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Journal ArticleDOI

Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

03 Sep 1990-Applied Physics Letters (American Institute of Physics)-Vol. 57, Iss: 10, pp 1046-1048
TL;DR: In this paper, free standing Si quantum wires can be fabricated without the use of epitaxial deposition or lithography using electrochemical and chemical dissolution steps to define networks of isolated wires out of bulk wafers.
Abstract: Indirect evidence is presented that free‐standing Si quantum wires can be fabricated without the use of epitaxial deposition or lithography. The novel approach uses electrochemical and chemical dissolution steps to define networks of isolated wires out of bulk wafers. Mesoporous Si layers of high porosity exhibit visible (red) photoluminescence at room temperature, observable with the naked eye under <1 mW unfocused (<0.1 W cm−2) green or blue laser line excitation. This is attributed to dramatic two‐dimensional quantum size effects which can produce emission far above the band gap of bulk crystalline Si.
Citations
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Journal ArticleDOI
TL;DR: In this article, the quality of vertical roughness produced by the etching of Si in aqueous KOH has been studied by varying several experimental parameters such as molarity, time of etching, temperature, and stirring.
Abstract: The quality of vertical roughness produced by the etching of Si in aqueous KOH has been studied by varying several experimental parameters such as molarity, time of etching, temperature, and stirring. We note that at room temperature, unstirred etching is smoother at low and high molarities, and etch rate and roughness both peak near 5–6 M. With no stirring, roughness increases as a function of etch time, then levels off. With stirring, roughness decreases, especially around the peak etch rate near 5–6 M. For a fixed molarity like 5 M, unstirred etching becomes smoother with increasing temperature even as the etch rate increases rapidly. Such results suggest that masking by hydrogen bubbles or silicate etch products is the principle origin of vertical roughness. Bubble properties as a function of molarity and stirring (as determined from electrolysis experiments) are used to suggest a pseudo‐masking model to explain some roughness properties.

159 citations

Journal ArticleDOI
TL;DR: The stain film that results from the etching of poly- or single-crystalline Si is composed of a porous network of nanocrystalline silicon as discussed by the authors, which can be obtained by exercising control over the composition of the etchant.
Abstract: Recent advances in the production of Si nanostructures from electroless etching are reviewed, including stain etching, metal-assisted etching and chemical vapour etching. A brief review of the explosion in applications of porous silicon over the past 18 months is also given. The stain film that results from the etching of (poly- or single-)crystalline Si is composed of a porous network of nanocrystalline silicon. Few mechanistic studies of electroless etching have been performed, but the more extensively studied anodic etching of silicon in fluoride solutions provides many clues as to how porous films are formed. Intriguing recent results have shown that control over the properties of the film can be obtained by exercising control over the composition of the etchant.

159 citations

Journal ArticleDOI
TL;DR: In this paper, a bond-order-bond-length -bond strength correlation mechanism is presented for consistent insight into the origin of the shape and size dependence of a nanosolid, aiming to provide guidelines for designing nanomaterials with desired functions.
Abstract: A bond-order–bond-length–bond-strength (bond-OLS) correlation mechanism is presented for consistent insight into the origin of the shape-and-size dependence of a nanosolid, aiming to provide guidelines for designing nanomaterials with desired functions. It is proposed that the coordination number imperfection of an atom at a surface causes the remaining bonds of the lower-coordinated surface atom to relax spontaneously; as such, the bond energy rises (in absolute value). The bond energy rise contributes not only to the cohesive energy (ECoh) of the surface atom but also to the energy density in the relaxed region. ECoh relates to thermodynamic properties such as self-assembly, phase transition and thermal stability of a nanosolid. The binding energy density rise is responsible for the changes of the system Hamiltonian and related properties, such as the bandgap, core-level shift, phonon frequency and the dielectrics of a nanosolid of which the surface curvature and the portion of surface atoms vary with particle size. The bond-OLS premise, involving no assumptions or freely adjustable parameters, has led to consistency between predictions and experimental observations of a number of outstanding properties of nanosolids.

158 citations

Journal ArticleDOI
TL;DR: Porosity superlattices have been investigated by transmission electron microscopy, photoluminescence and reflectance spectroscopy in this article, and the results are in good agreement with the values calculated from the etching rate and time.
Abstract: Porosity superlattices have been investigated by transmission electron microscopy, photoluminescence and reflectance spectroscopy. The superlattices were formed on p-type doped Si using two different techniques. Firstly, for homogeneously doped substrates we have periodically varied the formation current density and thereby the porosity. Secondly, the current density was kept constant while etching was performed on periodically doped Si layers. For the first type of superlattices the layer thicknesses were determined by transmission electron microscopy. The results are in good agreement with the values calculated from the etching rate and time. For both types of superlattices, reflectance and photoluminescence spectra show strong modulation due to the periodicity of the superlattice.

