Proceedings ArticleDOI
Tapering and size reduction of single-mode silicon waveguides by maskless RIE
Sujith Chandran,Bijoy Krishna Das +1 more
- pp 655-656
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TLDR
Two-step reactive ion etching process has been optimized to demonstrate small cross-section single-mode silicon waveguides as mentioned in this paper, which has helped to reduce the insertion loss of compact integrated photonic devices in SOI platform up to 3 dB.Abstract:
Two-step reactive ion etching process has been optimized to demonstrate small cross-section single-mode silicon waveguides This technique has helped to reduce the insertion loss of compact integrated photonic devices in SOI platform up to 3 dBread more
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Journal ArticleDOI
Surface trimming of silicon photonics devices using controlled reactive ion etching chemistry
TL;DR: In this paper, a reactive ion etching chemistry has been optimized for trimming of rib waveguides and an empirical model has been developed to obtain the resulting waveguide geometries.
References
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Journal ArticleDOI
Large single-mode rib waveguides in GeSi-Si and Si-on-SiO/sub 2/
TL;DR: In this article, mode-matching and beam-propagation methods are used to analyze single-mode operation of optical GeSi-Si and Si-SiO/sub 2/ semiconductor rib waveguides.
Journal ArticleDOI
Compact efficient broadband grating coupler for silicon-on-insulator waveguides.
TL;DR: A high-efficiency broadband grating coupler for coupling between silicon-on-insulator (SOI) waveguides and optical fibers and the size of the grooves is optimized numerically.
Journal ArticleDOI
Low-loss converters between optical silicon waveguides of different sizes and types
TL;DR: In this article, two types of low-loss converters between different optical waveguides on silicon-on-insulator are demonstrated, and the fabrication of both structures is based on a simple two-step etch process with a relaxed mask alignment tolerance and no need for epitaxy.
Journal ArticleDOI
Dispersion-Free SOI Interleaver for DWDM Applications
TL;DR: In this article, a dispersion-free interleaver design has been proposed, fabricated, and characterized to separate alternate DWDM channels with 100 GHz spacings with a uniform inter-channel extinction of 18 dB.
Proceedings ArticleDOI
Silicon photonic-wire waveguide devices
Tao Chu,Hirohito Yamada,Shigeru Nakamura,Makoto Tojo,Yutaka Urino,Satomi Ishida,Yasuhiko Arakawa +6 more
TL;DR: In this article, the authors have demonstrated various optical devices based on silicon photonic-wire waveguides, which include a directional coupler, a tunable optical add-drop multiplexer, and some ultra-compact 1 x N optical switches.