Structural dynamics of microsystems—current state of research and future directions
Citations
442 citations
239 citations
Cites methods from "Structural dynamics of microsystems..."
...Reviews of modeling from the structural mechanics community include those of Lin and Wang [32] on structural...
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142 citations
Cites background or methods from "Structural dynamics of microsystems..."
...The governing equation of a vibrating system with cubic stiffness non-linearity can be written as [50]:...
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...Many studies have focused on common applications of electrostatic principle in MEMS devices, including: the instability when pull-in phenomenon occurs [7-37]; the deformation characteristic of microstructures subjected to electrostatic loads [18,38-41]; shape and position of drive electrodes [42-45]; dynamic response and optimization of electrostatic loads [46-57]; air damping effect [58-66], analysis method of chaos and bifurcation in electrostatic-driven systems [67,68], such as finite element method (FEM), finite difference method (FDM), and finite cloud meshless method (FCM) [68-73]; simulation software and systems of simulated dynamic behaviors, such as ANSYS, ABAQUS, COULOMB, MEMCAD, and macro models [69,72,74-78]; effects of routing parameters (voltage and temperature) on electrostatic force [79]; inherent nonlinear stiffness softening effect [70,80-82]; device reliability related failure modes and mechanisms; material selection; and reasonable design [8,32,38,83-92]....
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...SEM of a microbeam resonator (a) and its 1st modal shape simulated by CoventorWare (b) [50]....
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...SEM of a gyroscope (a) and its lumped model (b) [50]....
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126 citations
Cites methods from "Structural dynamics of microsystems..."
...This effort built upon the earlier work of Wang and collaborators [166]....
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...Reviews of modeling from the structural mechanics community include those of Lin and Wang [32] on structural...
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...Reviews of modeling from the structural mechanics community include those of Lin and Wang [32] on structural dynamics and Wittwer et al. [33], which addresses the important problem of modeling nonlinear static structural elements in the face of uncertainties....
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...Similarly, Luo and Wang [65] considered global dynamics in electrostatically-actuated systems with periodically time-varying capacitance....
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120 citations
References
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