Journal ArticleDOI
Morphological investigation of aluminium nitride films on various substrates for MEMS applications
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TLDR
In this paper, a C-axis oriented AlN films were observed on most of the substrates, where the surface morphologies of the films grown on the 1·5 μm thick SiO2 layer and GaAs substrate were found to be non-uniform.Abstract:
Piezoelectric films, such as aluminium nitride (AlN), are of great interest for the fabrication of thin film bulk/surface acoustic resonators, where the growth parameters and the substrate material influence the morphological properties. Herein, AlN films were deposited using RF reactive sputtering on Si, SiO2, metal (Al, Cu, Cr and Au) coated silicon, GaAs and InP substrates. C-axis (002) oriented AlN films were observed on most of the substrates, where the surface morphologies of the films grown on the 1·5 μm thick SiO2 layer and GaAs substrate were found to be non-uniform. Moreover, AlN films deposited on the Cr electrode exhibit well textured film with fairly uniform grains, while the films deposited on other metal electrodes exhibit a granular type of structure with mixed small and large grains. After optimisation of growth parameters, silicon micromachining was performed by the wet chemical etching method. Suspended Cr–AlN–Cr–SiO2 cantilevers of 20 μm in width were fabricated for futuristic...read more
Citations
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Journal ArticleDOI
Oxidation mechanism of aluminum nitride revisited
Chun-Ting Yeh,Wei-Hsing Tuan +1 more
TL;DR: In this article, the microstructure of AlN is investigated through micro-structure observation and it is shown that the oxide layer is full of small pores and the formation of pores generates additional surface area to induce further reaction.
Journal ArticleDOI
Characterisation of TiAlN PVD coatings on AZ31 magnesium alloy
Wei Chen,Jiamu Huang,Jia Peng +2 more
TL;DR: In this paper, a microhardness tester, a surface profilometer and an electrochemical system were used to investigate the hardness, thickness, and corrosion resistance of the coated AZ31 magnesium alloy.
Journal ArticleDOI
Effect of RF sputtering power on morphological and electrical properties of calcium copper titanate thin films
TL;DR: In this article, calcium copper titanate (CCTO) thin films were deposited on p-type silicon substrate by RF magnetron sputtering at various RF powers and the evolution of polycrystalline structure of the CCTO thin films was confirmed by XRD studies.
Journal ArticleDOI
Thermodynamic model of reactive sputtering process
S Faddeeva,J. Oseguera +1 more
TL;DR: In this paper, a new approach in describing the reactive sputtering process is developed by applying a mass balance and the first and second laws of thermodynamics, and the results are compared to the experimental data reported in the literature.
Journal ArticleDOI
Investigation of surface and interface properties of RF sputtered calcium copper titanate thin films on silicon substrate
TL;DR: In this article, the structural and electrical properties of RF sputtered Calcium copper titanate (CCTO) thin films have been investigated and a correlation between morphological properties of the CCTO films was established with the variation of deposition pressure.
References
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Journal ArticleDOI
Materials issues in microelectromechanical systems (MEMS)
TL;DR: In this article, the status of microelectromechanical systems (MEMS) is reviewed with particular emphasis on materials issues therein, and the potential impact of materials solutions is discussed.
Journal ArticleDOI
A methodology for determining mechanical properties of freestanding thin films and MEMS materials
TL;DR: In this paper, a chip-level membrane deflection experiment is presented for the investigation of sub-micron thin films and microelectro-mechanical systems, where a Mirau microscope interferometer is positioned below the membrane to observe its response in real time.
Journal ArticleDOI
MEMS-based sample preparation for molecular diagnostics.
TL;DR: It is concluded that MEMS-based components might contribute to some components in a sample-preparation system consisting of modular instruments and disposable units, but will not provide a generic or a totally integrated solution.
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Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM
M. A. Haque,M.T.A. Saif +1 more
TL;DR: In this article, a tensile testing technique utilizing MEMS force sensors for in situ mechanical characterization of sub-micron scale freestanding thin films in SEM and TEM is presented.
Journal ArticleDOI
Future of microelectromechanical systems (MEMS)
Minhang Bao,Weiyuan Wang +1 more
TL;DR: In this article, a simple rule is suggested by the experience gained in the past few years: try to avoid as much as possible mechanical coupling with the outside world while trying hard to improve the MEMS technology to enhance the mechanical power of the devices.