RF-MEMS switches for reconfigurable integrated circuits
01 Nov 1998-IEEE Transactions on Microwave Theory and Techniques (IEEE)-Vol. 46, Iss: 11, pp 1868-1880
TL;DR: In this article, the electrostatic microswitch is used in a number of existing circuits and systems, including radio front-ends, capacitor banks, and time-delay networks, for quasi-optical beam steering and electrically reconfigurable antennas.
Abstract: This paper deals with a relatively new area of radio-frequency (RF) technology based on microelectro-mechanical systems (MEMS). RF MEMS provides a class of new devices and components which display superior high-frequency performance relative to conventional (usually semiconductor) devices, and which enable new system capabilities. In addition, MEMS devices are designed and fabricated by techniques similar to those of very large-scale integration, and can be manufactured by traditional batch-processing methods. In this paper, the only device addressed is the electrostatic microswitch - perhaps the paradigm RF-MEMS device. Through its superior performance characteristics, the microswitch is being developed in a number of existing circuits and systems, including radio front-ends, capacitor banks, and time-delay networks. The superior performance combined with ultra-low-power dissipation and large-scale integration should enable new system functionality as well. Two possibilities addressed here are quasi-optical beam steering and electrically reconfigurable antennas.
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Book•
01 Jan 2001
TL;DR: In this paper, the authors present a general framework for coupling matrix for Coupled Resonator Filters with short-circuited Stubs (UWB) and Cascaded Quadruplet (CQ) filters.
Abstract: Preface to the Second Edition. Preface to the First Edition. 1 Introduction. 2 Network Analysis. 2.1 Network Variables. 2.2 Scattering Parameters. 2.3 Short-Circuit Admittance Parameters. 2.4 Open-Circuit Impedance Parameters. 2.5 ABCD Parameters. 2.6 Transmission-Line Networks. 2.7 Network Connections. 2.8 Network Parameter Conversions. 2.9 Symmetrical Network Analysis. 2.10 Multiport Networks. 2.11 Equivalent and Dual Network. 2.12 Multimode Networks. 3 Basic Concepts and Theories of Filters. 3.1 Transfer Functions. 3.2 Lowpass Prototype Filters and Elements. 3.3 Frequency and Element Transformations. 3.4 Immittance Inverters. 3.5 Richards' Transformation and Kuroda Identities. 3.6 Dissipation and Unloaded Quality Factor. 4 Transmission Lines and Components. 4.1 Microstrip Lines. 4.2 Coupled Lines. 4.3 Discontinuities and Components. 4.4 Other Types of Microstrip Lines. 4.5 Coplanar Waveguide (CPW). 4.6 Slotlines. 5 Lowpass and Bandpass Filters. 5.1 Lowpass Filters. 5.2 Bandpass Filters. 6 Highpass and Bandstop Filters. 6.1 Highpass Filters. 6.2 Bandstop Filters. 7 Coupled-Resonator Circuits. 7.1 General Coupling Matrix for Coupled-Resonator Filters. 7.2 General Theory of Couplings. 7.3 General Formulation for Extracting Coupling Coefficient k. 7.4 Formulation for Extracting External Quality Factor Qe. 7.5 Numerical Examples. 7.6 General Coupling Matrix Including Source and Load. 8 CAD for Low-Cost and High-Volume Production. 8.1 Computer-Aided Design (CAD) Tools. 8.2 Computer-Aided Analysis (CAA). 8.3 Filter Synthesis by Optimization. 8.4 CAD Examples. 9 Advanced RF/Microwave Filters. 9.1 Selective Filters with a Single Pair of Transmission Zeros. 9.2 Cascaded Quadruplet (CQ) Filters. 9.3 Trisection and Cascaded Trisection (CT) Filters. 9.4 Advanced Filters with Transmission-Line Inserted Inverters. 9.5 Linear-Phase Filters. 9.6 Extracted Pole Filters. 9.7 Canonical Filters. 9.8 Multiband Filters. 10 Compact Filters and Filter Miniaturization. 10.1 Miniature Open-Loop and Hairpin Resonator Filters. 10.2 Slow-Wave Resonator Filters. 10.3 Miniature Dual-Mode Resonator Filters. 