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Journal ArticleDOI

Monitoring plasma treatment of thin films by surface plasmon resonance.

03 Mar 2014-Review of Scientific Instruments (AIP Publishing)-Vol. 85, Iss: 3, pp 035001-035001

TL;DR: Combined analysis of GXRD and SPR data confirmed that while top Al layer enables controlling plasma oxidation of Ag, the setup enables monitoring the same and is a first of its kind for in situ SPR studies where creation of low pressure is a prerequisite.
Abstract: We report the surface plasmon resonance (SPR) measurements during plasma treatment of thin films by an indigenously designed setup. From the measurements on Al (6.3 nm)/Ag (38 nm) bi-layer at a pressure of 0.02 mbar, the SPR position was found to be shifted by ∼20° after a plasma treatment of ∼7 h. The formation of oxide layers during plasma oxidation was confirmed by glancing angle x-ray diffraction (GXRD) measurements. Combined analysis of GXRD and SPR data confirmed that while top Al layer enables controlling plasma oxidation of Ag, the setup enables monitoring the same. The setup designed is a first of its kind for in situ SPR studies where creation of low pressure is a prerequisite.
Topics: Surface plasmon resonance (55%), Plasmon (54%)
Citations
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Journal ArticleDOI
Abstract: In this study, the influences of variations in the gas flow rate and incidence angles of argon cold atmospheric-pressure plasma jet on the morphology and absorption spectra of silver thin films (60 nm, 80 nm, and 100 nm film thickness) are investigated. To evaluate the surface morphology, atomic force microscopy (AFM) was employed on the silver thin film surface before and after plasma processing. To analyze the effect of plasma treatment on the grain size, the one-dimensional AFM surface profiles of Ag thin films are approximated using a Gaussian function. The absorbance of Ag thin films is measured in wavelength range of 190–1100 nm utilizing UV–Vis absorption spectrometer. Compared to the gas flow rates 0.5 standard litter per minute (SLM) and 2 SLM, surface treatment of Ag thin film with gas flow rate of 1 SLM increased the valley depth, the peak valley height, and the distance between two deepest valleys remarkably. A sequential argon plasma treatment (2-min plasma treatment perpendicular to surface was followed by 2-min plasma processing with non-perpendicular incidence angle of 60°) offers considerable improvement in the uniformity of grains and also changes shape of grains, especially the peak height (about 44 times higher than untreated sample) and area of grains (almost 136 times greater than untreated sample) which can be applicable for optical sensing technology.

7 citations


Journal ArticleDOI
Franz X. Bronold1, K. Rasek1, Holger Fehske1Institutions (1)
Abstract: The most fundamental response of a solid to a plasma and vice versa is electric. An electric double layer forms with a solid-bound electron-rich region—the wall charge—and a plasma-bound electron-depleted region—the plasma sheath. However, it is only the plasma sheath that has been studied extensively ever since the beginning of plasma physics. The wall charge received much less attention. Particularly, little is known about the operando electronic structure of plasma-facing solids and how it affects the spatiotemporal scales of the wall charge. The purpose of this Perspective is to encourage investigations of this terra incognita by techniques of modern surface physics. Using our own theoretical explorations of the electron microphysics at plasma–solid interfaces and a proposal for measuring the wall charge by infrared reflectivity to couch the discussion, we hope to put together enough convincing reasons for getting such efforts started. They would open up—at the intersection of plasma and surface physics—a new arena for applied as well as fundamental research.

4 citations


Journal ArticleDOI
Franz X. Bronold1, K. Rasek1, Holger Fehske1Institutions (1)
Abstract: The most fundamental response of a solid to a plasma and vice versa is electric. An electric double layer forms with a solid-bound electron-rich region-the wall charge-and a plasma-bound electron-depleted region-the plasma sheath. But it is only the plasma sheath which has been studied extensively ever since the beginning of plasma physics. The wall charge received much less attention. Especially little is known about the in-operando electronic structure of plasma-facing solids and how it affects the spatio-temporal scales of the wall charge. The purpose of this perspective is to encourage investigations of this terra incognito by techniques of modern surface physics. Using our own theoretical explorations of the electron microphysics at plasma-solid interfaces and a proposal for measuring the wall charge by infrared reflectivity to couch the discussion, we hope to put together enough convincing reasons for getting such efforts started. They would open up-at the intersection of plasma and surface physics-a new arena for applied as well as fundamental research.

1 citations


Journal ArticleDOI
Jun Zhu1, Jun Zhu2, Wenju Xu2, Wenju Xu1  +3 moreInstitutions (2)
01 Apr 2017-Optik
Abstract: In recent years, surface plasma resonance (SPR) technology for the preparation of multifunctional detection chips has drawn considerable research attention. This study designs a multilayered SPR waveguide sensing device based on a metal medium that features moderate temperature and humidity. The surface plasma is stimulated using a Kretschmann-type structure and a single temperature and humidity chip of SPR technology to achieve multifunctional detection. The sensing principle of the proposed device is based on SPR angle and the environmental relationship between relative humidity and temperature. Characteristic analysis also verifies that SPR with an incident wavelength of 632 nm can be accomplished by the basic linear relationship between the resonance angle and SiO 2 refractive inde. The accuracy of dual-channel sensors is higher than that of single-channel sensors. The metal layer for gold channel sensitivity can reach 7000 nm/RIU. The dual-channel sensor designed in this study exhibits low refractive index, temperature, and humidity and can thus achieve improved sensitivity.

