Topic
Bimorph
About: Bimorph is a research topic. Over the lifetime, 3339 publications have been published within this topic receiving 51880 citations.
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23 Feb 2003
23 citations
TL;DR: In this paper, a multi-state latching translation stage is demonstrated using microelectromechanical systems technology, which is fabricated in bonded silicon-on-insulator material with an 85 µm thick bonded layer by single-layer patterning, deep reactive ion etching, undercutting and metallization.
Abstract: A multi-state latching translation stage is demonstrated using microelectromechanical systems technology. The mechanism is fabricated in bonded silicon-on-insulator material with an 85 µm thick bonded layer, by single-layer patterning, deep reactive ion etching, undercutting and metallization. The table position can be continuously adjusted by electrothermal buckling mode actuators or latched into a discrete set of states using a rack-and-tooth mechanism driven by electrothermal shape bimorph actuators. A travel range of more than 100 µm and a latching precision of 10 µm are demonstrated. The load carrying capacity of the device is in the milligram range, corresponding to the mass of many microoptical components.
23 citations
TL;DR: In this paper, an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars is presented.
Abstract: This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 m m in diameter. This inner mirror plate is connected to a rigid frame via a pair of torsion bars in two diametrically opposite ends located on the rotation axis. A pair of electrothermal bimorphs generates a force onto the perpendicular free ends of the mirror plate in the same angular direction. An array of electrothermal bimorph cantilevers deflects the rigid frame around a working angle of 45 ∘ for side-view scan. The performed scans reach large mechanical angles of 32 ∘ for the frame and 22 ∘ for the in-frame mirror. We denote three resonant main modes, pure flexion of the frame at 205 Hz , a pure torsion of the mirror plate at 1.286 kHz and coupled mode of combined flexion and torsion at 1.588 kHz . The micro device was fabricated through successive stacks of materials onto a silicon-on-insulator wafer and the patterned deposition on the back-side of the dual-reflective mirror is achieved through a dry film photoresist photolithography process.
23 citations
TL;DR: In this paper, the life cycle and thermomechanical behavior for quaternary CuAlNiMn alloy, developed through thermal evaporation technique on flexible Kapton polyimide substrate were investigated.
22 citations
TL;DR: In this paper, the performance of a ciliary microactuator array as a positioning stage inside a scanning electron microscope is described, which can provide micron scale positioning resolution with direct electronic control within the sample chamber.
Abstract: The performance of a ciliary microactuator array as a positioning stage inside a scanning electron microscope is described. Such arrays are attractive because they can provide micron scale positioning resolution with direct electronic control within the sample chamber. The present array uses thermal actuation of a polyimide bimorph to produce long-travel deflection of each cilium and electrostatic actuation to provide a low-power hold-down mode. Each cell in the array consists of four orthogonally oriented cilia which, with proper drive signals, can produce object motion along any direction within the plane of the array. Adapting this array for use inside a scanning electron microscope (SEM) requires only a small mounting block and a modest multiconductor feedthrough. Improved thermal isolation within the vacuum chamber of the SEM drastically reduces the electrical input power requirements over those in air, while still allowing full positioning resolution. The addition of a gold ground plane coating to t...
22 citations