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Proceedings ArticleDOI

Two-wavelength laser interferometry using super-heterodyne detection

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TLDR
In this paper, a super-heterod e detection method was proposed to make high resolution measurements at 241 -I effective difference wavelengths Λ = λ 1 λ 2λ 1- shorter than 30 cm, without being obliged to have interferometric stability at the optical wavelengths Xi and 1.
Abstract
Two-wavelength interferometry is well known since years and often used for ranging and contouring at reduced sensitivity 1. Recently, two-wavelength heterodyne interferometry has been reported, which can be applied for both, smooth and rough surfaces 2. However, this method is limited to large wavelength differences, which can be optically separated (prism, grating). By the availability of tunable diode-lasers as light sources, multiple wavelength interferometry with small wavelength differences is getting increased practical interest 3. It is the purpose of this paper to present a novel method, based on super-heterod e detection, which allows to make high resolution measurements at 241-- I effective difference wavelengths Λ = λ1 λ2λ1- shorter than 30 cm, without being obliged to have interferometric stability at the optical wavelengths Xi and1. itse and to separate these wavelengths optically. This is of great importance for range finding and industrial distance measuring with submillimeter resolution.

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Citations
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Journal ArticleDOI

Two-wavelength double heterodyne interferometry using a matched grating technique.

TL;DR: Two-wavelength double heterodyne interferometry is applied for topographic measurements on optically rough target surfaces to improve system stability and to simplifyheterodyne frequency generation.
Journal ArticleDOI

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry

TL;DR: The experimental results demonstrate that the proposed heterodyne grating-based interferometer is capable of sensing the displacement of a motion stage in 3-DOF.
Journal ArticleDOI

Absolute Distanzinterferometrie mit variabler synthetischer Wellenlänge

TL;DR: In this article, a variable synthetische Wellenlänge (VSW) is proposed as an alternative to the bekannten Multi-WellenLängen-Verfahren.

Optical techniques for shape measurements

TL;DR: In this paper, the authors discuss the progress made in the last few years due to the development of laser and solid state detector elements together with very powerful computer support for the processing of information.
Journal ArticleDOI

Double-wavelength superheterodyne interferometer for absolute ranging with submillimeter resolution: results obtained with a demonstration model by use of rough and reflective targets.

TL;DR: The experimental results obtained with a demonstration model of a double-wavelength interferometer with superheterodyne detection are described, which has demonstrated the ability to reach resolutions of 0.2 mm at 5-m distances on rough targets in 50-ms integration time.
References
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Journal ArticleDOI

Distance measurement by the wavelength shift of laser diode light

TL;DR: This paper proposes a method for measuring distance larger than the wavelength of light with an interferometer using a laser diode, which is a kind of multiwavelength interferometry using a single light source.
Journal ArticleDOI

Rough surface interferometry with a two-wavelength heterodyne speckle interferometer.

TL;DR: It is shown that the macroscopic surface profile may be determined from the phase differences if the effective wavelength Λ = λ1λ2/|λ1−λ2| is sufficiently larger than the standard deviation of the microscopic profile of the illuminated surface, and the statistical error is reasonably small if the phase measurements are obtained from speckles of sufficient intensity.
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