Atomic layer deposition

About: Atomic layer deposition is a research topic. Over the lifetime, 19821 publications have been published within this topic receiving 477332 citations. The topic is also known as: ALD.

Atomic layer deposition method and semiconductor device formed by the same

Abstract: Disclosed are atomic layer deposition method and a semiconductor device including the atomic layer, including the steps: placing a semiconductor substrate in an atomic layer deposition chamber; feeding a first precursor gas to the semiconductor substrate within the chamber to form a first discrete monolayer on the semiconductor substrate; feeding an inert purge gas to the semiconductor substrate within the chamber to remove the first precursor gas which has not formed the first discrete monolayer on the semiconductor substrate; feeding a second precursor gas to the chamber to react with the first precursor gas which has formed the first discrete monolayer, forming a discrete atomic size islands; and feeding an inert purge gas to the semiconductor substrate within the chamber to remove the second precursor gas which has not reacted with the first precursor gas and byproducts produced by the reaction between the first and the second precursor gases.

Method for low-temperature organic chemical vapor deposition of tungsten nitride, tungsten nitride films and tungsten nitride diffusion barriers for computer interconnect metallization

Abstract: Processes for producing tungsten nitride and tungsten nitride films are provided in which a tungsten carbonyl compound and a nitrogen-containing reactant gas are reacted at a temperature below about 600° C. Tungsten nitride precursors are also included which comprise a tungsten carbonyl compound capable of forming a tungsten nitride film in the presence of a nitrogen-containing reactant gas at a temperature of less than about 600° C. A process for forming a film by atomic layer deposition is also provided which includes introducing into a substrate having a surface into a deposition chamber and heating the substrate to a temperature sufficient to allow adsorption of a tungsten source precursor or an intermediate of a tungsten source precursor, introducing a tungsten source precursor into the deposition chamber by pulsing for a period of time sufficient to form a self-limiting monolayer of the source precursor or an intermediate of the tungsten source precursor intermediate, introducing an inert gas into the deposition chamber by pulsing the inert gas to purge the deposition to remove the tungsten nitride precursor in the gas phase, introducing a nitrogen-containing gas into the deposition chamber by pulsing to react with the adsorbed precursor monolayer on the substrate surface and to form a first tungsten nitride atomic layer on the substrate surface. An inert gas may then introduced into the deposition chamber for a period of time sufficient to remove the unreacted nitrogen-containing gas and reaction byproducts from the deposition chamber. The entire pulsing sequence including precursor, inert gas, nitrogen-containing gas may be repeated until a film with a desired thickness is achieved.

Selective atomic layer deposition of zirconia on copper patterned silicon substrates using ethanol as oxygen source as well as copper reductant

Abstract: The authors report a new chemical approach for the selective atomic layer deposition of ultrathin layers of zirconium oxide (ZrO2) on copper patterned silicon surfaces. Instead of using common atomic layer deposition (ALD) oxygen sources such as water, oxygen, or ozone, the authors use ethanol, which serves as oxygen source for the ALD on the silicon side and as effective reducing agent on the copper side, thereby selectively depositing ZrO2 film on the silicon surface of the substrate without any deposition on copper up to at least 70 ALD cycles. The resulting ZrO2 nanofilm is found to be an effective copper diffusion barrier at temperatures at least up to 700 °C.

Enhanced thin film deposition

Abstract: Methods of producing metal-containing thin films with low impurity contents on a substrate by atomic layer deposition (ALD) are provided. The methods preferably comprise contacting a substrate with alternating and sequential pulses of a metal source chemical, a second source chemical and a deposition enhancing agent. The deposition enhancing agent is preferably selected from the group consisting of hydrocarbons, hydrogen, hydrogen plasma, hydrogen radicals, silanes, germanium compounds, nitrogen compounds, and boron compounds. In some embodiments, the deposition-enhancing agent reacts with halide contaminants in the growing thin film, improving film properties.