Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films.
Citations
529 citations
Cites methods from "Scanning X-ray microdiffraction wit..."
...For this reason, methods for the analysis of local stresses down to the submicrometre scale by microdiffraction employing synchrotron radiation, a rapidly developing field of research (see, for example, Tamura et al., 2003, and references therein), have been excluded....
[...]
172 citations
154 citations
149 citations
136 citations
References
1,149 citations
"Scanning X-ray microdiffraction wit..." refers background in this paper
...However, ultra-smooth mirrors in a Kirkpatrick±Baez (KB) orthogonal con®guration (Kirkpatrick & Baez, 1948) are the only optics to combine achromaticity, high ef®ciency and good focus....
[...]
973 citations
"Scanning X-ray microdiffraction wit..." refers background in this paper
...…optics have been developed for X-rays during the past decade, including Fresnel zone plates (Lai et al., 1992), refractive compounds lenses (Snigirev et al., 1996), capillaries (EngstroÈ m et al., 1991; Thiel et al., 1992; Bilderback et al., 1994), waveguides (Spiller & SegmuÈ ller, 1974;…...
[...]
478 citations
"Scanning X-ray microdiffraction wit..." refers background in this paper
...This phenomenon is known as electromigration and generates high stress gradients in the wires (Blech & Herring, 1976)....
[...]
348 citations
"Scanning X-ray microdiffraction wit..." refers background in this paper
...The application of monochromatic mSXRD to studies of deformation in bulk polycrystalline materials has been recently demonstrated with a three-dimensional X-ray microscope (Margulies et al., 2001)....
[...]
310 citations
"Scanning X-ray microdiffraction wit..." refers background in this paper
...Surface diffusion at the interface between Cu and the passivation layer is the dominant diffusion mechanism in Cu interconnects (Hu et al., 1999)....
[...]