Journal ArticleDOI
Mode ordering of single-drive multi-axis MEMS gyroscope for reduced cross-axis sensitivity
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TLDR
In this article, a design technique based on resonant mode ordering concerning drive-displacement amplitudes ratio and frequency differences ratio was proposed to reduce the cross-axis sensitivity in single-drive multi-axis microelectromechanical systems (MEMS) gyroscope.Abstract:
In this letter, a design technique is presented to reduce the cross-axis sensitivity (CAS) in single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A design technique based on resonant mode ordering concerning drive-displacement amplitudes ratio and frequency differences ratio was proposed. A simplified single-drive multi-axis MEMS gyroscope, based on the mode-split approach, was analyzed for cross-axis sensitivity. The designed gyroscope utilizing a driving scheme based on a simple folded coupling spring has equal x and y – axes drive-displacement amplitudes of 3.892 μ m respectively. The proposed resonant mode ordering technique was used, and an equal sense-frequency difference of 184 Hz was achieved with respect to drive-mode frequency. The designed gyroscope having common resonant mode order was analyzed, and CAS of x and y – axes was computed to be 0.241% and 0.387% respectively. The proposed resonant mode order technique successfully reduced the cross-axis sensitivity in the designed gyroscope. The reduced cross-axis sensitivities of x and y – axes were 0.025% and 0.076% respectively. Comparison of both designs showed a reduced rate of 89.627% and 80.362% in x and y – axes respectively. The main sensitivities of x and y – axes were computed to be 0.055 nm/dps respectively. Furthermore, the significance of the proposed technique was experimentally verified.read more
Citations
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References
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Journal ArticleDOI
A HARPSS polysilicon vibrating ring gyroscope
Farrokh Ayazi,Khalil Najafi +1 more
TL;DR: In this paper, a vibrating ring gyroscope was fabricated using high aspect-ratio combined poly and single-crystal silicon MEMS technology (HARPSS), which is capable of producing electrically isolated vertical electrodes as tall as the main body structure with various size air-gaps ranging from submicron to tens of microns.
Book
MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness
Andrei M. Shkel,Cenk Acar +1 more
TL;DR: In this paper, structural approaches to improve robustness of MEMS Vibratory Gyroscopes have been discussed, including linear multi-DOF architecture, Torsional Multi-DoF architecture and distributed mass architecture.
Journal ArticleDOI
Error sources in in-plane silicon tuning-fork MEMS gyroscopes
Marc S. Weinberg,A. Kourepenis +1 more
TL;DR: In this paper, the error sources defining tactical-grade performance in silicon, in-plane tuning-fork gyroscopes such as the Honeywell-Draper units being delivered for military applications are analyzed.
Journal ArticleDOI
Reviews on Various Inertial Measurement Unit (IMU) Sensor Applications
TL;DR: A literature review of several current IMU categories and applications is presented and current methods being used to improve the accuracy of the output from IMU are presented to avoid the errors that latest IMU is facing.
Journal ArticleDOI
The development of micro-gyroscope technology
Kai Liu,Weiping Zhang,Wenyuan Chen,Kai Li,Fuyan Dai,Feng Cui,Xiaosheng Wu,Gaoyin Ma,Qijun Xiao +8 more
TL;DR: In this article, the authors report an overview and development of micro-gyroscope and compare different classes of gyroscopes in the aspects such as fabrication method, detection axis, materials, size and so on.
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