Multi -Layered Thermal Actuator Realization Using Metal Passivated TMAH Micro-Machining
01 Nov 2018-
TL;DR: In this paper, a thermally actuated multi-layered micro actuator for out-of-plane actuation application was fabricated using ammonium per sulphate based TMAH etching with metal passivation.
Abstract: This paper presents fabrication of thermally actuated multi-layered micro actuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium per sulphate based TMAH etching with metal passivation. Multi-layered $[\text{Au}/\text{Si}_{3}\mathrm{N}_{4}/\text{SiO}_{2}]$ micro actuators with straight and cross-heaters are characterized using I-V and LDV measurements. Gold as upper layer of micro actuator is fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered micro actuator is measured by Laser Doppler Vibrometer which is observed around 20 KHz.
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12 Sep 2022
TL;DR: In this paper , a reliability analysis of thermally actuated MEMS micromirror devices was presented, and the reliability distribution function and lifetime of the MEMS micro-irror were analyzed.
Abstract: This paper presents a reliability analysis of thermally actuated MEMS micromirror devices. The various factors affecting the reliability of the MEMS micromirror device were analyzed and discussed. The reliability distribution function and lifetime of the MEMS micromirror were analyzed. The series and parallel model reliability model for MEMS micromirror were reported. The p-out-of-n redundancy model was considered to increase reliability for the MEMS micromirror device. This model gives more redundancy to it, and the failure of one or more devices does not affect the system performance.
References
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01 Dec 1998
TL;DR: Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10/spl times/ every two years during the past eight years.
Abstract: This paper presents a review of silicon micromachined accelerometers and gyroscopes. Following a brief introduction to their operating principles and specifications, various device structures, fabrication, technologies, device designs, packaging, and interface electronics issues, along with the present status in the commercialization of micromachined inertial sensors, are discussed. Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10/spl times/ every two years during the past eight years. This impressive drive to higher performance, lower cost, greater functionality, higher levels of integration, and higher volume will continue as new fabrication, circuit, and packaging techniques are developed to meet the ever increasing demand for inertial sensors.
1,816 citations
01 Aug 1998
TL;DR: The digital display engine (DDE) as discussed by the authors is based on a single DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train.
Abstract: A period of rapid growth and change in the display industry has recently given rise to many new display technologies. One such technology, the Digital Micromirror Device/sup TM/ (DMD), developed at Texas Instruments, represents a unique application of microelectromechanical systems to the area of projection displays. In this paper, we describe a representative example of a DMD-based projection display engine, the digital display engine (DDE). The DDE is based on a single-DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train. The engine is designed for portable and fixed conference-room graphics and video display applications, and many design decisions were made to tailor the engine for its intended venue. The design of the projection engine optics and electronics is discussed, along with the basic operation, manufacture, and reliability of the DMD itself.
642 citations
"Multi -Layered Thermal Actuator Rea..." refers background in this paper
...In the recent years, Micro-electro-Mechanical-Systems (MEMS) have emerged as a promising platform for different applications such as sensing [1, 2, and 3], actuation [4, 5], biomedical imaging and high-speed communication [6, 7]....
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TL;DR: In this article, a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing of the air gap capacitor, the restoring force of the microbeam and the axial load applied to the micro-beam is presented.
Abstract: We present a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing of the air gap capacitor, the restoring force of the microbeam and the axial load applied to the microbeam The boundary-value problem describing the static deflection of the microbeam under the electrostatic force due to a dc polarization voltage is solved numerically The eigenvalue problem describing the vibration of the microbeam around its statically deflected position is solved numerically for the natural frequencies and mode shapes Comparison of results generated by our model to the experimental results shows excellent agreement, thus verifying the model Our results show that failure to account for mid-plane stretching in the microbeam restoring force leads to an underestimation of the stability limits It also shows that the ratio of the width of the air gap to the microbeam thickness can be tuned to extend the domain of the linear relationship between the dc polarization voltage and the fundamental natural frequency This fact and the ability of the nonlinear model to accurately predict the natural frequencies for any dc polarization voltage allow designers to use a wider range of dc polarization voltages in resonators
473 citations
"Multi -Layered Thermal Actuator Rea..." refers background in this paper
...The driving power of these devices comes from microactuators using various methods such as piezoelectric [8, 9], electrostatic [10, 11], electromagnetic [12, 13] and electrothermal based actuations [14, 15, 16, 17]....
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TL;DR: In this article, the authors demonstrate a fully monolithic silicon optical scanner with large static optical beam deflection, which can be used for both one-and two-axis rotation and pistoning of a micromirror.
Abstract: In this paper, fully monolithic silicon optical scanners are demonstrated with large static optical beam deflection. The main advantage of the scanners is their high speed of operation for both axes: namely, the actuators allow static two-axis rotation in addition to pistoning of a micromirror without the need for gimbals or specialized isolation technologies. The basic device is actuated by four orthogonally arranged vertical comb-drive rotators etched in the device layer of an silicon-on-insulator wafer, which are coupled by mechanical linkages and mechanical rotation transformers to a central micromirror. The transformers allow larger static rotations of the micromirror from the comb-drive stroke limited rotation of the actuators, with a magnification of up to 3/spl times/ angle demonstrated. A variety of one-axis and two-axis devices have been successfully fabricated and tested, in all cases with 600-/spl mu/m-diameter micromirrors. One-axis micromirrors achieve static optical beam deflections of >20/spl deg/ and peak-to-peak resonant scanning of >50/spl deg/ in one example at a resonant frequency of 4447 Hz. Many two-axis devices utilizing four rotators were tested, and exhibit >18/spl deg/ of static optical deflection at <150 V, while their lowest resonant frequencies are above 4.5 kHz for both axes. A device which utilizes only three bidirectional rotators for tip-tilt-piston actuation achieves -10/spl deg/ to 10/spl deg/ of optical deflection in all axes, and exhibits minimum resonant frequencies of 4096 and 1890 Hz for rotation and pistoning, respectively. Finally, we discuss the preliminary results in scaling tip-tilt-piston devices down to 0.4 /spl times/ 0.4 mm on a side for high fill-factor optical phased arrays. These array elements include bonded low-inertia micromirrors which fully cover the actuators to achieve high fill-factor.
211 citations
"Multi -Layered Thermal Actuator Rea..." refers background in this paper
...In the recent years, Micro-electro-Mechanical-Systems (MEMS) have emerged as a promising platform for different applications such as sensing [1, 2, and 3], actuation [4, 5], biomedical imaging and high-speed communication [6, 7]....
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TL;DR: The performances of three of the MEMS accelerometers from different manufacturers are investigated and compared to a well calibrated commercial accelerometer used as a reference for MEMS sensors performance evaluation.
Abstract: With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen. Micro-Electro Mechanical Systems (MEMS) accelerometer is one of the available options. The performances of three of the MEMS accelerometers from different manufacturers are investigated in this paper and compared to a well calibrated commercial accelerometer used as a reference for MEMS sensors performance evaluation. Tests were performed on a real CNC machine in a typical industrial environmental workshop and the achieved results are presented.
134 citations