10.4 Lumped-Element Filters. 10.5 Miniature Filters Using High Dielectric-Constant Substrates. 10.6 Multilayer Filters. 11 Superconducting Filters. 11.1 High-Temperature Superconducting (HTS) Materials. 11.2 HTS Filters for Mobile Communications. 11.3 HTS Filters for Satellite Communications. 11.4 HTS Filters for Radio Astronomy and Radar. 11.5 High-Power HTS Filters. 11.6 Cryogenic Package. 12 Ultra-Wideband (UWB) Filters. 12.1 UWB Filters with Short-Circuited Stubs. 12.2 UWB-Coupled Resonator Filters. 12.3 Quasilumped Element UWB Filters. 12.4 UWB Filters Using Cascaded Miniature High- And Lowpass Filters. 12.5 UWB Filters with Notch Band(s). 13 Tunable and Reconfigurable Filters. 13.1 Tunable Combline Filters. 13.2 Tunable Open-Loop Filters without Via-Hole Grounding. 13.3 Reconfigurable Dual-Mode Bandpass Filters. 13.4 Wideband Filters with Reconfigurable Bandwidth. 13.5 Reconfigurable UWB Filters. 13.6 RF MEMS Reconfigurable Filters. 13.7 Piezoelectric Transducer Tunable Filters. 13.8 Ferroelectric Tunable Filters. Appendix: Useful Constants and Data. A.1 Physical Constants. A.2 Conductivity of Metals at 25 C (298K). A.3 Electical Resistivity rho in 10-8 m of Metals. A.4 Properties of Dielectric Substrates. Index.
4,774 citations
05 Apr 2012
TL;DR: Several examples of reconfigurable antennas for both terrestrial and space applications are highlighted, such as cognitive radio, multiple-input-multiple-output (MIMO) systems, and satellite communication.
Abstract: Reconfigurable antennas, with the ability to radiate more than one pattern at different frequencies and polarizations, are necessary in modern telecommunication systems. The requirements for increased functionality (e.g., direction finding, beam steering, radar, control, and command) within a confined volume place a greater burden on today's transmitting and receiving systems. Reconfigurable antennas are a solution to this problem. This paper discusses the different reconfigurable components that can be used in an antenna to modify its structure and function. These reconfiguration techniques are either based on the integration of radio-frequency microelectromechanical systems (RF-MEMS), PIN diodes, varactors, photoconductive elements, or on the physical alteration of the antenna radiating structure, or on the use of smart materials such as ferrites and liquid crystals. Various activation mechanisms that can be used in each different reconfigurable implementation to achieve optimum performance are presented and discussed. Several examples of reconfigurable antennas for both terrestrial and space applications are highlighted, such as cognitive radio, multiple-input-multiple-output (MIMO) systems, and satellite communication.
595 citations
TL;DR: The recent progress in MEMS for radio frequency (RF) applications from a device perspective is reviewed in this article, where switches and relays, tunable capacitors, integrated inductors, mechanical resonators and filters, and some representative microwave and millimetre-wave components are discussed.
Abstract: This paper reviews the recent progress in MEMS for radio frequency (RF) applications from a device perspective. RF MEMS devices reviewed include switches and relays, tunable capacitors, integrated inductors, mechanical resonators and filters, and some representative microwave and millimetre-wave components. Important device parameters are highlighted, as they have significant contributions to the performance of the final products in which the devices are used. The challenges and statuses of these RF MEMS devices are outlined and discussed. The intent of this topical review is to provide perspective to newcomers in the field, and empower potential end-users with an overall device picture, current status, and a vision of their ultimate performance capabilities.