158 citations

Journal ArticleDOI
TL;DR: In this paper, an energy-based continuum model for the analysis of nanoscale materials where surface effects are expected to contribute significantly to the mechanical response is presented, which is based on principles utilized in Cauchy-Born constitutive modeling in that the strain energy density of the continuum is derived from an underlying crystal structure and interatomic potential.
Abstract: We present an energy-based continuum model for the analysis of nanoscale materials where surface effects are expected to contribute significantly to the mechanical response. The approach adopts principles utilized in Cauchy–Born constitutive modelling in that the strain energy density of the continuum is derived from an underlying crystal structure and interatomic potential. The key to the success of the proposed method lies in decomposing the potential energy of the material into bulk (volumetric) and surface area components. In doing so, the method naturally satisfies a variational formulation in which the bulk volume and surface area contribute independently to the overall system energy. Because the surface area to volume ratio increases as the length scale of a body decreases, the variational form naturally allows the surface energy to become important at small length scales; this feature allows the accurate representation of size and surface effects on the mechanical response. Finite element simulations utilizing the proposed approach are compared against fully atomistic simulations for verification and validation. Copyright © 2006 John Wiley & Sons, Ltd.

157 citations

References
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Journal ArticleDOI
TL;DR: In this article, the properties of electrolyte-semiconductor barriers are described, with emphasis on germanium, and the use of these barriers in localizing electrolytic etching is discussed.
Abstract: Properties of electrolyte-semiconductor barriers are described, with emphasis on germanium. The use of these barriers in localizing electrolytic etching is discussed. Other localization techniques are mentioned. Electrolytes for etching germanium and silicon are given.

1,039 citations

Journal ArticleDOI
TL;DR: It is found that a standard, widespread, chemical-preparation method for silicon, oxidation followed by an HF etch, results in a surface which from an electronic point of view is remarkably inactive, which has implications for the ultimate efficiency of silicon solar cells.
Abstract: We have found that a standard, widespread, chemical-preparation method for silicon, oxidation followed by an HF etch, results in a surface which from an electronic point of view is remarkably inactive. With preparation in this manner, the surface-recombination velocity on Si111g is only 0.25 cm/sec, which is the lowest value ever reported for any semiconductor. Multiple-internal-reflection infrared spectroscopy shows that the surface appears to be covered by covalent Si-H bonds, leaving virtually no surface dangling bonds to act as recombinatiuon centers. These results have implications for the ultimate efficiency of silicon solar cells.

910 citations

Journal ArticleDOI
TL;DR: In this paper, multiple internal infrared reflection spectroscopy has been used to identify the chemical nature of chemically oxidized and subsequently HF stripped silicon surfaces, and these very inert surfaces are found to be almost completely covered by atomic hydrogen.
Abstract: Multiple internal infrared reflection spectroscopy has been used to identify the chemical nature of chemically oxidized and subsequently HF stripped silicon surfaces. These very inert surfaces are found to be almost completely covered by atomic hydrogen. Results using polarized radiation on both flat and stepped Si(111) and Si(100) surfaces reveal the presence of many chemisorption sites (hydrides) that indicate that the surfaces are microscopically rough, although locally ordered. In particular, the HF‐prepared Si(100) surface appears to have little in common with the smooth H‐saturated Si(100) surface prepared in ultrahigh vacuum.

588 citations

Journal ArticleDOI
TL;DR: In this article, the authors measured hydrogen desorption from monohydride and dihydride species on crystalline-silicon surfaces using transmission Fourier-transform infrared (FTIR) spectroscopy.
Abstract: Hydrogen desorption kinetics from monohydride and dihydride species on crystalline-silicon surfaces were measured using transmission Fourier-transform infrared (FTIR) spectroscopy. The FTIR desorption measurements were performed in situ in an ultrahigh-vacuum chamber using high-surface-area porous-silicon samples. The kinetics for hydrogen desorption from the monohydride and dihydride species was monitored using the SiH stretch mode at 2102 ${\mathrm{cm}}^{\mathrm{\ensuremath{-}}1}$ and the ${\mathrm{SiH}}_{2}$ scissors mode at 910 ${\mathrm{cm}}^{\mathrm{\ensuremath{-}}1}$, respectively. Annealing studies revealed that hydrogen from the ${\mathrm{SiH}}_{2}$ species desorbed between 640 and 700 K, whereas hydrogen from the SiH species desorbed between 720 and 800 K. Isothermal studies revealed second-order hydrogen desorption kinetics for both the monohydride and dihydride surface species. Desorption activation barriers of 65 kcal/mol (2.82 eV) and 43 kcal/mol (1.86 eV) were measured for the monohydride and dihydride species, respectively. These desorption activation barriers yield upper limits of 84.6 kcal/mol (3.67 eV) and 73.6 kcal/mol (3.19 eV) for the Si-H chemical bond energies of the SiH and ${\mathrm{SiH}}_{2}$ surface species.

479 citations