Metal contact reliability of RF MEMS switches
Citations
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Cites background from "Metal contact reliability of RF MEM..."
...Carbon accumulation has been reported on pure ruthenium contacts after cycling [15, 16, 20]....
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...Switches with dissimilar contacts have been used to reduce failures due to adhesion and increase the maximum current carrying capability [16, 20, 23, 24, 27, 28]; however, these switches show lifetime limitations due to carbon accumulation on the contacts....
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56 citations
Cites background from "Metal contact reliability of RF MEM..."
...Although hard metals such as W are more resistant to mechanical stress and physical deformation, they are also more susceptible to chemical reaction, particularly oxidation [7]....
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43 citations
Cites background from "Metal contact reliability of RF MEM..."
...Its incomplete removal is a major source of process-induced carbonaceous material [56, 57]....
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References
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"Metal contact reliability of RF MEM..." refers background in this paper
...The reliability of metal contacts was the topic of intense study for decades during the development of miniature relays for telecommunication and other applications [2-6]....
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