Showing papers on "Bimorph published in 1990"

Method of making an integrated scanning tunneling microscope

Abstract: An integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate at one area and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry and applied to pairs of electrodes formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips with very sharp points formed thereon which are moved by the action of the control circuit and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface. The movements of the tip can be tracked to yield an image of the surface at atomic resolution.

Conducting Polymer Electromechanical Actuators

Abstract: Conducting polymer charge-transfer complexes are evaluated as electromechanical materials for the direct conversion of electrical energy to mechanical energy. Large dimensional changes upon electrochemical doping/dedoping provide the mechanical response for proposed extensional, pneumatic, bimorph, and micromechanical actuators. Actuator performance is predicted using both the observed performance of electrochromic devices, electrochemical transistors, and batteries and observed polymer properties as a function of doping. Conducting polymer actuators can provide more than an order of magnitude advantage over piezoelectric polymers regarding achievable dimensional changes, electrically generated stresses, and the work density per cycle. Using very thin films or fibers to minimize diffusion distances, cycle times of less than 100 ms and device lifetimes of above 106 cycles should be feasible for microactuators. Additionally, the conducting polymer actuators can operate at voltages which are about an order of magnitude lower than for piezoelectric actuators or electrostatic microactuators. Energy efficiencies, cycle times, and cycle lifetimes are, however, inherently much lower than for piezoelectric polymers.

Transducer for detecting pressure changes in pipes

Abstract: A transducer for detecting pressure changes in pipes by detecting deformation of the pipes and for converting the pressure changes in the pipes into electric signals includes a piezoelectric element having a bimorph structure as a sensor element. The piezoelectric element is constructed in such a way that an intermediate layer is interposed between two piezoelectic pieces. The element is pressed against the pipe surface by a holder which is sufficiently elastic to allow opposite ends of the piezoelectric element in the circumferential direction of the pipe to elastically abut against the pipe periphery. Thereby the ends of the piezoelectric element can be pressed in tight contact against the outer surfaces of pipes having various diameters, and the internal pressure of the pipes can be detected reliably.

Microfabrication of integrated scanning tunneling microscope

Abstract: An integrated circuit‐compatible process has been demonstrated for microfabricating arrays of scanning tunneling microscopes on silicon wafers. Each microfabricated scanning tunneling microscope (STM) incorporates a novel three‐dimensional thin‐film piezoelectric actuator which is capable of scanning the STM tip laterally over the sample surface and following surface topography. The actuator is in the form of a cantilever bimorph constructed from alternating layers of multiple metallic electrodes, dielectric films, and piezoelectric zinc oxide films. Each device is designed to scan a region 0.1×1 μm with low voltage drive, with a maximum vertical deflection of 15 μm, which simplifies sample approach. The dimensions of the device are 1000×200×8 μm. Operation of the device has been demonstrated by imaging graphite with atomic resolution. The piezoelectric actuator in this device is itself a significant contribution to the field of microactuators, with many non‐STM applications.

A planar process for microfabrication of a scanning tunneling microscope

Abstract: With decreasing size, a scanning tunneling microscope (STM) becomes less sensitive to vibrations and thermal drift and easier to manufacture by batch fabrication techniques. An integrated-circuit-compatible planar process has been developed to fabricate arrays of STMs on Si wafers. Using planar technology, it is possible to integrate the tunneling tip, the actuation mechanism and (if desired) the counter electrode on a Si ‘chip’. The actuator mechanism is a cantilevered bimorph consisting of alternating layers of metal and piezoelectric zinc oxide. Each metal layer is divided into two electrodes that can be individually addressed, thereby enabling the cantilever to move in three orthogonal directions. The thin (3 μm) piezoelectric layers allow low voltage (< 30 V) operation. The theoretical response of the actuator is 2500 A/V in z, 104 A/V in y and 14 A/V in x. The device has been successfully fabricated and its operation has been demonstrated by imaging the surface of graphite with atomic resolution. A planar process for microfabrication of an integrated STM has been developed and operation of this ‘STM on a chip’ has been demonstrated by imaging the surface of graphite with atomic resolution. The devices are small (typically 8 × 200 × 1000 μm) and are fabricated in large batches of over 200 cantilevers per wafer. By utilizing the bimorph action of a cantilever made of metal and piezoelectric ZnO, it is possible to achieve three-dimensional scanning motions using low-voltage feedback circuits. Initial results show a z-sensitivity of up to 2500 A/V for the cantilever, which is sufficient to use the device as an STM and obtain atomic resolution images. Processes for growing a sharp tunneling tip on the cantilever are being prepared and we envision integrating onboard signal-processing circuitry with the device. The piezoelectric bimorph cantilever with three-dimensional motion is likely to have numerous and diverse applications in the field of microfabrication.

