Topic
Bimorph
About: Bimorph is a research topic. Over the lifetime, 3339 publications have been published within this topic receiving 51880 citations.
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TL;DR: In this article, a polyvinylidene fluoride (PVDF) based bimorph actuator with an attached mirror on the tip is proposed for high speed laser beam manipulation.
Abstract: This work focuses on some promising applications of polyvinylidene fluoride (PVDF) based bimorph actuators in microengineering. The actuator of several centimeters in length and 100 mu m in thickness takes advantage of the structural and electromechanical capabilities of the PVDF. These characteristics make the proposed PVDF based bimorph ideal for a laser scanner/switcher where high speed laser beam manipulation is feasible. This domain requires light and efficient actuators capable of actuating the mirror surface at kHz frequency range and having a weight of less than 200 mg and volume of less than 150 mm(3). Analytical and finite element (FE) modeling were used to design the bimorph actuator with an attached mirror on the tip. Results of the modeling were also used to establish dimension criteria for the proposed bimorphs with an attached mirror. Some clean and gray room processing was needed to fabricate the bimorph actuators. Static and dynamic characterization was carried out to validate the response of the proposed actuator. Other bimorph based configurations were analyzed and compared to the proposed one. Results indicate that the PVDF bimorph actuator responds conveniently in a range up to 3 kHz for beam scanning tasks. The same principle may be implemented to 2 DoF actuators. Results obtained from modeling tools indicate a similar performance in terms of displacement. In addition, due to the intrinsic properties of the PVDF, the actuation system is compact which is advantageous for other domains such as biomedical and aerospace. (C) 2012 Elsevier B.V. All rights reserved.
36 citations
TL;DR: In this paper, the thermal actuation characterisitcs of a novel Micro-Electro-Mechanical mirror fabricated in a standard CMOS process is presented, which consists of a plate suspended over a bulk-etched pit by four cantilever flexures, two of which are vertical thermal actuators.
35 citations
Patent•
16 Apr 1976
TL;DR: Improved deflection of a bimorph having a pair of electrically poled piezo-ceramic elements bonded to opposite sides of a common substrate is achieved by applying to each element a deflection voltage whose polarity is always in the poling direction of the element to which it is applied.
Abstract: Improved deflection of a bimorph having a pair of electrically poled piezo-ceramic elements bonded to opposite sides of a common substrate is achieved by applying to each element a deflection voltage whose polarity is always in the poling direction of the element to which it is applied. By maintaining the polarity of the deflection voltages in the poling direction of the piezo-ceramic elements, large amplitude deflection voltages can be used without de-polarizing the piezo-ceramic elements.
35 citations
TL;DR: In this paper, the effects of dimensional cavity parameters, height, and orifice diameter, on synthetic jet peak velocities were investigated numerically and experimentally, utilizing two piezoelectric composite diaphragms, Bimorph and Thunder ®.
Abstract: Effects of dimensional cavity parameters, height, and orifice diameter, on synthetic jet peak velocities are investigated numerically and experimentally, utilizing two piezoelectric composite diaphragms, Bimorph and Thunder ®. The system is modeled using a RNG κ—e model with a mesh generated using a tri-pave unstructured scheme and the diaphragms are modeled as moving boundaries. The model compares within 15% for a Bimorph but underpredicts the results for Thunder® by more than 30%. For a Bimorph, both cavity parameters are relevant with the orifice diameter having a higher effect. For Thunder® however, only orifice diameter is found to be statistically significant.
35 citations