Proceedings ArticleDOI
Mitigating the irreversible deformation with pressure in silicon / porous silicon composite membranes
L. Sujatha,Rahul Goswami,Enakshi Bhattacharya +2 more
- Vol. 7592, pp 288-295
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TLDR
In this paper, the authors investigated the effect of self-assembled monolayer antistiction coating on the performance of Si/PS composite membranes and found that the composite membrane deformation is irreversible unlike that seen with silicon membranes within reasonable limits.Abstract:
Due to the low Young's Modulus of porous silicon (PS), Si/PS composite membranes - where the silicon membrane is
converted into PS to a certain depth - deform more than silicon membranes and hence MEMS pressure sensors with
composite membranes have higher sensitivity. But the Si/PS composite membranes exhibit a smaller range of linear
response with applied pressure than silicon membranes with the linear range being less for Si/microPS as compared to
Si/macroPS composite membranes. In addition, while the composite membrane deformation saturates at high pressures
like silicon membranes, the deformation is irreversible unlike that seen with silicon membranes within reasonable limits.
With the possibility that the irreversible deformation could be due to stiction force between the collapsed pore walls at
high pressure, we investigate the effect of formation of self-assembled monolayer (SAM) antistiction coating on the
performance of Si/PS composite membranes.read more
References
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Formation of Monolayer Films by the Spontaneous Assembly of Organic Thiols from Solution Onto Gold.
Journal ArticleDOI
Surface processes in MEMS technology
TL;DR: In this paper, a review on the problem of adhesion in microelectromechanical systems and the application of the principles and techniques of surface science to understand and manipulate, at the atomic level, the interfacial forces which are responsible for strong adhesion of microdevices are discussed.
Journal ArticleDOI
Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS
W. Robert Ashurst,Christina Yau,Carlo Carraro,Christina O. Lee,G. Jonathan Kluth,Roger T. Howe,Roya Maboudian +6 more
TL;DR: In this article, the free radical reaction of a primary alkene (e.g. 1-octadecene C16H33CHCH2) with hydrogen terminated silicon was used to create a new class of anti-stiction coatings for polysilicon MEMS.
Journal ArticleDOI
Acoustic investigation of porous silicon layers
R.J.M. da Fonseca,J.M. Saurel,Alain Foucaran,J. Camassel,E. Massone,Thierry Taliercio,Y. Boumaiza +6 more
TL;DR: In this paper, the porosity dependence of bulk wave velocities and Young's modulus has also been proposed, and the thicknesses of p+-type PS layers were measured and longitudinal, shear and Rayleigh velocity and Youngs modulus were obtained as a function of porosity.
Journal ArticleDOI
Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS
TL;DR: In this paper, a self-assembled monolayer of dodecyl-trichlorosilane forms a very uniform /spl sim/1.5-nm-thick anti-adhesion coating on the silicon dioxide surface, on full wafer scale.