Properties of PZT multilayer actuators

Abstract: PZT (lead zirconate titanate) multilayer actuators have small volume, fast response, low power consumption, and low driving voltage The fabrication of such parts, however, has some limitations The use of AgPd for inner electrodes allows maximum sintering temperatures of only about 1100 degrees C This can be achieved by a modified ceramic process and by the choice of appropriate material compositions The internal stresses due to the combination of piezoactive layers and thin metal electrodes have to be minimized by suitable geometric design Bimorph or plate actuators operated in the length extensional mode have an appropriate geometry so that the influence of the multilayer technology on the piezoelectric properties can be studied These properties are given as a function of the number and thickness of the PZT layers By comparison with calculated values the separate influence of the internal electrodes can be shown Data for bimorph actuators with 30- mu m PZT layers and with a driving voltage down to 9 V are presented >

High‐temperature scanning tunneling microscope

Abstract: A novel scanning tunneling microscope that operates at high temperature has been developed We originally designed a new type of microscope that heats only the sample and maintains the other elements at room temperature The design uses bimorph piezoelectric drivers that are placed apart from the sample by five orthogonal arms The sensitivity of the piezoelectric drivers is independent of the sample temperature Atomic scale images of graphite at temperatures ranging from room temperature to 400 °C are obtained

Optical beam deflector using a piezoelectric bimorph actuator

Abstract: This paper describes optical beam deflectors using piezoelectric bimorphs with both ends clamped. In these deflectors, the bimorph must bend so that a mirror affixed onto its central position tilts by applying voltage. The poling configuration which enables the bimorph to generate such a deformation has been analyzed. Deflectors for both one- and two-dimensional operations have been individually fabricated and investigated based on this analytical result. The maximum optical beam deflection and resonance frequency were about 20 mrad and 3.3 kHz, respectively, for a one-dimensional operation deflector. The values were about 16 mrad and 3.0 kHz, respectively, for a two-dimensional operation deflector.

Electroacoustic piezoelectric transducer having a broad operating range

Abstract: An electroacoustic piezoelectric transducer comprises a concave diaphragm and at least two planar bimorph elements having different respective resonance frequency characteristics coupled to the diaphragm. The bimorph elements may comprise larger and smaller bimorph elements providing frequency responses in lower and higher frequency ranges respectively, and are preferably directly connected to the inner concave surface of the diaphragm.

Manufacture of piezoelectric displacement element

Abstract: PURPOSE: To obtain a piezoelectric displacement element having a large displacement quantity by providing a cantilever and electric circuit on a semiconductor chip and forming a continuous pattern by piling up piezoelectric thin films and electrodes. CONSTITUTION: An MOSIC which is gate oxidized to a prescribed extent is provided on an n-type Si substrate cut along the orientation (100). An a-SiN film 6 is formed by a plasma CVD method, etc., at a cantilever forming position. Then a bimorph constitution is constructed by successively piling up Pt electrodes and piezoelectric thin films 8 of Pb(Zr 0.9 Ti 0.1 )O 3 by an RF magnetron sputtering method, etc., and an oxide film is removed from a connecting area by patterning the film by Ar ion milling. After the oxide film is removed, electrodes 9 are formed by patterning wiring. After an a-SiN film is formed as a protective layer 10 by a plasma CVD method and patterning and etching the layer 10, the cantilever is finally formed by performing anisotropic etching on the Si substrate with a KOH solution. COPYRIGHT: (C)1992,JPO&Japio

Body implantable type liquid injection pump

Abstract: PURPOSE:To enhance the injection stability of a liquid by the driving of a piezoelectric element when a liquid drug is injected in the body by driving a means for injecting a stored substance by the piezoelectric element. CONSTITUTION:A bimorph type piezoelectric element 10 is provided so as to be adjacent to a pump chamber 9 and the surface thereof is coated with an insulating film. The bimorph type piezoelectric element 10 is held by an O-ring 11 and receives the supply of a signal through the lead wire 12 connected to a control part to be driven. In order to inject insulin by pump driving, bending motion is given to the bimorph type piezoelectric element 10 by applying voltage from a power supply part through the lead wire 12 and directly applied to the pump chamber 9 to emit insulin in a reservoir 1 from the outlet 8 of the pump chamber. By this method, when a liquid drug is injected in the body, a very small amount of the liquid drug can be injected continuously and stably without being affected by the bodily temp. of a user or peripheral atmospheric pressure.

