Abstract: I semiconductor structures continuously shrink in size and grow in complexity, driven by the incessant digitization of our everyday lives. Likewise, the corresponding industrial manufacturing tools and processes keep pushing technological limits to achieve this feat, for example with the upcoming adoption of extreme ultraviolet lithography, which facilitates semiconductor technology node sizes below 10 nm. Thus, nanometer-precision mechatronic positioning systems are essential tools for this industry. They are used for various applications, such as the positioning and moving of semiconductor wafers in lithography, inspection, or other manufacturing processes. Different electromagnetic actuators, like permanent magnet linear motors or magnetically levitating bearings, are employed. The forceand torqueproducing electric currents of these actuators must be free of noise and other unwanted signal components to prevent the generation of undesired forces that otherwise lead to positioning errors. Thus, shrinking semiconductor features and more complex manufacturing processes demand an increasing accuracy and precision of the positioning actuators and their corresponding driving currents. Similarly, the demand for a high manufacturing throughput increases the required actuator output powers. Traditionally, the desired low-noise and low-distortion actuator currents are provided by linear amplifiers due to their inherently low output noise. However, the achievable power conversion efficiencies are limited and high output powers cannot be generated in the vicinity of precision motion systems due to thermal constraints. Hybrid amplifiers, which combine a linear amplifier with a switch-mode power electronic converter, strive to alleviate these restrictions. Nonetheless, such systems are more complex and require careful tuning to achieve the desired load current quality. This thesis investigates output noise and distortion of high-power, digitally controlled switch-mode (Class-D) amplifiers for precision positioning and motion applications. Such power converters feature simple and scalable topologies, which reduces development time and cost. The resulting implications on important sources of noise and distortion within such systems are carefully and comprehensively analyzed. Amplifier constituents that critically affect noise and distortion are identified and optimized. Extensive measurements on smalland full-scale hardware prototypes verify the findings. In a first step, suitable and modern wide-bandgap power electronic switching devices and converter topologies are analyzed, using detailed computer circuit simulations that model both the electrical and thermal power transistor