Preliminary Modelling and Implementation of the 2D-control for a Nanopositioning Long Range Stage
TL;DR: In this paper, a two-dimensional nanopositioning platform (NanoPla) has been designed and manufactured to obtain effective positioning at nanometer scale with increased working ranges.
About: This article is published in Procedia Engineering.The article was published on 2015-01-01 and is currently open access. It has received 4 citations till now. The article focuses on the topics: Control theory.
Citations
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TL;DR: In this article, a two-dimensional nanopositioning platform (NanoPla) is described, which is characterized by a three-layer architecture and two-stage motion strategy.
37 citations
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TL;DR: A one-dimensional (1D) control strategy for positioning a Halbach linear motor has been developed, implemented, and experimentally validated and it was verified that the control system achieves the working requirements of the NanoPla.
Abstract: A two-dimensional (2D) nanopositioning platform stage (NanoPla) is in development at the University of Zaragoza. To provide a long travel range, the actuators of the NanoPla are four Halbach linear motors. These motors present many advantages in precision engineering, and they are custom made for this application. In this work, a one-dimensional (1D) control strategy for positioning a Halbach linear motor has been developed, implemented, and experimentally validated. The chosen control hardware is a commercial Digital Motor Control (DMC) Kit from Texas Instruments that has been designed to control the torque or the rotational speed of rotative motors. Using a commercial control hardware facilitates the applicability of the developed control system. Nevertheless, it constrains the design, which needs to be adapted to the hardware and optimized. Firstly, a dynamic characterization of the linear motor has been performed. By leveraging the dynamic properties of the motor, a sensorless controller is proposed. Then, a closed-loop control strategy is developed. Finally, this control strategy is implemented in the control hardware. It was verified that the control system achieves the working requirements of the NanoPla. It is able to work in a range of 50 mm and perform a minimum incremental motion of 1 μm.
8 citations
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TL;DR: In this paper, a 2D-platform stage able to obtain an effective metrological positioning with nanometer resolution and long working range (50 x 50 mm 2 ) is developed at the University of Zaragoza.
2 citations
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TL;DR: The developed control system is extended to the four motors of the nanopositioning platform to generate a 2D planar movement in the whole working range of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the wholeWorking range.
1 citations
References
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TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Abstract: Nanotechnology is the science of understanding matter and the control of matter at dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulation of matter at this level of precision. An important aspect of research in nanotechnology involves precision control and manipulation of devices and materials at a nanoscale, i.e., nanopositioning. Nanopositioners are precision mechatronic systems designed to move objects over a small range with a resolution down to a fraction of an atomic diameter. The desired attributes of a nanopositioner are extremely high resolution, accuracy, stability, and fast response. The key to successful nanopositioning is accurate position sensing and feedback control of the motion. This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
1,027 citations
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02 Oct 1994TL;DR: In this paper, the authors present a design and analysis framework for the general class of permanent magnet electric machines, including surface-mounted linear motors consisting of permanent magnets and ironless current-carrying coils.
Abstract: This paper presents a design and analysis framework for the general class of permanent magnet electric machines. In the authors' analysis, surface-mounted linear motors consisting of permanent magnets and ironless current-carrying coils are treated in a uniform way via the magnetic vector potential. This analysis is developed to design novel linear magnetic levitators for driving precision motion control stages such as those used in wafer steppers. For one such motor structure, they give analytical formulae for its magnetic field, force, flux linkage, inductance of the winding, and back electromotive force. They provide experimental results with a six degree-of-freedom magnetic levitator. These results are in good agreement with analytical estimations. The levitator uses a permanent-magnet Halbach array in order to improve its power efficiency. By analogy, there also exists an electromagnetic dual of the Halbach array. One such dual utilizes a triangular winding pattern in order to achieve a primarily single-sided magnetic field.
247 citations
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01 Jul 2000-Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
TL;DR: A magnetically suspended six degree-of-freedom precision motion control stage with a horizontal positioning noise of less than 0.6 nm three sigma is described in this article, where position feedback is provided by three plane mirror interferometers and three capacitance probes.
Abstract: This paper describes a magnetically suspended six degree-of-freedom precision motion control stage with a horizontal positioning noise of less than 0.6 nm three sigma. The vertical positioning noise is less than 2.2 nm three sigma. The stage utilizes four levitation linear motors to suspend and servo the moving element (platen) throughout its 25 mm × 25 mm × 0.1 mm range of travel. Position feedback is provided by three plane mirror interferometers and three capacitance probes. The suspended platen (12 kg mass) is floated in oil to enhance the stage’s disturbance rejection and to reduce power dissipation in the actuators. The stage has been designed to achieve a positioning accuracy of 10 nm and is used to position samples beneath a scanned probe microscope. The ultimate purpose of this measuring machine is to provide a means of measuring submicron-scale features with nanometer-scale accuracy. The technology can easily be scaled to larger travels, with accuracy limited primarily by the wavelength instability of the HeNe light source. This article gives an overview of the LORS project, emphasizing the system error terms, tolerancing, and experimental results.
180 citations
"Preliminary Modelling and Implement..." refers background in this paper
...These actuators have been successfully integrated in similar stages [2, 3]....
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TL;DR: In this paper, the authors report on the design, modeling, implementation, and experimental results for the control of their Sub-Atomic Measuring Machine (SAMM), which has been jointly developed by UNC-Charlotte and MIT.
49 citations
"Preliminary Modelling and Implement..." refers background in this paper
...According to [6], one proposed constraint could be based on the power minimization....
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01 Oct 2012-Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
TL;DR: In this paper, a multi-linear-motor-driven XY planar stage floating on a thin film of air is used to traverse a substrate through a 10mm-×-10mm travel range with an XY linear position resolution of less than 1nm and an angular resolution about the Z axis of 0.05μrad over a range of about a degree.
Abstract: In this article we describe the design of a universal ultra-precision positioning platform to be used in the development of many different nano-manufacturing processes. The system incorporates the concept of employing different interchangeable manufacturing and characterization tools with one ultra-precision positioning system. A multi-linear-motor-driven XY planar stage floating on a thin film of air is used to traverse a substrate through a 10 mm × 10 mm travel range with an XY linear position resolution of less than 1 nm and an angular resolution about the Z axis of 0.05 μrad over a range of about a degree (determined by plane mirror interferometer optics). A piezoelectric transducer (PZT) driven tripod positioning system is used to align each manufacturing and characterization tool with the substrate through a travel range of 40 μm along the Z axis and 245 μrad of rotation about the X and Y axes. The mechanical design, an overview of the system error analysis, preliminary component performance results, and the results of the first micro-imprint fabricated with the machine are presented.
49 citations