Simulation networks of piezobimorphs for robotic actuators

Abstract: The case of a clamped bimorph cantilever actuator is considered. The exact admittance matrix has previously been determined from energy considerations. A change of variables makes it possible to convert this to a succinct, normalized form. This is then synthesized in equivalent network terms using electrical and mechanical capacitors coupled by ideal transformer interconnections. Network simplifications are also given. These descriptions are particularly useful for treating actuator behavior as part of the overall electrical circuits in which they are embedded. >

Piezoelectric actuator using a LiNbO/sub 3/ bimorph for an optical switch

Abstract: The authors describe a ferroelectric actuator that uses an LiNbO/sub 3/ plate with an antipolarity ferroelectric laminar domain (inversion layer). They studied the characteristics of 140 degrees and 165 degrees rotated Y-cut LiNbO/sub 3/ bimorph plates and explored the feasibility of using an actuator with the LiNbO/sub 3/ plate in an optical switch that switches the optical paths of multimode optical fibers. The actuator fabricated had stoppers on both sides of the plate and a 45-mg load was bonded using soft resin. This mass was used to damp secondary resonance generated by the plate hitting the stopper. The actuator could be switched in 10 ms or less. The authors made a prototype optical switch by placing graded-index fibers on the top of the LiNbO/sub 3/ plate to permit optical path switching based on the actuator's displacement. The optical switch had a switching time of 10 ms or less, with a loss of 0.8 dB or less. >

Piezoelectric rotatably driving device

Abstract: PURPOSE:To obtain a rotatably driving device which is mechanically rigid and can drive elements to be driven at a high speed by using first and second bimorph type piezoelectric displacement elements with high reliability by respectively connecting the first and second piezoelectric displacement elements at the ends to the elements to be driven, fixing them at the other ends, disposing them on one linear line, displacing the first and second elements reversibly to each other at the ends of the elements to be driven of first and second elements by applying a voltage thereto to rotatably drive the elements to be driven CONSTITUTION:First and second bimorph type piezoelectric displacement elements 111, 112 of split electrode structure are disposed on one linear line, connected at one ends to mirrors 17 of elements to be driven, and fixed at the other ends to a base 14 When a voltage is applied to the elements 111, 112 from a power source 15 with such 1 structure, the free end of the element 111 is displaced upward, and the free end of the element 112 is displaced downward In order that the polarizing directions of the elements are differentiated at the fixed and free ends, the free end is rotated simultaneously upon displacement Its rotating angle is clockwise in the element 111, and counterclockwise in the element 112 As a whole result, a wavy deformation is designated, and the mirror 17 is rotated according to the deformation

Sample moving table

Abstract: PURPOSE:To obtain a sample moving table in a region of frequencies where a proper resonance point of an apparatus is high by providing said moving table for a scanning tunnelling microscope (STM) with a rough moving function and a slight moving function, so that a high-resolution measurement is performed by said slight moving function, and the narrow measuring area of said slight moving function is supplemented by said rough moving function. CONSTITUTION:Moving legs 24, 25 in engagement with a piezoelectric bimorph 23 are provided in grooves 21a, 21c of a base 21, respectively. A supporting leg 26 in engagement with the bimorph 23 is provided in a groove 21b of the base 21 to support a sample platform. When it is required to position a sample for a high resolution measurement, that is, a minute movement is required, a signal is applied to the bimorph 23 to shift the bimorph 23 while the moving legs 24, 25 are fixed by piezoelectric elements 22a, 22b in the grooves 21a, 21c, thereby shifting the sample platform 29. On the other hand, a coarse movement is required to move the platform 29 in the area exceeding the maximum displacement permitted for the minute movement. In the coarse movement, while the moving legs 24, 25 and supporting leg 26 are alternately secured by the elements 22a, 22b, they are advanced and retreated alternately along the grooves to move the sample platform 29.

