Journal ArticleDOI
PVr—a robust amplitude parameter for optical surface specification
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TLDR
PVr is a newly proposed robust amplitude parameter that combines the PV of a 36-term Zernike fit and the root mean square of the residual that provides automatic filtering, is insensitive to system resolution, and relates directly to imaging performance via the Marechal criterion.Abstract:
Peak-to-valley departure (PV) is entrenched in optics design and manufacture as a characterization of an optical figure; modern interferometers commonly use 1k×1k detectors, the output of which may not be well represented by two points. PVr is a newly proposed robust amplitude parameter that combines the PV of a 36-term Zernike fit and the root mean square of the residual. This provides automatic filtering, is insensitive to system resolution, and relates directly to imaging performance via the Marechal criterion. Use of PVr in place of PV is recommended.read more
Citations
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Journal ArticleDOI
Residual flatness and scale calibration for a point autofocus surface topography measuring instrument
TL;DR: In this paper, the impact of the point autofocus operating principle and the evaluation method on the metrological characteristics of a commercial point auto-focus instrument is discussed, including flatness deviation, amplification and linearity of the lateral and vertical axes, and the perpendicularity between the axes.
Journal ArticleDOI
Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors
TL;DR: In this paper, the authors investigate the correction principle in deterministic ion beam figuring (IBF) for surface errors of different spatial frequencies and establish the selection criterion for removal function in different figuring stages to realize the rapid convergence of surface accuracy.
Journal ArticleDOI
Control of mid-spatial frequency errors considering the pad groove feature in smoothing polishing process
TL;DR: The selected pad can smooth out the MSFR to a great extent with proper SP parameters, while the newly generated MSFR due to the groove can be suppressed to a very low magnitude.
Journal ArticleDOI
Absolute measurement of optical flats based on basic iterative methods
TL;DR: The proposed basic iterative methods for absolute measurement of optical flats are generalized; can correctly reconstruct absolute figures with pixel-level spatial resolution; are easy to understand and implement; and computationally efficient.
Journal ArticleDOI
Influence of material removal programming on ion beam figuring of high-precision optical surfaces
TL;DR: In this article, the influence of material removal programming on the surface error evolution is investigated through a comparative study of the contour removal method (CRM) and the geometric proportion removal method(PRM).
References
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Book
Principles of Optics
TL;DR: In this paper, the authors discuss various topics about optics, such as geometrical theories, image forming instruments, and optics of metals and crystals, including interference, interferometers, and diffraction.
Principles of Optics
TL;DR: In this article, the authors discuss various topics about optics, such as geometrical theories, image forming instruments, and optics of metals and crystals, including interference, interferometers, and diffraction.
Journal ArticleDOI
Wave-front interpretation with Zernike polynomials
Jon Y. Wang,D. E. Silva +1 more
TL;DR: Contrary to the traditional understanding, the classical least-squares method of determining the Zernike coefficients from a sampled wave front with measurement noise has been found numerically stable.
Journal ArticleDOI
Zernike circle polynomials and optical aberrations of systems with circular pupils.
TL;DR: Zernike circle polynomials, their numbering scheme, and relationship to balanced optical aberrations of systems with circular pupils are discussed.
Journal ArticleDOI
Uncertainty evaluation for measurements of peak-to-valley surface form errors
TL;DR: In this paper, a procedure for evaluating the uncertainty in peak-to-valley deviation of a surface from its specified form is presented, and a procedure is proposed to correct the bias caused by a number of error sources.