Figure 5: Shaded image representation of 20×20 µm2 AFM scans from samples after 5 hours of exposure to the ion+neutral flux at 100 °C with: (a) no pre-/post-annealing; (b) 200 °C pre-annealing; (c) 300 °C pre-annealing; and (d) 250 °C post-annealing.
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