RF MEMS Switch
01 Jan 2017-pp 1-38
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Book•
01 Jan 2003
TL;DR: In this paper, the basics of RF MEMS and how to design practical devices and circuits are discussed, as well as expert tips for designers and a range of real-world applications.
Abstract: From the Publisher:
Practical and theoretical coverage of RF MEMS for circuits and devices
New RF and microwave frequency MEMS (microeletromechanical systems) have potentially enormous and widespread applications in the telecommunications industry. Components based on this technologysuch as switches, varactors, and phase shiftersexhibit virtually no power consumption or loss, making them ideally suited for use in modern telecommunications and wireless devices.
This book sets out the basics of RF MEMS and describes how to design practical devices and circuits. As well as covering fundamentals, Gabriel Rebeiz offers expert tips for designers and presents a range of real-world applications. Throughout, the author utilizes actual engineering examples to illustrate basic principles in theory and practice. Detailed discussion of cutting-edge fabrication and packaging techniques is provided.
Suitable as a tutorial for electrical and computer engineering students, or as an up-to-date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology.
Author Biography: Gabriel M. Rebeiz received his PhD from the California Institute of Technology, and is Professor of Electrical and Computer Engineering at the University of Michigan, Ann Arbor. In 1991 he was the recipient of the National Science Foundation Presidential Young Investigator Award, and in 2000 was the corecipient of the IEEE Microwave Prize. A Fellow of the IEEE and a consultant to Rockwell, Samsung, Intel, Standard MEMS, and Agilent, he has published extensively in the field of microwave technology and in the area of RF MEMS.
1,895 citations
TL;DR: In this paper, the design and fabrication of a micromechanical capacitive membrane microwave switching device is described, which consists of a thin metallic membrane, which has two states, actuated or unactuated, depending on the applied bias.
Abstract: The design and fabrication of a micromechanical capacitive membrane microwave switching device is described. The switching element consists of a thin metallic membrane, which has two states, actuated or unactuated, depending on the applied bias. A microwave signal is switched on and off when the membrane is switched between the two states. These switches have a switching on speed of less than 6 /spl mu/s and a switching off speed of less than 4 /spl mu/s. The switching voltage is about 50 V. The switches have a bowtie shape and showed low insertion loss of 0.14 dB at 20 GHz and 0.25 dB at 35 GHz, and isolation of 24 dB at 20 GHz and 35 dB at 35 GHz. These devices offer the potential for building a new generation of low-loss high-linearity microwave circuits for a variety of phased antenna arrays for radar and communications applications.
430 citations
TL;DR: In this paper, a clean metal contact resistance model was used to study the contact resistance of microswitches with gold contacts, and the measured contact resistance (measured as a function of contact force) with the characteristics predicted by the model showed approximate agreement.
Abstract: Surface micromachined, electrostatically actuated microswitches have been developed at Northeastern University. Microswitches with gold contacts typically have an initial contact resistance of the order of 0.1 Ω over the first 10 5 cycles of lifetime while cold-switching 4 mA, and have a current handling capability of about 20 mA. In general, the contact resistance decreases over the first few thousand switch cycles, and degrades progressively when the switches are cycled beyond approximately 10 6 cycles. In this work, the microswitch contact resistance is studied on the basis of a clean metal contact resistance model. Comparison of the measured contact resistance (measured as a function of contact force) with the characteristics predicted by the model shows approximate agreement. The discrepancies between the model characteristics and measurements are discussed briefly.
236 citations
16 May 1995
TL;DR: In this article, the authors proposed the fabrication of low-cost, low-loss microwave switches using thin metal membranes actuated by electrostatic fields, which have a potential 1000 to 2000-GHz figure-of-merit.
Abstract: This paper proposes the fabrication of low-cost, low-loss microwave switches using thin metal membranes actuated by electrostatic fields. Measurement of switch test structures and modeling indicates that these devices have a potential 1000 to 2000-GHz figure-of-merit. Various aspects of fabrication, design, performance, and application of these devices are discussed. >
223 citations
Journal Article•
168 citations