Patent
Albarede Luc1, Kabouzi Yassine1, Luque Jorge1Institutions (1)
20 Nov 2018-
Abstract: A substrate processing system includes a processing chamber. A pedestal and a showerhead are arranged in the processing chamber. A surface plasmon resonance (SPR) fiber has a central portion disposed in the processing chamber, and opposing ends disposed outside the processing chamber. A light source provides input light at one end of the SPR fiber, and a detector receives output light from the other end of the SPR fiber. Surface plasmon waves and evanescent waves constitute the output light, which is processed and analyzed to determine a condition of the processing chamber.

References
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Journal ArticleDOI
Erwin Kretschmann1Institutions (1)
Abstract: A method is given to determine accurately the optical constants and the thickness of thin films when the real and the imaginary part of the dielectric constants obey the condition ɛ r <- 1, ɛ i ¦ɛ r ¦. The method makes use of the possibility to excite surface plasma waves with the help of the inhomogeneous light wave obtained by total reflexion. The accuracy of the method is pointed out. As an example the optical constants of silver foils in the wavelength interval 4000 to 6000 A are determined.

1,510 citations


BookDOI
01 Jan 2008-
TL;DR: This book describes the development ofKinetic Models Describing Biomolecular Interactions at Surfaces and the Benefits and Scope of Surface Plasmon Resonance-based Biosensors in Food Analysis.
Abstract: Chapter 1: Introduction to Surface Plasmon Resonance Chapter 2: Physics of Surface Plasmon Resonance Chapter 3: SPR Instrumentation Chapter 4: Kinetic Models Describing Biomolecular Interactions at Surfaces Chapter 5: Kinetic and Thermodynamic Analysis of Ligand-Receptor Interactions: SPR Applications in Drug Development Chapter 6: Surface Chemistry in SPR Technology Chapter 7: Measurement of the Analysis Cycle: Scanning SPR Microarray Imaging of Autoimmune Diseases Chapter 8: Advanced Methods for SPR Imaging Biosensing Chapter 9: Surface Plasmon Fluorescence Techniques for Bioaffinity Studies Chapter 10: SPR Imaging for Clinical Diagnostics Chapter 11: The Benefits and Scope of Surface Plasmon Resonance-based Biosensors in Food Analysis Chapter 12: Future Trends in SPR Technology

691 citations


Journal ArticleDOI
TL;DR: Using surface plasmon spectroscopy, this work directly observed the kinetics of atomic deposition onto a single gold nanocrystal and also monitored electron injection and extraction during a redox reaction involving the oxidation of ascorbic acid on a gold Nanocrystal surface, creating the first direct measurement of the rates of redox catalysis on single nanocrystals.
Abstract: Heterogeneous catalysts have been pivotal to the development of the modern chemical industry and are essential for catalysing many industrial reactions. However, reaction rates are different for every individual catalyst particle and depend upon each particle's morphology and size, crystal structure and composition. Measuring the rates of reaction on single nanocrystals will enable the role of catalyst structure to be quantified. Here, using surface plasmon spectroscopy, we have directly observed the kinetics of atomic deposition onto a single gold nanocrystal and also monitored electron injection and extraction during a redox reaction involving the oxidation of ascorbic acid on a gold nanocrystal surface. These results constitute the first direct measurement of the rates of redox catalysis on single nanocrystals.

393 citations


Book
02 Oct 2004-
Abstract: Aluminium and its alloys Aluminium corrosion Atmospheric corrosion of aluminium Corrosion in water The action of mineral products The action of organic products The effect of different environments appendices

374 citations


Journal ArticleDOI
Abstract: This review paper presents historical perspectives, recent advances and future directions in the multidisciplinary research field of plasma nanoscience The current status and future challenges are presented using a three-dimensional framework The first and the largest dimension covers the most important classes of nanoscale objects (nanostructures, nanofeatures and nanoassemblies/nanoarchitectures) and materials systems, namely carbon nanotubes, nanofibres, graphene, graphene nanoribbons, graphene nanoflakes, nanodiamond and related carbon-based nanostructures; metal, silicon and other inorganic nanoparticles and nanostructures; soft organic nanomaterials; nano-biomaterials; biological objects and nanoscale plasma etching In the second dimension, we discuss the most common types of plasmas and plasma reactors used in nanoscale plasma synthesis and processing These include low-temperature non-equilibrium plasmas at low and high pressures, thermal plasmas, high-pressure microplasmas, plasmas in liquids and plasma–liquid interactions, high-energy-density plasmas, and ionized physical vapour deposition as well as some other plasma-enhanced nanofabrication techniques In the third dimension, we outline some of the 'Grand Science Challenges' and 'Grand Socio-economic Challenges' to which significant contributions from plasma nanoscience-related research can be expected in the near future The urgent need for a stronger focus on practical, outcome-oriented research to tackle the grand challenges is emphasized and concisely formulated as from controlled complexity to practical simplicity in solving grand challenges

202 citations


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