Bimorph-type piezoelectric actuator

Abstract: PURPOSE:To be accessed at high speed when this actuator is used for an actuator for drive use of an optical pickup system by a method wherein electrodes formed on both the surface and the rear of a piezoelectric bimorph is set to a specific shape in order to prevent a high-order resonance oscillation mode other than a primary-order resonance oscillation mode from being generated. CONSTITUTION:One end of a piezoelectric bimorph 8 whose common electrode 9 has been sandwiched and held between piezoelectric materials 10 from both the surface and the rear surface is set as a fixed end A; a load mass 11 is attached to the side which has been set as a free end B on the other end. In such a bimorph-type piezoelectric actuator, a shape f(x) of electrodes 12 formed on both the surface and the rear of the piezoelectric bimorph 8 is set to a shape obtained after a linear normal function phi1(x) expressing a primary resonance oscillation mode of the piezoelectric bimorph 8 in a state having the load mass 11 has been second-order-differentiated as d phi1(x)/dx at a coordinate axis (x) in a longitudinal direction of the piezoelectric bimorph 8; the electrodes are formed symmetrically on both the surface and the rear of the piezoelectric bimorph 8. Thereby, it is possible to obtain the actuator, for optical pickup use, which can be accessed at high speed and which is small-sized and lightweight.

Simulation networks for piezoelectric bimorph actuators

Abstract: The constituent equations for piezoelectric bimorphs are written in terms of redefined extensive and intensive variables which makes it possible to write the bimorph matrix in numerical form. This numerical matrix is diagonalized to give the eigenvalues of bimorphs. The modal matrix is used to find the corresponding eigenstates. A physical interpretation of bimorph eigenstates is proposed. Two realizations of network representation are given for the admittance matrix. The eigenvalue matrix is inverted to give the impedance matrix. The network representation of the impedance matrix is given. >

Adaptive optics: a bimorph mirror for wavefront correction

Abstract: A bimorph mirror seems to be low voltage, large strokes device which can be used asa correction mirror in an adaptive optics system for infrared applications. A few theoretical results are recalled and have been used to develop a numericalmethod to solve the displacements of a bimorph mirror supplied by a distribution of voltages.An example is given which involves seven electrodes ; comparisons with theoreticaland other numerical results are achieved. 1. INJTRODUCTION In a recent communication, F. Roddier [1] described a new concept in adaptive optics based on curvature sensing and compensation. It consists in measuring the local wavefront curvatures instead of the local slopes as currently made and to use thesemeasurements to control directly a bimorph mirror. Indeed, as local curvatures areequivalent to the Laplacian of the surface, we have to solve the Poisson's equation to, retrieve the initial wavefront from curvature measurements.As shown by Kokorowski [2], a bimorph mirror solves automatically the Poisson'sequation as the Laplacian of the deformation of its surface is proportional to its drivingvoltages.

Optimizing Scanning Mirror System Performance using Solid State Piezoelectric Actuators

Abstract: Solid state actuators have several advantages over coil-driven motors. They are easily shaped, less expensive, lighter, and faster. They provide motion without separate pulleys, gears and shafts. Since there are no surfaces to wear out, solid state actuators are rugged and dependable, providing benefits in cost and reliability of performance. In this paper the design of a scanning mirror system using piezoelectric actuators is presented. A dual-cantilevered bimorph electromechanical coupling is used in order to maximize the amount of angular deflection possible with an applied field. Rate feedback provides resonance damping. Position feedback provides increased bandwidth and decreased hysteresis. A prototype system, including the actuator and feedback mechanism, is developed. Its performance compares favorably with its model; it is capable of plus or minus five degrees of angular deflection with a bandwidth of three hundred Hertz.

Method and device for measuring speed of shear wave and compressional wave of bed logging

Abstract: PURPOSE:To measure the shear speed of bed logging by using the shear wave by a sonde consisting of two receivers which are at a constant distance to one oscillator. CONSTITUTION:The sonde 2 suspended in a boring hole A filled with water by a cable 1 is provided with the oscillator 3 and receivers 4 and 5 at the constant intervals from below. A voltage control signal from a controller main body 6, measurement signals from the receivers 4 and 5, etc., are transmitted and received by the cable 1. A computer 6a is coupled with the control main body 6. The shear wave from the oscillator 3 made of a couple of rectangular bimorph piezoelectric ceramic materials is received by the receivers 4 and 5 made of a couple of rectangular bimorph piezoelectric ceramic materials to measure the initial motion of each shear wave, thereby measuring the shear wave speed of the bed from the time difference in initial motion between the two receivers.