552 citations
Cites background from "RF-MEMS switches for reconfigurable..."
...Brown published a paper in 1998 [ 51 ] with a good comparison of RF switches for re-configurable ICs, such as quasi-optical beam steering and electrically re-configurable antennae....
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25 Oct 2002
TL;DR: In this article, the authors present an integration and packaging for RF MEMS devices, including inductors and capacitors, phase shifters, and relay switches. But they do not discuss how to construct them.
Abstract: Preface. Microelectromechanical Systems (MEMS) and Radio Frequency MEMS. MEMS Materials and Fabrication Techniques. RF MEMS Switches and Micro Relays. MEMS Inductors and Capacitors. Micromachined RF Filters. Micromachined Phase Shifters. Micromachined Transmission Lines and Components. Micromachined Antennae. Integration and Packaging for RF MEMS Devices. Index.
348 citations
Cites background or methods from "RF-MEMS switches for reconfigurable..."
...This creates a hysteretic behavior (Brown, 1998; Zavracky and Morrison, 1984), which is inherent for all MEMS switches....
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...The size of the gap can be found by balancing these two forces for an applied voltage and can be written as (Brown, 1998)...
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..., 1999), capacitive (Brown, 1998; Goldsmith et al., 1998; Majumdar et al., 1997; Muldavin and Rebeiz, 2000a, 2000b; Pacheco, Katehi and Nguyen, 2000; Pacheco, Peroulis and Katehi, 2001; Park et al., 2001; Poltz et al., 2001; Rizk et al., 2001; Santos et al., 1997; Sovero et al., 1999; Ulm et al., 2000; Yao et al., 1997) and membrane (Goldsmith et al....
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...In this class, one could consider traditional cantilever and diaphragm type MEMS which can be used as electrostatic microswitch and comb-type capacitors (Brown, 1998)....
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...Following the classical review paper by Brown (1998), the RF MEMS development to date can be classified into the following categories based on whether one takes an RF or MEMS view point: (1) RF extrinsic in which the MEMS structure is located outside the RF circuit and actuates or controls other…...
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15 Apr 2015
TL;DR: The optimization of reconfigurable antenna design and operation by removing unnecessary redundant switches to alleviate biasing issues and improve the system's performance is discussed.
Abstract: The advancement in wireless communications requires the integration of multiple radios into a single platform to maximize connectivity. In this paper, the design process of reconfigurable antennas is discussed. Reconfigurable antennas are proposed to cover different wireless services that operate over a wide frequency range. They show significant promise in addressing new system requirements. They exhibit the ability to modify their geometries and behavior to adapt to changes in surrounding conditions. Reconfigurable antennas can deliver the same throughput as a multiantenna system. They use dynamically variable and adaptable single-antenna geometry without increasing the real estate required to accommodate multiple antennas. The optimization of reconfigurable antenna design and operation by removing unnecessary redundant switches to alleviate biasing issues and improve the system's performance is discussed. Controlling the antenna reconfiguration by software, using Field Programmable Gate Arrays (FPGAs) or microcontrollers is introduced herein. The use of Neural Networks and its integration with graph models on programmable platforms and its effect on the operation of reconfigurable antennas is presented. Finally, the applications of reconfigurable antennas for cognitive radio, Multiple Input Multiple Output (MIMO) channels, and space applications are highlighted.
320 citations
Additional excerpts
...…gate array (FPGA); Filtenna; graph models; graphene; Infra-Red; laser diodes; liquid crystals; micro-electromechanical systems (MEMS); mul- tiple input multiple output (MIMO); neural networks; photo- conductive switches; p-i-n diodes; plasmonics; reconfigurable antennas; thermal switches; varactors...
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References
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Book•
30 Nov 1993
TL;DR: Details of Element Pattern and Mutual Impedance Effects for Phased Arrays and Special Array Feeds for Limited Field of View and Wideband Arrays are presented.
