.....
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. 1
LBL-20924
Preprint
~.
d,.
Lawrence
Berkeley
Laboratory
UNIVERSITY
OF
CALIFORNIA
Materials & Molecular
Research Division
Submitted
to
Physical
Review
Letters
MULTIPLE
QUANTUM
NMR
STUDY
OF
CLUSTERING
IN
HYDROGENATED
AMORPHOUS
SILICON
J.
Baum,
K.K.
Gleason,
A.
Pines,
A.N.
Garroway,
and
J.A.
Reimer
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1986
:3n!ARY
AND
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December
1985
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is
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t
Prepared
for
the U.S. Department
of
Energy under
Contract
DE-AC03-76SF00098
DISCLAIMER
This document was prepared
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an account
of
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~/
LBL-20924
MULTIPLE
QUANTUM
NMR
STUDY
OF
CLUSTERING
IN
HYDROGENATED
AMORPHOUS
SILICON
J.
Bauma,
K. K.
Gleasonb,
A.
Pinesa,
A.
N.
Garrowayc,
and
J.
A.
Reimerb
University
of
California,
Berkeley,
CA
94720
PACS
numbers:
61.16.Hn,
07.58.+g,
~3.60.Fw
aDepartment
of
Chemistry,
University
of
California,
and
Materials
and
Molecular
Research
Division,
Lawrence
Berkeley
Laboratory.
bDepartment
of
Chemical
Engineering,
University
of
California.
cPermanent
address:
Code 6120,
Naval
Research
Laboratory,
Washington
D.C.
20375-5000.
1
Abstract
Multiple
quantum
nuclear
magnetic
resonance
techniques
are
used
to
study
the
distribution
of
hydrogen
in
hydrogenated
amorphous
silicon.
Using
the
fact
that
multiple
quantum
excitation
is
iimited
by
the
size
of
the
dipolar-coupled
spin
system,
we
show
that
the
predominant
bonding
environment
for
hydrogen
is
a
cluster
of
approximately
six
atoms.
For
device
quality
films,
the
concentration
of
these
six-atom
defects
increases
with
increasing
hydrogen
content.
At
very
high
hydrogen
content,
the
clusters
are
replaced
with
a
continuous
network
of
silicon-hydrogen
bonds.
·~
r·.
