Real-Time Monitoring System for Industrial Motion and Optical Micro Vibration Detection
01 Jan 2014-pp 161-167
TL;DR: In this study, a monitoring system for driving motion and detecting vibration was developed for active vibration isolation and absorption and was an expandable embedded system with functions of motor control, signal conversion, data communication, on-board memory, and IO interfaces.
Abstract: Sensitive processes in semiconductor manufacturing require the isolation and quick absorption of vibration. In this study, a monitoring system for driving motion and detecting vibration was developed for active vibration isolation and absorption. The monitoring system was an expandable embedded system with functions of motor control, signal conversion, data communication, on-board memory, and IO interfaces. The vibration in this system was at the micro level, so laser gap sensors were used, and a connection was made with a monitoring system using TCP/IP to minimize noise in the data transfer line. A motion and vibration profile was acquired with the developed system.
References
More filters
01 Jan 2010-Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
TL;DR: In this article, a high precision, quick response pneumatic pressure regulator is proposed, which consists of an isothermal chamber, a servo valve, a pressure sensor, a quick response laminar flow sensor (QFS), and a pressure differential sensor (PD sensor).
Abstract: Pressure regulators are important elements in pneumatic systems. Relief-type precision pressure regulators are commonly used to control the supply pressure to actively controlled pneumatic vibration isolators. Herein, a high precision, quick response pneumatic pressure regulator is proposed. This consists of an isothermal chamber, a servo valve, a pressure sensor, a quick response laminar flow sensor (QFS), and a pressure differential sensor (PD sensor) as developed by the authors. Slight changes of pressure in the chamber can be detected by the PD sensor and are fed back to the servo valve to maintain the pressure at a desired value. The performance of this regulator was confirmed experimentally in comparison with one available commercially. The regulator was then applied to the supply pressure regulation of an actively controlled pneumatic vibration isolation table. The superior performance of the regulator is clearly shown in the experimental results, especially in terms of avoiding effects from upstream or downstream disturbances.
53 citations
TL;DR: In this article, a magneto-rheological elastomer (MRE) was used to construct a smart sandwich beam for micro-vibration control of equipment.
29 citations
TL;DR: Test results of vibration and noise after being equipped with the absorber show that vibration andnoise of the optical disk drive are considerably reduced.
Abstract: Vibration and noise reduction of an optical disk drive by using a vibration absorber is presented in this paper In optical disk drives such as CD-ROM or DVD drives, vibration may become one of serious problems to be resolved as the rotating speed and the storage capacity increase It is practically difficult to overcome the off-track and off-focusing errors by only the servo control without reducing vibration In particular, when an optical disk drive has a wavy spinning disk, it may suffer from severe vibration Based on the vibration signals measured by a laser vibrometer and an accelerometer, the resonance frequency of the disk drive is identified For reduction of the vibration around the resonance frequency, a vibration absorber is designed and it is equipped on the feeding deck of the drive The proposed vibration absorber consists of a steel plate ring and a rubber bobbin, which play roles of inertia mass and a spring, respectively During the design procedure of the absorber, a finite element model is used to determine the required fundamental natural frequency of the absorber The test results of vibration and noise after being equipped with the absorber show that vibration and noise of the optical disk drive are considerably reduced
24 citations
"Real-Time Monitoring System for Ind..." refers background in this paper
...The performance of an optical system can be improved by just isolating the vibration [2]....
[...]
TL;DR: The comparison shows that the most conservative Justervesenet vibration criterion is stricter with respect to high- frequencies than are the others, but it is less strict for low-frequency vibrations.
Abstract: Establishment of appropriate vibration criteria is essential when designing vibration-sensitive metrology laboratories. Boundary values that are too severe may lead to unnecessarily high construction costs, whereas limits that are too broad may result in degradation of the performance of measurement equipment. The Norwegian Metrology and Accreditation Service (Justervesenet) inaugurated a new facility early in 1997. The facility will allow measurements of mass, density, dimensional, force, volume, optical, pressure, temperature and electrical quantities. Vibration control is of concern in most of the laboratories. Vibration criteria have been defined in terms of frequency-dependent peak values. In this paper, these criteria are described and the most conservative criterion is compared with other known vibration criteria for standard laboratories and high-technology facilities. The vibration criteria considered have different formulations and cannot be compared directly. They are therefore compared with regard to three different kinds of idealized vibration excitation, that is, transient, harmonic-motion and broad-band noise. The comparison shows that the most conservative Justervesenet vibration criterion is stricter with respect to high-frequency vibrations than are the others, but it is less strict for low-frequency vibrations.
20 citations
"Real-Time Monitoring System for Ind..." refers background in this paper
...Vibration criteria were proposed for fabrication and precise optics [1]....
[...]
TL;DR: In this article, a novel interferometric vibration measurement sensor with quadrature detection is proposed, which utilizes simple optical configuration which contains 1/8 wave plate to generate two I/Q signals, then the signals were processed by arctangent algorithm which is compiled by Labview software through data acquisition card.
Abstract: In-phase and quadrature-phase (I/Q) signals often need to be formed in the laser interferometric vibration measurement technique. To avoid the disadvantages of traditional I/Q signals forming methods such as effect of piezoelectric ceramic (PZT) for generating high frequency carrier, or optical configuration with complicated structure, a novel interferometric vibration measurement sensor with quadrature detection is proposed. The sensor utilizes simple optical configuration which contains 1/8 wave plate to generate two I/Q signals, then the signals were processed by arctangent algorithm which is compiled by Labview software through data acquisition card. Theoretical analysis and experimental Lissajous figures synthesis prove the phase orthogonality of the two signals. The experimental results indicate that the system can measure the vibration displacement accurately.
18 citations