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Journal ArticleDOI

Scaling the Si MOSFET: from bulk to SOI to bulk

R.-H. Yan, +2 more
- 01 Jul 1992 - 
- Vol. 39, Iss: 7, pp 1704-1710
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TLDR
In this article, the scaling of fully depleted SOI devices is considered and the concept of controlling horizontal leakage through vertical structures is highlighted, and several structural variations of conventional SOI structures are discussed in terms of a natural length scale to guide the design.
Abstract
Scaling the Si MOSFET is reconsidered. Requirements on subthreshold leakage control force conventional scaling to use high doping as the device dimension penetrates into the deep-submicrometer regime, leading to an undesirably large junction capacitance and degraded mobility. By studying the scaling of fully depleted SOI devices, the important concept of controlling horizontal leakage through vertical structures is highlighted. Several structural variations of conventional SOI structures are discussed in terms of a natural length scale to guide the design. The concept of vertical doping engineering can also be realized in bulk Si to obtain good subthreshold characteristics without large junction capacitance or heavy channel doping. >

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Citations
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Journal ArticleDOI

Phosphorene: An Unexplored 2D Semiconductor with a High Hole Mobility

TL;DR: In this paper, the 2D counterpart of layered black phosphorus, which is called phosphorene, is introduced as an unexplored p-type semiconducting material and the authors find that the band gap is direct, depends on the number of layers and the in-layer strain, and significantly larger than the bulk value of 0.31-0.36 eV.
Journal ArticleDOI

Phosphorene: A New 2D Material with High Carrier Mobility

TL;DR: In this article, a few-layer phosphorene has been introduced as a 2D p-type material for electronic applications, which has an inherent, direct and appreciable band gap that depends on the number of layers.

Phosphorene: An Unexplored 2D Semiconductor with a High Hole

TL;DR: The found phosphorene to be stable and to have an inherent, direct, and appreciable band gap, which depends on the number of layers and the in-layer strain, and is significantly larger than the bulk value of 0.31-0.36 eV.
Journal ArticleDOI

Device scaling limits of Si MOSFETs and their application dependencies

TL;DR: The end result is that there is no single end point for scaling, but that instead there are many end points, each optimally adapted to its particular applications.
References
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Journal ArticleDOI

Design of ion-implanted MOSFET's with very small physical dimensions

TL;DR: This paper considers the design, fabrication, and characterization of very small Mosfet switching devices suitable for digital integrated circuits, using dimensions of the order of 1 /spl mu/.
Journal ArticleDOI

Short-channel effect in fully depleted SOI MOSFETs

TL;DR: In this article, the short channel effect in fully depleted silicon-on-insulator MOSFETs has been studied by a two-dimensional analytical model and by computer simulation, and it is found that the vertical field through the depleted film strongly influences the lateral field across the source and drain regions.
Journal ArticleDOI

Generalized scaling theory and its application to a ¼ micrometer MOSFET design

TL;DR: In this paper, a generalized scaling theory was proposed to allow for independent scaling of the FET physical dimensions and applied voltages, while still maintaining constant the shape of the electric field pattern.
Proceedings ArticleDOI

Silicon-on-insulator 'gate-all-around device'

TL;DR: In this paper, the authors describe the process fabrication and the electrical characteristics of an SOI MOSFET with gate oxide and a gate electrode not only on top of the active silicon film but also underneath it.
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