Topic
Buffer gas
About: Buffer gas is a research topic. Over the lifetime, 3565 publications have been published within this topic receiving 47283 citations.
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25 Jun 1997
TL;DR: In this paper, the authors proposed a method to reduce the consumption of rare gas including helium gas and easily generate plasma under atmospheric pressure by using high frequency power supply to generate plasma.
Abstract: PROBLEM TO BE SOLVED: To greatly reduce the consumption of rare gas including helium gas and easily generate plasma under atmospheric pressure. SOLUTION: Oxygen gas and helium gas are supplied from an oxygen gas cylinder 34 and a helium gad cylinder 36 to a gas flow passage 23 formed with a dielectric 1 and high frequency voltage is applied between electrodes 2a, 2b with a high frequency power supply to generate plasma in a plasma generation area 22. Then, the supply of the helium gas is stopped, plasma is generated only by oxygen gas and a resulting active component is radiated to a material to be treated 8 to perform ashing or etching treatment to the material. COPYRIGHT: (C)1998,JPO
23 citations
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TL;DR: In this paper, the authors extended buffer gas cooling to trap atoms with small effective magnetic moments (i.e., 1μB) and thermally isolate atoms with μeff ≥ 1.8μB.
Abstract: We have extended buffer gas cooling to trap atoms with small effective magnetic moments μeff. For μeff ≥ 3μB, 1012 atoms were buffer gas cooled, trapped, and thermally isolated in ultra high vacuum with roughly unit efficiency. For μeff < 3μB, the fraction of atoms remaining after full thermal isolation was limited by two processes: wind from the rapid removal of the buffer gas and desorbing helium films. In our current apparatus we trap atoms with μeff ≥ 1μB, and thermally isolate atoms with μeff ≥ 1.8μB. This triples the number of atomic species which can be buffer gas cooled and trapped in thermal isolation. Extrapolation of our results and simulations of the loss processes indicate that it is possible to trap and evaporatively cool 1μB atoms using buffer gas cooling.
23 citations
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23 citations
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IBM1
TL;DR: In this paper, a process for plasma cleaning and an improved gas mixture for use in a plasma cleaning process are presented. But the present method requires the use of a small percentage of a large mass inert gas such as Argon or Krypton.
Abstract: The present invention provides a process for plasma cleaning and an improved gas mixture for use in a plasma cleaning process. The gas mixture of the present invention includes the normal process gases such as oxygen and carbon tetrafluoride. However, the mixture also includes a small percentage of a large mass inert gas such as Argon or Krypton. This large mass gas molecule mechanically removes any polymerized fluorocarbon that forms on the surface being cleaned thereby significantly enhancing the rate of etch or cleaning. It has been found that five to twenty percent of the inert gas is the preferred range and that ten percent produces optimum results.
23 citations
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TL;DR: In this article, a laser induced breakdown spectroscopy (LIBS) measurement of a thin Cu(In,Ga)Se2 (CIGS) absorber layer was performed under the conditions of open air and argon (Ar) gas jet flow.
Abstract: Laser induced breakdown spectroscopy (LIBS) measurement of a thin Cu(In,Ga)Se2 (CIGS) absorber layer was performed under the conditions of open air and argon (Ar) gas jet flow (25 L min−1). A second harmonic Q-switched Nd:YAG laser (λ = 532 nm, τ = 5 ns, top-hat profile) was employed for the ablation of co-evaporated CIGS samples. The use of an Ar gas jet for the LIBS measurement of CIGS thin films leads to two significant differences from the open air measurement results that are important from the precision point of view: (i) the increase of signal intensity and (ii) decrease of relative standard deviation (RSD) of measured intensity or intensity ratios. From calculation of the degree of intensity enhancement, it was shown that the enhancement of signal intensity is primarily due to the increase of plasma temperature and electron density under Ar buffer gas environment. It was also found that in addition to the influence of Ar gas itself the gasdynamic effects of the Ar gas jet contribute significantly to the reduction of RSD.
23 citations