force generation inside the device.
Journal ArticleDOI
Effect of Knudsen thermal force on the performance of low-pressure micro gas sensor
TL;DR: In this paper, direct simulation Monte Carlo (DSMC) simulations were applied to investigate the mechanism of the force generation inside a low-pressure gas sensor, and extensive parametric studies were done to study the effects of physical parameters on the performance and characteristics of this device in different operating conditions.
Journal ArticleDOI
Microscale In-Plane Knudsen Radiometric Actuator: Design, Characterization, and Performance Modeling
TL;DR: In this paper, the in-plane motion of a shuttle mass in response to Knudsen thermal forces is measured capacitively and the magnitude is used to estimate ambient pressure.
References
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Journal ArticleDOI
Analytical characterization using surface-enhanced Raman scattering (SERS) and microfluidic sampling
Chao Wang,Chenxu Yu +1 more
TL;DR: This article provides a thorough review of the principles, concepts and methods of SERS-microfluidic platforms, and the applications of such platforms in trace analysis of chemical and biological analytes.
Journal ArticleDOI
Miniature and MEMS-type vacuum sensors and pumps
TL;DR: In this paper, the observable trends of the actual research and development of selected types of miniature and MEMS-type vacuum sensors are presented, and some aspects of vacuum-encapsulation of MEMS devices, on wafer level and package level are shown.
Journal ArticleDOI
Knudsen forces on microcantilevers
TL;DR: In this paper, a theoretical discussion of the magnitude of the Knudsen forces and conditions where they can be encountered is discussed, and a potential application of the knudsen force in designing a cantilever-based vacuum gauge is discussed.
Journal ArticleDOI
Experimental observation of attractive and repulsive thermal forces on microcantilevers
Bernd Gotsmann,Urs Dürig +1 more
TL;DR: In this article, the authors reported measurements of thermal forces acting on a microcantilever near a substrate surface in air by considering interface scattering at the substrate surface as expressed by an accommodation coefficient of less than unity.
Journal ArticleDOI
Thermokinetic actuation for batch assembly of microscale hinged structures
V. Kaajakari,Amit Lal +1 more
TL;DR: In this paper, surface micromachined hinged structure assembly using thermokinetic forces in the molecular flow regime is described, and examples of assembled structures are shown and assembly jig suitable for automated MEMS batch assembly is demonstrated.