Probing Systems in Dimensional Metrology
TL;DR: In this article, the authors describe requirements, different principles and characteristics of tactile probing systems in dimensional metrology, with examples of several probing systems that are used in practice, as well as a survey of tactile sensing systems.
About: This article is published in CIRP Annals.The article was published on 2004-01-01. It has received 315 citations till now. The article focuses on the topics: Dimensional metrology.
Citations
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TL;DR: Freeform optics is the next generation of modern optics, bringing advantages of excellent optical performance and system integration as mentioned in this paper, and finds wide applications in various fields, such as new energy, illumination, aerospace and biomedical engineering.
638 citations
TL;DR: In this article, the authors present the state of the art in the metrology of freeform shapes with focus on the freeform capabilities of the most important measuring techniques and on related metrological issues.
359 citations
TL;DR: The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient as mentioned in this paper.
Abstract: The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.
292 citations
TL;DR: Multisensor data fusion in dimensional metrology is used in order to get holistic, more accurate and reliable information about a workpiece based on several or multiple measurement values from one or more sensors.
271 citations
TL;DR: Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability.
232 citations
References
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Book•
01 Jan 1987TL;DR: This book offers a modern approach to computational geo- metry, an area thatstudies the computational complexity of geometric problems with an important role in this study.
Abstract: This book offers a modern approach to computational geo- metry, an area thatstudies the computational complexity of geometric problems. Combinatorial investigations play an important role in this study.
2,284 citations
TL;DR: This article introduces the formal notion of the family of α-shapes of a finite point set in R 3 .
Abstract: Frequently, data in scientific computing is in its abstract form a finite point set in space, and it is sometimes useful or required to compute what one might call the “shape” of the set. For that purpose, this article introduces the formal notion of the family of a-shapes of a finite point set in R3. Each shape is a well-defined polytope, derived from the Delaunay triangulation of the point set, with a parameter a e R controlling the desired level of detail. An algorithm is presented that constructs the entire family of shapes for a given set of size n in time 0(n2), worst case. A robust implementation of the algorithm is discussed, and several applications in the area of scientific computing are mentioned.
1,980 citations
TL;DR: In this article, a single vertically directed focused TEM00-mode cw laser beam of ∼250 mW is sufficient to support stably a ∼20μ glass sphere.
Abstract: The stable levitation of small transparent glass spheres by the forces of radiation pressure has been demonstrated experimentally in air and vacuum down to pressures ∼1 Torr. A single vertically directed focused TEM00‐mode cw laser beam of ∼250 mW is sufficient to support stably a ∼20‐μ glass sphere. The restoring forces acting on a particle trapped in an optical potential well were probed optically by a second laser beam. At low pressures, effects arising from residual radiometric forces were seen. Possible applications are mentioned.
780 citations
Book•
01 Jan 1983
TL;DR: In this paper, the authors present general principles of measurement systems, including reliability, choice and economics of measurement system elements, as well as the accuracy and reliability of the measurement system in the steady state.
Abstract: Part I: General Principles 1. The general measurement system. 2. Static characteristics of measurement system elements. 3. The accuracy of measurement systems in the steady state. 4. Dynamic characteristics of measurement systems. 5. Loading effects and two port networks. 6. Signals and noise in measurement systems. 7. Reliability, choice and economics of measurement systems. Part II: Typical Measurement System elements. 8. Sensing elements. 9. Signal conditioning elements. 10. Signal processing elements. 11. Data presentation elements. Part III: Speciaised Measurement Systems 12. Flow measurement systems. 13. Intrinsically safe measurement systems. 14. Heat transfer effects in measurement systems. 15. Optical measurement systems. 16. Ultrasonic measurement systems. 17. Gas chromatography. 18. Data acquisition. Answers to numerical problems. Index.
347 citations
TL;DR: In this paper, a technical overview of the optical methods available for dimensional metrology is presented, including methods for the measurement of length, angle, surface form and spatial co-ordinates.
289 citations