Magnetic head with small actuator

Abstract: PURPOSE:To realize miniaturization by controlling an azimuth angle or tape touch with high accuracy by controlling th tape touch by providing piezoelectric elements at both sides of a head, or controlling plural axia directions by using plural piezoelectric elements CONSTITUTION:One ends of two piezoelectric plates 3 are fixed on a magnetic head 1, and the other ends are fixed on the fixed terminal 4 of a cabinet, then, the contact of the magnetic head 1 with a recording medium 2 is controlled Or, a bimorph piezoelectric element consisting of a metallic substrate 3a with elasticity and a pair of piezoelectric elements 3b and 3c laminated by interposing the substrate is used A voltage supplying terminal on one side is connected to the substrate 3a, and the voltage supplying terminal on the other side to the substrate by connecting the elements 3b and 3c in common Tape tension can be controlled at the optimum level by fixing this on the magnetic head 1, detecting the strength of the tape tension, and impressing a voltage corresponding to the strength

Helical scanning magnetic recorder

Abstract: PURPOSE:To always obtain optimal head touch even when rotating speed is changed by attaching a piezoelectric element that displaces a rotary cylinder in the radius vector direction, and attaching a magnetic head to the piezoelectric element. CONSTITUTION:A magnetic head obliquely runs along a tape guide 2 molded on a fixed cylinder 1, a bimorph piezoelectric element 4 is attached to a rotary cylinder 3, and a head chip 6 is attached through an L-shaped head base 5 to the element 4. When an impressed voltage to the piezoelectric element 4 is changed, a head chip 6 is displaced in the direction of an array. The both edges of the piezoelectric element 4 are attached to a piezoelectric element supporting tool 7 formed on the rotary cylinder 3, and the head projecting quantity of a center part is variable by the change of the impressed voltage. In such configuration, since the cylinder is in a rotary type, a tape floating effect is obtained, and the tape can extremely smoothly runs. When the rotating speed is altered due to the alteration of a recording signal, the head projecting quantity can be optimized as well. Thus since the head touch can be always optimized, the best output can be stably obtained, a sliding noise and jitters are reduced, and a still life is extended.

Bimorph type piezoelectric element and manufacture thereof

Abstract: PURPOSE:To not only reduce the loss at a bonded layer but also to simplify a manufacturing process by a method wherein a reduction-resistant piezoelectric compound is employed, and an inner electrode is formed of metal such as copper, nickel, or iron, or alloy whose main component consists of the above metals. CONSTITUTION:If a reduction-resistant piezoelectric compound is used as a piezoelectric material, the material is not reduced in electric resistance when it is burned in an atmosphere low in an oxygen partial pressure. And, when metal containing copper, nickel, and iron is heated in an atmosphere low in an oxygen partial pressure, an oxide film is formed. Therefore, an inner electrode formed of the above metal can be strongly joined to a piezoelectric ceramic by selecting a concurrent burning atmosphere. Accordingly, paste of copper powder of the like is printed on sheets 21 and 23 of a reduction-resistant piezoelectric compound, the sheets 21 and 23 are pasted together and burned to form an inner electrode 22. Then, copper paste is applied thereon and baked for the formation of outer electrodes 24-26. By this setup, not only the loss is made to decrease at a bonded layer but also a manufacturing process can be simplified.

Piezoelectric rotary actuator

Abstract: PURPOSE:To perform fine angular control based on application voltage by employing a bimorph type actuator where two piezoelectric elements are sticked around a central electrode, i.e., a metal plate, then applying voltage onto the two piezoelectric elements and causing rotary motion of the rotary shaft. CONSTITUTION:Piezoelectric elements Q, D are polarized electrically in reverse direction. Central symbol P represents a resilient metallic board where Q, D, P are sticked to constitute a kind of spiral piezoelectric bimorph actuator. The direction of electrical polarization is set such that the piezoelectric element D elongates and the piezoelectric element Q contracts upon application of voltage between the anode X and cathode X' and the rotary shaft B rotates clockwise. When such principle is employed, rotary direction and angle of the rotary shaft B can be controlled by varying the magnitude and the direction of voltage to be applied between X and X'.

