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Journal ArticleDOI

Repair of thin thermally grown silicon dioxide by anodic oxidation

10 Mar 2008-Electrochimica Acta (Pergamon)-Vol. 53, Iss: 8, pp 3395-3402
TL;DR: In this paper, anodic oxidation in 0.1 M HCl followed by a post-rapid thermal annealing process has been used to repair defects existing in thin thermally grown oxide layers (3 and 6) on a p-type silicon substrate.
About: This article is published in Electrochimica Acta.The article was published on 2008-03-10. It has received 18 citations till now. The article focuses on the topics: Equivalent oxide thickness & Oxide.
Citations
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Journal ArticleDOI
TL;DR: In this article, the dissolution of a massive chalcopyrite electrode was studied in 0.5 m sulfuric acid solution and different anodic potentials were applied and the behavior of the electrode was observed by means of EIS, potentiodynamic, and Mott-Schottky techniques.

115 citations

Journal ArticleDOI
TL;DR: In this article, the resolution of photocurrent measurements at field effect capacitors as used in light-addressable potentiometric sensors (LAPS) and scanning photo-induced impedance microscopy (SPIM) has been investigated using silicon on sapphire (SOS) substrates illuminated at different wavelengths.

53 citations

Journal ArticleDOI
TL;DR: Electrochemical measurement and X-ray photoelectron spectroscopy analysis indicated that Cu2+ was first adsorbed on the marmatite surface and then produced Cu-S surface species, thus catalyzing the oxidative dissolution process.

38 citations

Journal ArticleDOI
TL;DR: An ultrathin silicon dioxide (SiO2) layer of 1.2-1.4 nm thickness has been formed by immersion of Si wafers in nitric acid (HNO3) aqueous solutions, and its electrical characteristics and physical properties are investigated as a function of the HNO3 concentration as mentioned in this paper.
Abstract: An ultrathin silicon dioxide (SiO2) layer of 1.2–1.4 nm thickness has been formed by immersion of Si wafers in nitric acid (HNO3) aqueous solutions, and its electrical characteristics and physical properties are investigated as a function of the HNO3 concentration. Measurements of transverse optical and longitudinal optical phonons of Si–O–Si asymmetric stretching vibrational mode for SiO2 indicate that the atomic density of the SiO2 layer increases with the HNO3 concentration. X-ray photoelectron spectroscopy measurements show that the valence band discontinuity energy at the SiO2/Si interface also increases and the concentration of suboxide species decreases with the HNO3 concentration. The leakage current density of the ⟨Al/SiO2/Si(100)⟩ metal-oxide-semiconductor (MOS) diodes with the SiO2 layer formed in HNO3 aqueous solutions decreases with the HNO3 concentration and also decreases by postmetallization annealing (PMA) treatment at 250 °C in 5 vol % hydrogen atmosphere. For the MOS diodes with the SiO...

32 citations

Journal ArticleDOI
TL;DR: The results show that the microfluidic LAPS presents good performance in real-time detection of cell acidification and provides a convenient means of assessing cellular specificity of drugs.
Abstract: Metabolism is a common biological mechanism in living cells. Acidification plays an important role in cell metabolism, in which the extracellular pH change is used to indicate the vitality of cells. For extracellular detection of cell metabolic substances, light addressable potentiometric sensor (LAPS) has many advantages, such as high sensitivity, easy encapsulation, and convenient integration with microfluidic system for cell experiments. LAPS is a spatially resolved biochemical sensor based on field-effect. In this work, we present a microfluidic system integrated with LAPS for real-time extracellular acidification rate (ECAR) detection. The functions of traditional microphysiometer are achieved with simpler structure devices. Polydimethylsiloxane (PDMS) chamber was manufactured for cell culture, and microfluidic flow paths were used for medium and drug delivery. A bubble trap device was applied to eliminate air bubbles generated in microfluidics. Characteristic tests and cell metabolism experiments were carried out to determine the performance of LAPS by monitoring the pH change of hepatoma HepG2 cells. Glucose and doxorubicin were delivered to the cell chamber to verify the effects of the drug. The pH sensitivity of LAPS is 335.5 nA/pH at the working point in constant voltage mode. The ECAR of HepG2 cells was -48.53 mpH/min in normal glucose medium (25 mM), and it changed to -114.42 mpH/min in high glucose medium (125 mM) and -17.88 mpH/min under the effect of doxorubicin (10 μM). The results show that the microfluidic LAPS presents good performance in real-time detection of cell acidification and provides a convenient means of assessing cellular specificity of drugs. The modular structure and high expandability make the microfluidic LAPS has good potential in the application of organ-on-chip.

26 citations

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