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Bimorph

About: Bimorph is a research topic. Over the lifetime, 3339 publications have been published within this topic receiving 51880 citations.


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Journal ArticleDOI
TL;DR: An overview of piezoelectric energy harvesting technology along with a discussion of proof of concept devices, relevant governing equations, and figures of merit is provided in this paper, where energy capture from the operation of a novel shear and elastic modulus indentation device subjected to applied voltage and vibration is discussed.
Abstract: Providing efficient and clean power is a challenge for devices that range from the micro to macro in scale. Although there has been significant progress in the development of micro-, meso-, and macro-scale power supplies and technologies, realization of many devices is limited by the inability of power supplies to scale with the diminishing sizes of CMOS-based technology. Here, the authors provide an overview of piezoelectric energy harvesting technology along with a discussion of proof of concept devices, relevant governing equations, and figures of merit. They present two case studies: (a) energy capture from the operation of a novel shear and elastic modulus indentation device subjected to applied voltage and (b) energy capture from vibrating commercial bimorph piezoelectric structures mounted on household appliances. Lastly, areas of development needed for realization of commercial energy harvesting devices are suggested.

69 citations

Proceedings ArticleDOI
20 Feb 1989
TL;DR: In this article, a bimorph structure and an integrated heat source are described for electromechanical signal conversion, and the application of these transducers for microvalves, optical components, manipulators, and motors is discussed.
Abstract: Microactuators for electromechanical signal conversion are described. Basic elements of the transducer are a bimorph structure and an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature-controlled deformation of the the bimorph structure occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC (integrated circuit) voltage levels, allowing further system integration. The conversion characteristics are described, and the application of these transducers for microvalves, optical components, manipulators, and motors is discussed. >

69 citations

Journal ArticleDOI
TL;DR: An organic thin-film ciliary microactuator array using independent thermal and electrostatic actuation is described in this article, which has immediate applications for positioning, alignment, inspection, and assembly of small parts, such as IC dice.
Abstract: An organic thin-film ciliary microactuator array using independent thermal and electrostatic actuation is described. A polyimide thermal bimorph structure provides for large angle deflection with high load capacity. Electrostatic electrodes provide low-power hold-down, capacitive sensing, and feedback control capabilities. Integrating four orthogonally oriented actuators into a unit cell and replicating this cell into an array allows for precise movement of small objects in arbitrary directions. The ciliary microactuator array has immediate applications for positioning, alignment, inspection, and assembly of small parts, such as IC dice, with micron-scale resolution.

68 citations

Journal ArticleDOI
TL;DR: In this paper, thermal actuator-based microtweezers with three different driving configurations have been designed, fabricated and characterized, and finite element analysis has been used to model the device performance.
Abstract: Thermal actuator-based microtweezers with three different driving configurations have been designed, fabricated and characterized. Finite element analysis has been used to model the device performance. It was found that one configuration of microtweezer, based on two lateral bimorph thermal actuators, has a small displacement (tip opening of the tweezers) and a very limited operating power range. An alternative configuration consisting of two horizontal hot bars with separated beams as the arms can deliver a larger displacement with a much-extended operating power range. This structure can withstand a higher temperature due to the wider beams used, and has flexible arms for increased displacement. Microtweezers driven by a number of chevron structures in parallel have similar maximum displacements but at a cost of higher power consumption. The measured temperature of the devices confirms that the device with the chevron structure can deliver the largest displacement for a given working temperature, while the bimorph thermal actuator design has the highest operating temperature at the same power due to its thin hot arm, and is prone to structural failure.

68 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202358
2022116
202191
202090
2019123
2018117