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Journal ArticleDOI

Si, SiGe Nanowire Devices by Top–Down Technology and Their Applications

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TLDR
The current technology status for realizing the GAA NW device structures and their applications in logic circuit and nonvolatile memories are reviewed and the challenges and opportunities are outlined.
Abstract
Nanowire (NW) devices, particularly the gate-all-around (GAA) CMOS architecture, have emerged as the front-runner for pushing CMOS scaling beyond the roadmap. These devices offer unique advantages over their planar counterparts which make them feasible as an option for 22 -nm and beyond technology nodes. This paper reviews the current technology status for realizing the GAA NW device structures and their applications in logic circuit and nonvolatile memories. We also take a glimpse into applications of NWs in the ldquomore-than-Moorerdquo regime and briefly discuss the application of NWs as biochemical sensors. Finally, we summarize the status and outline the challenges and opportunities of the NW technology.

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Citations
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Journal ArticleDOI

Silicon Nanowires: A Review on Aspects of their Growth and their Electrical Properties

TL;DR: In this article, the authors summarized some of the essential aspects of silicon-nanowire growth and of their electrical properties, including the expansion of the base of epitaxially grown Si wires, a stability criterion regarding the surface tension of the catalyst droplet, and the consequences of the Gibbs-Thomson effect for the silicon wire growth velocity.
Journal ArticleDOI

Vertical Si-Nanowire $n$ -Type Tunneling FETs With Low Subthreshold Swing ( $\leq \hbox{50}\ \hbox{mV/decade}$ ) at Room Temperature

TL;DR: In this article, a Si nanowire based tunneling field effect transistor (TFET) using a CMOS-compatible vertical gate-all-around structure has been presented.
Journal ArticleDOI

HfOx-based vertical resistive switching random access memory suitable for bit-cost-effective three-dimensional cross-point architecture.

TL;DR: A bit- cost-effective technology path toward the 3D integration that requires only one critical lithography step or mask for reducing the bit-cost is demonstrated in this work.
Proceedings ArticleDOI

HfOx based vertical resistive random access memory for cost-effective 3D cross-point architecture without cell selector

TL;DR: In this paper, a double-layer stacked HfOx vertical RRAM is demonstrated for 3D crosspoint architecture using a cost-effective fabrication process, and a unique write/read scheme is proposed for 3d cross-point architecture.
Journal ArticleDOI

Synthesis and modification of silicon nanosheets and other silicon nanomaterials.

TL;DR: This review provides methods for the synthesis and modification of silicon nanosheets and other silicon nanomaterials with examples of their potential applications and a soft synthetic method for silicon nanOSheets with chemical surface modification in a solution process.
References
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Journal ArticleDOI

Highly sensitive sensors for alkali metal ions based on complementary- metal-oxide-semiconductor-compatible silicon nanowires

TL;DR: In this article, a densely packed organic monolayer terminated with amine groups is introduced to the SiNW surface via hydrosilylation and amine-modified crown ethers acting as sensing elements are then immobilized onto the SiNNs through a cross-linking reaction with the monoline.
Proceedings ArticleDOI

Gate-all-around Twin Silicon nanowire SONOS Memory

TL;DR: In this article, the authors developed gate-all-around (GAA) SONOS with ultra thin twin silicon nanowires for the first time using channel hot electron injection (CHEI) and hot hole injection (HHI) mechanisms.
Journal ArticleDOI

Ge-Rich (70%) SiGe Nanowire MOSFET Fabricated Using Pattern-Dependent Ge-Condensation Technique

TL;DR: In this article, a top-down approach of forming SiGe-nanowire (SGNW) MOSFET, with Ge concentration modulated along the source/drain (Si0.7Ge0.3) to channel (Si 0.3Ge 0.7) regions, is presented.
Proceedings ArticleDOI

Observation of Mobility Enhancement in Strained Si and SiGe Tri-Gate MOSFETs with Multi-Nanowire Channels Trimmed by Hydrogen Thermal Etching

TL;DR: In this article, a novel anisotropic thermal etching technique in H2 atmosphere was used to improve the mobility of strained Si and SiGe tri-gate nanowire (NW) MOSFETs with significantly reduced lineedge roughness and smooth sidewalls.
Journal ArticleDOI

Demonstration of Schottky Barrier NMOS Transistors With Erbium Silicided Source/Drain and Silicon Nanowire Channel

TL;DR: In this paper, the authors have fabricated silicon nanowire N-MOSFETs using erbium disilicide (ErSi2-x) in a Schottky source/drain back-gated architecture.
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