On-chip temperature control circuit using common devices
TL;DR: A circuit has been designed to control the temperature of the IC die upon which it resides using a TSMC 0.25 micron process and installed in a 40-pin DIP package, revealing temperature regulation within 0.3/spl deg/C for thermal control ranges.
Abstract: A circuit has been designed to control the temperature of the IC die upon which it resides. No special devices or layers are required. No external circuitry or special heat sinking is used. Equilibrium temperatures from below -40/spl deg/C to above +85/spl deg/C are attainable. Time to equilibrium is on the order of a few seconds. The 400/spl mu/m /spl times/ 500/spl mu/m circuit has been manufactured by the MOSIS service in a TSMC 0.25 micron process and installed in a 40-pin DIP package. Test results reveal temperature regulation within 0.3/spl deg/C for thermal control ranges of 4/spl deg/C to 40/spl deg/C.
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