Patent
Method and apparatus for real-time monitoring of plasma chamber wall condition
Reads0
Chats0
TLDR
In this article, a surface plasmon resonance (SPR) fiber has a central portion disposed in the processing chamber, and opposing ends disposed outside the processing chambers, where a light source provides input light at one end of the SPR fiber, and a detector receives output light from the other end.Abstract:
A substrate processing system includes a processing chamber. A pedestal and a showerhead are arranged in the processing chamber. A surface plasmon resonance (SPR) fiber has a central portion disposed in the processing chamber, and opposing ends disposed outside the processing chamber. A light source provides input light at one end of the SPR fiber, and a detector receives output light from the other end of the SPR fiber. Surface plasmon waves and evanescent waves constitute the output light, which is processed and analyzed to determine a condition of the processing chamber.read more
References
More filters
Journal ArticleDOI
Low cost sensors based on SPR in a plastic optical fiber for biosensor implementation.
TL;DR: The fabrication and testing of two configurations of optical sensor systems based on Surface Plasmon Resonance at the interface of a liquid sample and sandwiched structures realized starting from the exposed core of a Plastic Optical Fiber are reported.
Journal ArticleDOI
Resolution enhancement in surface plasmon resonance sensor based on waveguide coupled mode by combining a bimetallic approach.
TL;DR: This approach combines a waveguide coupled plasmonic mode and a kind of Au/Ag bimetallic enhancement concept and shows a new route to a great enhancement in resolution of surface Plasmon resonance sensors.
Journal ArticleDOI
Surface plasmon resonance for characterization of large-area atomic-layer graphene film
TL;DR: In this paper, the authors used the surface plasmon resonance (SPR) method to characterize both the thickness and refractive index of chemical-vapordeposition (CVD)-grown graphene films.
Patent
Optical Fiber Amplifier Having Nanostructures
TL;DR: In this paper, the stimulated Raman scattering effect (SRS) is used to amplify optical fiber, which includes a central core comprising a dielectric matrix that is capable of vibrating at a given frequency (ωRaman) under the effect of a pump signal.
Journal ArticleDOI
Infrared surface plasmon resonance of AZO-Ag-AZO sandwich thin films.
TL;DR: Near-infrared surface plasmon resonance (SPR) spectra were collected of thin multilayer films of aluminum-doped zinc oxide / silver / AZO on BK-7 glass in the Kretschmann configuration in air, indicating an inhibition of metal island formation for Ag deposited on AZO.