Bimorph

About: Bimorph is a research topic. Over the lifetime, 3339 publications have been published within this topic receiving 51880 citations.

The use of M2 meter to correct for high-power laser aberrations

Abstract: We discuss the new type of the closed loop adaptive optical system with bimorph corrector and M2 meter. The study of some multi-dither algorithms to be used in the system is presented. Multi-dither approach is applied to 40-TW TiS fs laser in JAERI, Japan, to improve the focusability of laser beam. We demonstrate that it is possible to obtain 75% of input power in first diffraction maximum with use both phase conjugate and multi-dither adaptive optical systems.

Parallel proximal probe arrays with vertical interconnections

Abstract: This article presents the fabrication and the characteristics of 8×64, parallel, self-actuated, and independently addressable scanning proximal probes with through-silicon via interconnection passing completely through a silicon wafer. The low-resistance highly doped polysilicon through-wafer electrical interconnects have been integrated with scanning proximal probes (SPPs) to enable back side contacts to the application-specific integrated circuit used as an atomic force microscope control circuitry. Every SPP sensor contains a deflection sensor, thermally driven bimetal (bimorph) actuator, and sharp silicon tip. Dry etching-based silicon on insulator three-dimensional-micromachining technique is employed by the creation of the through-silicon vias and the SPP arrays keeping fully complementary metal-oxide semiconductor compatible process regime. The application of the vertical interconnection technology in large-scale two-dimensional cantilever arrays with off-plane bent cantilevers over the chip’s surf...

A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten

Abstract: This paper reports a fast, robust electrothermal bimorph micromirror with a symmetric inverse-series-connected bimorph actuator. The actuator is made up of symmetric Cu-W bimorphs with high sensitivity and fast thermal response. A unique backside DRIE release process is developed to keep the mirror surface intact during release. The micromirror is able to perform both piston and tip-tilt motion. A maximum piston displacement of 169 µm is achieved with lateral shift less than 1.5 µm at the driving voltage of only 2.3 V. The maximum optical angle achieved is ±13° at 2.3 V. This mirror gives fast thermal response of less than 7.5 ms. The resonances of the piston and tip-tilt modes are 1.58 kHz and 2.74 kHz, respectively.

L-shaped piezoelectric motor-Part I: Design and experimental analysis

Abstract: This paper proposes an L-shaped piezoelectric motor consisting of two piezoelectric bimorphs of different lengths arranged perpendicularly to each other. The coupling of the bending vibration mode of the bimorphs results in an elliptical motion at the tip. A detailed finite element model was developed to optimize the dimensions of bimorph to achieve an effective coupling at the resonance frequency of 246 Hz. The motor was characterized by developing rotational and linear stages. The linear stage was tested with different friction contact surfaces and the maximum velocity was measured to be 12 mm/s. The rotational stage was used to obtain additional performance characteristics from the motor: maximum velocity of 120 rad/s, mechanical torque of 4.7 × 10-5 N·m, and efficiency of 8.55%.

High temperature bimorph actuator

Abstract: A bimorph actuator has been found that uses commonly available piezoelectric material and is operational up to about 150° C. or one half of Curie temperature, in that it does not exhibit depolarization due to negative electric fields and/or elevated temperature. This result is accomplished by driving both piezoelectric materials with a positive electric field along the polarization direction.