Abstract: Phased Arrays in Radar and Communication Systems. Pattern Characteristics and Synthesis of Linear and Planar Arrays. Patterns of Nonplanar Arrays. Elements, Transmission Lines, and Feed Architectures for Phased Arrays. Summary of Element Pattern and Mutual Impedance Effects. Array Error Effects. Special Array Feeds for Limited Field of View and Wideband Arrays.
2,233 citations
"RF-MEMS switches for reconfigurable..." refers background in this paper
...13, in which the phase shifters and other RF electronics are integrated with planar antennas on parallel slats [16]....
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01 Aug 1998
TL;DR: An overview of recent progress in the development of micromachined devices for use in wireless communication subsystems is presented in this article, where specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers.
Abstract: An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q's in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers.
481 citations
TL;DR: In this paper, a coplanar waveguide (CPW) transmission line with fixed-fixed beam MEMS bridge capacitors placed periodically over the transmission line, thus creating a slow-wave structure was designed.
Abstract: Wide-band switches and true-time delay (TTD) phase shifters have been developed using distributed microelectromechanical system (MEMS) transmission lines for applications in phased-array and communication systems. The design consists of a coplanar waveguide (CPW) transmission line (W=G=100 /spl mu/m) fabricated on a 500 /spl mu/m quartz substrate with fixed-fixed beam MEMS bridge capacitors placed periodically over the transmission line, thus creating a slow-wave structure. A single analog control voltage applied to the center conductor of the CPW line can vary the phase velocity of the loaded line by pulling down on the MEMS bridges to increase the distributed capacitive loading. The resulting change in the phase velocity yields a TTD phase shift. Alternatively, the control voltage can be increased beyond the pull-down voltage of the MEMS bridges such that the capacitive loading greatly increases and shorts the line to ground. The measured results demonstrate 0-60 GHz TTD phase shifters with 2 dB loss/118/spl deg/ phase shift at 60 GHz (/spl sim/4.5-ps TTD) and 1.8 dB loss/84/spl deg/ phase shift at 40 GHz. Also, switches have been demonstrated with an isolation of better than 40 dB from 21 to 40 and 40 to 60 GHz. In addition, a transmission-line model has been developed, which results in very close agreement with the measured data for both the phase shifters and switches. The pull-down voltage is 10-23 V, depending on the residual stress in the MEMS bridge. To our knowledge, this paper presents the first wide-band TTD MEMS phase shifters and wide-band switches to date.
440 citations
25 Jun 1995
TL;DR: In this paper, a surface micromachined miniature switch has been made on a semi-insulating GaAs substrate using a suspended silicon dioxide micro-beam as the cantilevered arm, a platinum-to-gold electrical contact, and electrostatic actuation as the switching mechanism.
Abstract: A surface micromachined miniature switch has been made on a semi-insulating GaAs substrate using a suspended silicon dioxide micro-beam as the cantilevered arm, a platinum-to-gold electrical contact, and electrostatic actuation as the switching mechanism. This switch functions from DC to RF frequency, and has an electrical isolation of -50 dB and an insertion loss of 0.1 dB at 4 GHz. The low process temperature budget of 250°C ensures the switch’s monolithic integration capability with microwave and millimeter wave integrated circuits.
337 citations
"RF-MEMS switches for reconfigurable..." refers background in this paper
...4(a) and (b) are micrographs of the SPST switches developed at Hughes Research Laboratories (HRL), Malibu, CA, and the Rockwell Science Center, Thousand Oaks, CA [6], respectively....
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TL;DR: In this article, the authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy of miniature electromechanical sensors and actuators.
Abstract: Miniature electromechanical sensors and actuators can be mass produced on silicon wafers much like ICs. They combine readily with signal-processing circuitry into powerful tools that measure, analyze, and control their environments. The authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy. The following applications are discussed: pressure sensors, medical equipment, industrial/consumer equipment, avionics, and mechanical applications. >
290 citations