Journal ArticleDOI
Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges
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In this article, a nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH 4 and CH 4 gases, and the chemical composition of the powder was determined by X-ray photoelectron spectroscopy.About:
This article is published in Vacuum.The article was published on 1997-09-01. It has received 8 citations till now. The article focuses on the topics: Glow discharge & Electron diffraction.read more
Citations
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Journal ArticleDOI
Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS
Miklós Veres,Margit Koós,Sára Tóth,Miklós Füle,István Pócsik,András Tóth,Miklós Mohai,Imre Bertóti +7 more
TL;DR: In this article, the influence of silicon and oxygen content on the structure of amorphous diamond-like carbon films are discussed and the chemical composition and bonding between the constituents are investigated.
Journal ArticleDOI
Synthesis, properties, and multifarious applications of SiC nanoparticles: A review
TL;DR: In this paper , a comprehensive overview on the synthesis, properties and potential applications of SiC nanoparticles is presented, with the classification of solid phase, liquid phase and vapor phase processes.
Journal ArticleDOI
Nanometric powder of stoichiometric silicon carbide produced in square-wave modulated RF glow discharges
TL;DR: In this article, a SiC nanometric powder has been obtained in square-wave modulated radiofrequency glow discharges from CH 4 and SiH 4 gas mixtures, and the effects on the structure of the powder were examined by FTIR, EA, XPS and from optical transmittance measurements.
Book ChapterDOI
Nanoparticles from low-pressure, low-temperature plasmas
TL;DR: In this paper, the formation of particles in low-temperature, low-pressure plasmas is discussed and various technological aspects of the formation and characterization of the powders are discussed.
Journal ArticleDOI
Nanopowder of silicon nitride produced in radio frequency modulated glow discharges from SiH4 and NH3
TL;DR: In this paper, the authors reported the production of SiN nanopowder at room temperature and low pressure by RF glow discharge decomposition of SiH 4 and NH 3 gases, where the RF power was modulated at 0.5 Hz with a duty cycle of 20% in order to control the size of the expelled particles.
References
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Journal ArticleDOI
Coatings for mechanical and chemical protection based on organic-inorganic sol-gel nanocomposites
Reiner Kasemann,Helmut Schmidt +1 more
TL;DR: The sol-gel process opens the possibility of combining inorganic and organic units on a molecular or nanosized level as discussed by the authors, and the flexible chemical approach of tailoring inorganic structures as well as organic polymeric structures in combination with the new concept of incorporation of nanoscaled metal oxide particles open the possibility to achieve new multifunctional materials like extremely high scratch resistance, antisoiling properties, antifogging properties and corrosion-inhibitant coatings on metals.
Journal ArticleDOI
Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering
C. Courteille,Christoph Hollenstein,J.-L. Dorier,W. Schwarzenbach,Alan Howling,Enric Bertran,G. Viera,Rodrigo Martins,A. Maçarico +8 more
TL;DR: In this article, the authors used a Brownian free molecule coagulation model to determine the time evolution of particle size and their number density in situ multi-angle polarization-sensitive laser light scattering.
Journal ArticleDOI
The surface composition of silicon carbide powders and whiskers: An XPS study
TL;DR: The surface composition and bonding of a wide variety of silicon carbide powders and whiskers have been characterized by x-ray photoelectron spectroscopy (XPS) as discussed by the authors.
Journal ArticleDOI
Radio frequency sputtering—the significance of power input
TL;DR: In this paper, the discharge power is derived by subtracting losses from the total power reading, which can be used as an aid in the scaling of system sizes, and this discharge power exhibits interesting behavior as the pressure is varied, at constant applied rf voltage.