Piezoelectric linear motor

Abstract: PURPOSE: To obtain a piezoelectric linear motor, which operates with high accuracy, suitable for miniaturization and causes no fluctuation in quality even when mass produced, by constituting a clamping piezoelectric element of a bimorph piezoelectric element having high manufacturing accuracy and operational accuracy. CONSTITUTION: A bimorph piezoelectric actuator 6 bends upon application of a voltage and unclamped, and only a bimorph piezoelectric actuator is clamped. A straight advance multilayer piezoelectric actuator 3 elongates upon application of a voltage and the piezoelectric actuator 6 moves in x direction. When voltage is removed from the piezoelectric actuator 6, it is recovered and clamped again. When a voltage is applied on a piezoelectric element 4, the piezoelectric element 4 bends and unclamped and only the piezoelectric element 6 is clamped. When voltage is removed from the piezoelectric element 3, it is recovered entirely and contracts thus moving the piezoelectric element 4 and a movable part 11 in x direction. COPYRIGHT: (C)1992,JPO&Japio

Sheet peeling device

Abstract: PURPOSE:To reduce the size and cost of the device by composing part of a sheet peeling member of a bimorph piezoelectric element and applying a signal voltage thereto. CONSTITUTION:This device consists of a plate type sheet peeling arm 1 made of a bimorph piezoelectric element, a claw member 2 which is fixed to the tip part of the sheet peeling arm 1, and a control means 3 which applies the signal voltage corresponding to sheet conveyance to the bimorph piezoelectric element. Then when the bimorph piezoelectric element is applied with the signal voltage from the control means 3, the bimorph piezoelectric element deflects and is displaced to make a sheet peeling member abut on a rotary body, and the peeling member is conveyed in contact with the rotary body to peel a sheet. Consequently, the structure is simplified and made small and the cost is reduced.

Displacement generating device

Abstract: PURPOSE:To increase the quantity of displacement by impressing constant voltage which exceeds the greatest value of driving voltage to one side electrode of an electrostrictive actuator and impressing constant voltage which is lower than the least value of driving voltage to the other side electrode. CONSTITUTION:Output voltage of an amplifier 14 is impressed to electrodes 11b and 12b that are sandwiched between electrostrictive plates 11 and 12 out of respective electrodes of bimorph electrostrictive actuators consisting of two sheets of electrostrictive plates 11 and 12. Constant voltages (+E0, -E0) which are fed to the amplifier 14 are impressed to electrodes 11a and 12a at both surfaces of the above plates 11 and 12. Then constant voltage which exceeds the greatest value of driving voltage is impressed to the electrodes 11b and 12b that are formed at one side main surface of the electrostrictive actuators and constant voltage which is lower than the least value of driving voltage is impressed to the electrodes 11a and 12a that are formed at the other side main surface of the foregoing actuators. The bimorph electrostrictive actuators in which the electrostrictive plates 11 and 12 are laminated are driven by one driving amplifier 14 and further, the actuators have linear displacement for drive voltage without having hysteresis in displacement; besides, a displacement generating device having a large quantity of displacement to driving voltage is obtained.

Manufacture of bimorph type actuator

Abstract: PURPOSE:To obtain an actuator which is free from warps by burning a laminate comprising three layers in such a way that the second ceramic plate is sandwiched between the first ceramic plates or the first ceramic plate is sandwiched between the second ceramic plates and as soon as its burning is complete, by forming the laminate after removing a layer of the first or second ceramic plate CONSTITUTION:The second ceramic plate having small piezoelectric constant is sandwiched between the first ceramic plates having large piezoelectric constant and pressure is applied to obtained laminates to join them firmly After that, the joined laminates are burnt When burnt, no pressure is applied One side of the ceramic plate (the first ceramic plate in this case) which is burnt into three layers is polished to have two layers Then a bimorph type actuator is obtained by applying electrodes to both faces of the ceramic plates

Two-dimensional array photosensor

Abstract: PURPOSE:To obtain a small-sized two-dimensional array photosensor provided with a modulator by performing the parallel movement of a slit type shielding part with the aid of the combination of a feeding guide part, a circular arc vibration part and a space adjusting crank part. CONSTITUTION:The two-dimensional array photosensor is constituted of the slit type shielding plate 1, the feeding guide part 2, the adjusting crank part 4, a bimorph vibrator 5, a fixed part 6 and an optical sensor part 13. A bearing 3 is set in the feeding guide part so that the slit type shielding plate can be easily moved. In the adjusting crank part 4 for adjusting space, the angles on three points are allowed to be varied so as to adjust the space with the change of the angle. Thus, 50V voltage is impressed on the bimorph vibrator 5 to accomplish the displacement vibration of 0.2mm width at 30Hz frequency, thereby obtaining the two-dimensional array infrared sensor provided with the modulator.