Structural dynamics of microsystems—current state of research and future directions
TL;DR: In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.
About: This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.
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TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Abstract: Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS devices and ever more interesting scientifically. This review reports not only the overview of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices, but also the physical principles that have enabled fundamental insights into the pull-in instability as well as pull-in induced failures. Pull-in governing equations and conditions to characterize and predict the static, dynamic and resonant pull-in behaviors are summarized. Specifically, we have described and discussed on various state-of-the-art approaches for extending the travel range, controlling the pull-in instability and further enhancing the performance of MEMS and NEMS devices with electrostatic actuation and sensing. A number of recent activities and achievements methods for control of torsional electrostatic micromirrors are introduced. The on-going development in pull-in applications that are being used to develop a fundamental understanding of pull-in instability from negative to positive influences is included and highlighted. Future research trends and challenges are further outlined.
442 citations
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Abstract: This review provides a summary of the work completed to date on the nonlinear dynamics of resonant micro- and nanoelectromechanical systems (MEMS/NEMS). This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior, and this allows engineers to beneficially leverage nonlinear dynamics in the course of device design. This work provides an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, such as localization and synchronization, which arise in coupled resonator arrays. In addition, the work describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. The paper closes with some brief remarks about important ongoing developments in the field.
239 citations
Cites methods from "Structural dynamics of microsystems..."
...Reviews of modeling from the structural mechanics community include those of Lin and Wang [32] on structural...
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TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Abstract: Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
142 citations
Cites background or methods from "Structural dynamics of microsystems..."
...The governing equation of a vibrating system with cubic stiffness non-linearity can be written as [50]:...
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...Many studies have focused on common applications of electrostatic principle in MEMS devices, including: the instability when pull-in phenomenon occurs [7-37]; the deformation characteristic of microstructures subjected to electrostatic loads [18,38-41]; shape and position of drive electrodes [42-45]; dynamic response and optimization of electrostatic loads [46-57]; air damping effect [58-66], analysis method of chaos and bifurcation in electrostatic-driven systems [67,68], such as finite element method (FEM), finite difference method (FDM), and finite cloud meshless method (FCM) [68-73]; simulation software and systems of simulated dynamic behaviors, such as ANSYS, ABAQUS, COULOMB, MEMCAD, and macro models [69,72,74-78]; effects of routing parameters (voltage and temperature) on electrostatic force [79]; inherent nonlinear stiffness softening effect [70,80-82]; device reliability related failure modes and mechanisms; material selection; and reasonable design [8,32,38,83-92]....
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...SEM of a microbeam resonator (a) and its 1st modal shape simulated by CoventorWare (b) [50]....
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...SEM of a gyroscope (a) and its lumped model (b) [50]....
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01 Jan 2008
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Abstract: This review provides a summary of the work completed to date on the nonlinear dynamics of resonant micro- and nanoelectromechanical systems (MEMS/NEMS). This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior, and this allows engineers to beneficially leverage nonlinear dynamics in the course of device design. This work provides an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, such as localization and synchronization, which arise in coupled resonator arrays. In addition, the work describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. The paper closes with some brief remarks about important ongoing developments in the field.Copyright © 2008 by ASME
126 citations
Cites methods from "Structural dynamics of microsystems..."
...This effort built upon the earlier work of Wang and collaborators [166]....
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...Reviews of modeling from the structural mechanics community include those of Lin and Wang [32] on structural...
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...Reviews of modeling from the structural mechanics community include those of Lin and Wang [32] on structural dynamics and Wittwer et al. [33], which addresses the important problem of modeling nonlinear static structural elements in the face of uncertainties....
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...Similarly, Luo and Wang [65] considered global dynamics in electrostatically-actuated systems with periodically time-varying capacitance....
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Journal Article•
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
Abstract: Author(s): Tang, William; Zhang, Xia | Abstract: A systematic experimental study of viscous air damping in laterally moving planar microstructures is reported. Previous studies indicated that Couette and Stokes flow models underestimate microstructural damping. To investigate this discrepancy, a series of lateral resonant microstructures with different damping plates and combs was fabricated by polysilicon surface micromachining. The resonant frequencies and quality factors of the structures were measured electrically. By analyzing these data, the damping effects due to different geometries were elucidated and compared to theory. The results indicated that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometries and comb drives. An empirical formula that predicts the quality factor for a range of plate sizes and comb designs was derived. The damping effects as functions of structural thickness and structure-to-substrate separation are also reported.
120 citations
References
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Book•
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TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Abstract: CONTENTS: BENDING OF LONG RECTANGULAR PLATES TO A CYLINDRICAL SURFACE PURE BENDING OF PLATES SYMMETRICAL BENDING OF CIRCULAR PLATES SMALL DEFLECTIONS OF LATERALLY LOADED PLATES SIMPLY SUPPORTED RECTANGULAR PLATES RECTANGULAR PLATES WITH VARIOUS EDGE CONDITIONS CONTINUOUS RECTANGULAR PLATES PLATES ON ELASTIC FOUNDATION PLATES OF VARIOUS SHAPES SPECIAL AND APPROXIMATE METHODS IN THEORY OF PLATES BENDING OF ANISTROPIC PLATES BENDING OF PLATES UNDER THE COMBINED ACTION OF LATERAL LOADS AND FORCES IN THE MIDDLE PLANE OF THE PLATE LARGE DEFLECTIONS OF PLATES DEFORMATION OF SHELLS WITHOUT BENDING GENERAL THEORY OF CYLINDRICAL SHELLS SHELLS HAVING THE FORM OF A SURFACE OF REVOLUTION AND LOADED SYMMETRICALLY WITH RESPECT TO THEIR AXIS.
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01 Jan 1997TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Abstract: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.New in the Second EditionRevised chapters that reflect the many recent advances in the fieldUpdated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.Many more links to the WebProblem sets in each chapter
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Book•
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01 Jan 2001
TL;DR: In this article, a minor numerical error in going from Eq. 16.39 to eq.16.40 is found, which has an obvious effect on the calculations that follow, increasing the minimum detectable temperature change to about 2 mK.
Abstract: p. 445 There is a minor numerical error in going from Eq. 16.39 to Eq. 16.40. The factor of 2 in the 1/f term was omitted, so the correct numerator for the second term in Eq. 16.40 is 1.44 x 10 -7 . This error has an obvious effect on the calculations that follow, increasing the minimum detectable temperature change to about 2 mK (Eq. 16.44) and, correspondingly, increasing the RMS noise calculated from Eq. 16.49 by sqrt(2).
1,917 citations
Book•
01 Feb 1998
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.
Abstract: 1 Introduction and Overview2 Micromachining Techniques3 Mechanical Transducers4 Optical Transducers5 Ionizing Radiation Transducers6 Thermal Transducers7 Magnetic & Electromagnetic Transducers8 Chemical & Biological Transducers9 Microfluidic Devices
1,212 citations