# Planarization of metal layers in a chip based on Voronoi diagram

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133 citations

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16,023 citations

### "Planarization of metal layers in a ..." refers background in this paper

...The geometric dual graph [9] of the Voronoi diagram is a triangulated graph, with the points in S as vertices....

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4,236 citations

### "Planarization of metal layers in a ..." refers background in this paper

...the Voronoi diagram are called Voronoi edges, and the corner points of Voronoi cells where Voronoi edges meet are called Voronoi vertices [7][8]....

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4,018 citations

82 citations

### "Planarization of metal layers in a ..." refers background or methods in this paper

...In [1], square shapes are suggested, and later on in [2], guidelines on choice of fill size, and the number of fill rows and columns are given, but the same fill insertion algorithm as in [1] is followed....

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...The authors in [1] worked on two objectives separately: (i) minimizing variation of metal density with a upper bound on density, and (ii) minimizing the amount of fills used to maintain metal density within a certain range....

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...However, algorithms for determining the locations of fills are merely a handful [1]....

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...In [1], different types of algorithms have been applied for determining the locations of metal fills....

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...in [1] formulated the metal filling problem to determine the locations of fills in tile-window based fixed dissection scenario....

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81 citations

### "Planarization of metal layers in a ..." refers background or methods in this paper

...We address the filling problem by inserting floating dummy fills with rectangular shape, which outperforms other shapes [2]....

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...Analysis of several guidelines [2] for reducing coupling effect of metal filling reveals that while runtime increases for finding appropriate positions of fills with reduced coupling effect, accuracy in terms of uniformity may need to be sacrificed to achieve such reduction....

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...The paper [2] shows that rectangular fill shape outperforms other shapes in minimizing the effect on interconnect capacitance....

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...In [1], square shapes are suggested, and later on in [2], guidelines on choice of fill size, and the number of fill rows and columns are given, but the same fill insertion algorithm as in [1] is followed....

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