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Journal ArticleDOI

Publisher’s Note: “Growth of residual stress-free ZnO films on SiO2/Si substrate at room temperature for MEMS devices” [AIP Advances 5, 067140 (2015)]

06 Jul 2015-AIP Advances (AIP Publishing LLC)-Vol. 5, Iss: 7, pp 079901
About: This article is published in AIP Advances.The article was published on 2015-07-06 and is currently open access. It has received 1 citations till now. The article focuses on the topics: Residual stress.
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TL;DR: In this article, the effects of Cu thickness and substrate type on the microstructure and optoelectronics properties of the tri-layer ZnO/Cu/AZO multilayer films are investigated.

23 citations