Low-loss lateral micromachined switches for high frequency applications
Citations
147 citations
139 citations
Cites background from "Low-loss lateral micromachined swit..."
...Electrostatically actuated beams have been extensively studied and modeled for RF switching applications [5-8], and thus we will only briefly describe their basic behaviors here....
[...]
108 citations
Cites background from "Low-loss lateral micromachined swit..."
...Due to the fact that the OFF-state leakage current (IOFF) of a MOSFET increases exponentially with threshold voltage (VT ), VT can no longer be reduced along with transistor physical dimensions....
[...]
96 citations
75 citations
References
474 citations
"Low-loss lateral micromachined swit..." refers background in this paper
...Most of the reported MEMS switches are vertical motion switches, including the fixed–fixed beam switch [1], cantilever beam switch [2], toggle switch [3] and push–pull switch [4]....
[...]
171 citations
"Low-loss lateral micromachined swit..." refers background in this paper
...High resistivity (HR) silicon (Si) has been studied as a substrate material for communication system applications at microwave and millimetre wave frequencies for its mature fabrication process, low cost and acceptable RF performance [13]....
[...]
138 citations